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    • 2. 发明申请
    • LIGHT SOURCE APPARATUS
    • 光源设备
    • US20140265869A1
    • 2014-09-18
    • US14207709
    • 2014-03-13
    • USHIO DENKI KABUSHIKI KAISHA
    • Fumitoshi Takemoto
    • H05B41/39
    • H05B41/39
    • A light source apparatus is adapted to be shared by excimer lamps. An IC tag is disposed at each lamp, and the IC tag stores information identifying the lamp. A storage unit of the light source apparatus stores information identifying a usable lamp (or usable lamps) for the light source apparatus, an emission wavelength of the lamp, and a sensitivity correction value of an optical sensor that corresponds to the emission wavelength. When the light source apparatus is driven to cause the lamp to light, the information stored in the IC tag and information stored in the storage unit are collated and it is determined whether the lamp is usable and the emission wavelength of the lamp is a preset emission wavelength. If it is determined that the lamp is usable and the emission wavelength is appropriate, the sensitivity of the optical sensor is corrected with the correction value.
    • 光源装置适于由准分子灯共享。 在每个灯处设置IC标签,并且IC标签存储识别灯的信息。 光源装置的存储单元存储识别用于光源装置的可用灯(或可用灯)的信息,灯的发射波长和对应于发射波长的光学传感器的灵敏度校正值。 当光源装置被驱动以使灯点亮时,存储在IC标签中的信息和存储在存储单元中的信息进行整理,并且确定灯是否可用,并且灯的发射波长是预设发射 波长。 如果确定灯可用并且发射波长适当,则用校正值校正光学传感器的灵敏度。
    • 7. 发明授权
    • Light source apparatus
    • 光源装置
    • US09125283B2
    • 2015-09-01
    • US14207709
    • 2014-03-13
    • USHIO DENKI KABUSHIKI KAISHA
    • Fumitoshi Takemoto
    • H05B37/02H05B41/39
    • H05B41/39
    • A light source apparatus is adapted to be shared by excimer lamps. An IC tag is disposed at each lamp, and the IC tag stores information identifying the lamp. A storage unit of the light source apparatus stores information identifying a usable lamp (or usable lamps) for the light source apparatus, an emission wavelength of the lamp, and a sensitivity correction value of an optical sensor that corresponds to the emission wavelength. When the light source apparatus is driven to cause the lamp to light, the information stored in the IC tag and information stored in the storage unit are collated and it is determined whether the lamp is usable and the emission wavelength of the lamp is a preset emission wavelength. If it is determined that the lamp is usable and the emission wavelength is appropriate, the sensitivity of the optical sensor is corrected with the correction value.
    • 光源装置适于由准分子灯共享。 在每个灯处设置IC标签,并且IC标签存储识别灯的信息。 光源装置的存储单元存储识别用于光源装置的可用灯(或可用灯)的信息,灯的发射波长和对应于发射波长的光学传感器的灵敏度校正值。 当光源装置被驱动以使灯点亮时,存储在IC标签中的信息和存储在存储单元中的信息进行整理,并且确定灯是否可用,并且灯的发射波长是预设发射 波长。 如果确定