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1. 发明专利

JP2013083704A Mask and mask member used for the same 有权
标题翻译：面具和面膜成员用于此
公开(公告)号：JP2013083704A
公开(公告)日：2013-05-09
申请号：JP2011221883
申请日：2011-10-06
申请人： V Technology Co Ltd , 株式会社ブイ・テクノロジー
发明人： KAJIYAMA KOICHI , MIZUMURA MICHINOBU , KUDO SHUJI , KIMURA ERIKO
IPC分类号： G03F1/68 , G03F7/20
摘要： PROBLEM TO BE SOLVED: To make it possible to form a thin film pattern with high definition.SOLUTION: There is provided a mask 1 for forming a thin film pattern having a fixed shape on a substrate, which comprises a resin film 2 transmitting visible light and a holding member 3 constituted by a plate body in which penetrating openings 5 larger than the thin film pattern are formed in correspondence with a predetermined thin film pattern formation region on the substrate and which holds the film 2, wherein the film 2 has an opening pattern 4 having the same shape as the thin film pattern inside the openings 5 of the holding member 3 in correspondence with the thin film pattern formation region on the substrate.
摘要翻译：要解决的问题：使得可以形成具有高清晰度的薄膜图案。解决方案：提供一种用于在基板上形成具有固定形状的薄膜图案的掩模1，该掩模1包括透射可见光的树脂膜2和由板体构成的保持部件3，其中穿孔5大于形成与基板上的预定薄膜图案形成区域相对应的薄膜图案，并且保持薄膜2，其中薄膜2具有与开口5内的薄膜图案相同形状的开口图案4，保持构件3与基板上的薄膜图案形成区域对应。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2013041686A Vacuum deposition method, vacuum deposition apparatus and manufacturing method of organic el display device 有权
标题翻译：真空沉积方法，有机EL显示装置的真空沉积装置和制造方法
公开(公告)号：JP2013041686A
公开(公告)日：2013-02-28
申请号：JP2011176252
申请日：2011-08-11
申请人： V Technology Co Ltd , 株式会社ブイ・テクノロジー
发明人： KUDO SHUJI , KIMURA ERIKO , MIZUMURA MICHINOBU , KAJIYAMA KOICHI
IPC分类号： H05B33/10 , C23C14/04 , C23C14/24 , H01L51/50 , H05B33/12
摘要： PROBLEM TO BE SOLVED: To facilitate deposition of a high definition thin film pattern without using a shadow mask.SOLUTION: The vacuum deposition method includes a step for charging the deposition molecules 23 of an organic EL material evaporated from an evaporation source 2 before reaching a substrate 5 for organic EL display, a step for electrifying a resistor 21 provided in contact electrically with the surface of a pixel electrode 14, located corresponding to a point where a luminous layer 16 is formed, on the substrate side by applying a voltage having a polarity different from the charging polarity of the charged deposition molecules 23 so that a temperature limited not to cause sublimation of the organic EL material occurs therein, and a step for electrifying a resistor 21 provided in contact electrically with the surface of a pixel electrode 14, located corresponding to a point where a luminous layer 16 is not formed, on the substrate side by applying a voltage having the same polarity as the charging polarity of the charged deposition molecules 23 so that a temperature sufficient for causing sublimation of the organic EL material occurs therein.
摘要翻译：要解决的问题：为了便于在不使用荫罩的情况下沉积高清晰度薄膜图案。解决方案：真空沉积方法包括在到达用于有机EL显示的基板5之前对从蒸发源2蒸发的有机EL材料的沉积分子23进行充电的步骤，用于使电气接触设置的电阻器21通电通过施加与带电沉积分子23的充电极性不同的极性的电压，使基板侧的与对应于形成发光层16的点相对应的像素电极14的表面，使得温度不受限制在其中发生有机EL材料的升华，并且使基板一侧的与形成有发光层16的点对应地设置在与像素电极14的表面电接触的电阻器21的步骤通过施加与带电沉积分子23的充电极性相同极性的电压，使得足够的温度c 发生有机EL材料的有效升华。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2013209710A Vapor-deposition mask, method of manufacturing the same, and method of manufacturing organic el display device 有权
标题翻译：蒸气沉积掩模，其制造方法和制造有机EL显示装置的方法
公开(公告)号：JP2013209710A
公开(公告)日：2013-10-10
申请号：JP2012080707
申请日：2012-03-30
申请人： V Technology Co Ltd , 株式会社ブイ・テクノロジー
发明人： KUDO SHUJI , MIZUMURA MICHINOBU , KAJIYAMA KOICHI , KIMURA ERIKO
IPC分类号： C23C14/24 , H01L51/50 , H05B33/02 , H05B33/08 , H05B33/10 , H05B33/12
摘要： PROBLEM TO BE SOLVED: To form a highly minute thin-film pattern by vapor deposition.SOLUTION: A vapor-deposition mask 1 is used to form a plurality of thin-film patterns arranged at constant arrangement pitches on a substrate by vapor deposition, and includes: a resin film 2 where a plurality of opening patterns 4 arranged at the same arrangement pitches as those of the thin-film pattern and having the same size and shape as those of the thin-film pattern are provided to pass a visible light; and a holding member 3 made of magnetic metallic member 12, which is in contact with one surface 2a of the resin film 2 and has larger through-openings 5 in size and shape than the opening patterns 4 corresponding to the opening patterns 4. In the opening pattern 4, the opening area on the side of one surface 2a of the resin film 2 is the same as an area of the thin-film pattern, and the opening area on the side of the other surface 2b, opposite to the one surface 2a, is larger than that on the side of one surface 2a.
摘要翻译：要解决的问题：通过气相沉积形成高分子薄膜图案。解决方案：使用气相沉积掩模1，通过气相沉积在基板上形成以恒定布置间距布置的多个薄膜图案，包括：树脂膜2，其中设置有与薄膜图案相同的排列间距布置并且具有与薄膜图案相同的尺寸和形状的多个开口图案4以通过可见光; 以及与磁性金属构件12形成的保持构件3，其与树脂膜2的一个表面2a接触，并且具有比与开口图案4对应的开口图案4的尺寸和形状更大的通孔5.在开口图案4，树脂膜2的一个表面2a侧的开口面积与薄膜图案的面积相同，另一个表面2b的与该表面相对的开口面积如图2a所示，比一个表面2a的侧面大。

4. 发明专利

JP2017082313A 成膜マスクの製造方法审中-公开
公开(公告)号：JP2017082313A
公开(公告)日：2017-05-18
申请号：JP2015214330
申请日：2015-10-30
申请人：株式会社ブイ・テクノロジー , V Technology Co Ltd
发明人： KUDO SHUJI , KIMURA ERIKO , KOBAYASHI IKUNORI
IPC分类号： C23C14/04 , B23K26/18 , B23K26/38 , H01L51/50 , H05B33/10
CPC分类号： B23K26/18 , B23K26/38 , C23C14/04 , H01L51/50 , H05B33/10
摘要：【課題】開口パターンの縁部におけるバリの発生を簡単なプロセスで抑制する。【解決手段】レーザ加工可能な樹脂製フィルム4の表裏何れか一方の面に、前記フィルム4とは異なる樹脂材料から成り、可視光よりも波長の短いレーザ光L1を吸収する樹脂製のサポート層2を形成する工程と、前記フィルム4の前記サポート層2を形成した面とは反対側からレーザ光L1を照射して、該フィルム4を貫通する開口パターン3を形成する工程と、前記フィルム4に対して前記サポート層2を選択除去する工程と、を行うものである。【選択図】図1

5. 发明专利

JP2013171081A Light deflecting element 审中-公开
标题翻译：光偏转元件
公开(公告)号：JP2013171081A
公开(公告)日：2013-09-02
申请号：JP2012033221
申请日：2012-02-17
申请人： V Technology Co Ltd , 株式会社ブイ・テクノロジー
发明人： MIZUMURA MICHINOBU , KUDO SHUJI , ISHIKAWA DAIGO , SENABA TADASHI , KIMURA ERIKO
IPC分类号： G02F1/29
CPC分类号： G02F1/29 , G02F2201/18 , G02F2203/24
摘要： PROBLEM TO BE SOLVED: To provide a light deflecting element capable of deflecting a laser beam having a large beam diameter and making the laser beam scan at high speed.SOLUTION: Electro-optic crystal materials 1a-1e are arranged in a plate thickness direction of the same, electrodes 2b-2e are interposed between the respective electro-optic crystal materials, and an electrode 2a is provided on a top surface and an electrode 2f is provided on a bottom surface. Each of the electro-optic crystal materials 1a-1e is provided with a first area of which a crystal optical axis faces upward and a second area of which a crystal optical axis faces downward, and the second area of an electro-optic crystal material of a lower layer is arranged directly under the first area of an electro-optic crystal material of an upper layer. Electric potential E is applied to the electrodes 2a, 2c, 2e and ground potential is applied to the electrodes 2b, 2d, 2f.
摘要翻译：要解决的问题：提供一种能够偏转具有大光束直径的激光束并使激光束以高速扫描的光偏转元件。解决方案：电光晶体材料1a-1e沿板厚方向相同的是，电极2b-2e插在相应的电光晶体材料之间，电极2a设置在顶表面上，电极2f设置在底表面上。每个电光晶体材料1a-1e设置有晶体光轴面向上的第一区域和晶体光轴面朝下的第二区域，并且电光晶体材料的第二区域下层布置在上层的电光晶体材料的第一区域的正下方。对电极2a，2c，2e施加电位E，将电位施加到电极2b，2d，2f。

6. 发明专利

JP2013041685A Vacuum deposition method, vacuum deposition apparatus, manufacturing method of organic el display device and organic el display device 有权
标题翻译：真空沉积方法，真空沉积装置，有机EL显示装置和有机EL显示装置的制造方法
公开(公告)号：JP2013041685A
公开(公告)日：2013-02-28
申请号：JP2011176251
申请日：2011-08-11
申请人： V Technology Co Ltd , 株式会社ブイ・テクノロジー
发明人： KUDO SHUJI , KIMURA ERIKO , MIZUMURA MICHINOBU , KAJIYAMA KOICHI
IPC分类号： H05B33/10 , C23C14/04 , H01L51/50 , H05B33/12
摘要： PROBLEM TO BE SOLVED: To facilitate deposition of a high definition thin film pattern without using a shadow mask.SOLUTION: The manufacturing method of an organic EL display device in which a luminous layer of an organic EL material is formed by evaporating the organic EL material in a vacuum vessel, and depositing the organic EL material selectively on a plurality of pixel electrodes provided in matrix on the surface of a substrate for organic EL display, includes a step for not electrifying a resistor provided in contact electrically with the surface of a pixel electrode, located corresponding to a point where the luminous layer is formed, on the substrate side but electrifying the resistor so that a temperature limited not to cause sublimation of the organic EL material occurs therein, and a step for electrifying a resistor provided in contact electrically with the surface of a pixel electrode, located corresponding to the point where the luminous layer is not formed, on the substrate side so that a temperature sufficient for causing sublimation of the organic EL material occurs therein.
摘要翻译：要解决的问题：为了便于在不使用荫罩的情况下沉积高清晰度薄膜图案。解决方案：通过在真空容器中蒸发有机EL材料并且将有机EL材料选择性地沉积在多个像素电极上而形成有机EL材料的发光层的有机EL显示装置的制造方法在用于有机EL显示器的基板的表面上以矩阵形式提供的步骤包括：在基板侧上不使带有与形成有发光层的点相对应地与像素电极的表面接触的电阻器通电的步骤但是使电阻器通电，使得限制不引起有机EL材料升华的温度发生在其中，并且使电阻器设置为与像素电极的表面电接触的步骤，该电阻器对应于发光层为没有形成在基板侧，使得发生足以引起有机EL材料升华的温度。版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2014077186A Method for producing metal mask 审中-公开
标题翻译：生产金属掩模的方法
公开(公告)号：JP2014077186A
公开(公告)日：2014-05-01
申请号：JP2012226829
申请日：2012-10-12
申请人： V Technology Co Ltd , 株式会社ブイ・テクノロジー
发明人： KUDO SHUJI , MIZUMURA MICHINOBU , KAJIYAMA KOICHI , KIMURA ERIKO
IPC分类号： C25D1/00 , C25D1/08 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To form uniformly a high-definition opening pattern in a plane of a large area metal mask corresponding to a large-sized substrate.SOLUTION: A method for producing a metal mask for forming a plurality of thin film patterns on a substrate includes: a plating step S1 to form a magnetic metal member with an opening pattern identical to a shape dimension of the thin film pattern corresponding to forming positions of the plurality of thin film patterns on a resin film by electrolytic plating; and a film removal step S3 to remove the film from the magnetic metal member subsequent to the plating step S1.
摘要翻译：要解决的问题：在对应于大尺寸基板的大面积金属掩模的平面内均匀地形成高清晰度开口图案。解决方案：一种用于在金属掩模上形成多个薄膜图案的方法基板包括：电镀步骤S1，用于通过电解电镀形成具有与通过电解电镀在树脂膜上的多个薄膜图案的形成位置相对应的薄膜图案的形状尺寸相同的开口图案的磁性金属构件; 以及膜移除步骤S3，以在电镀步骤S1之后从磁性金属构件上除去膜。

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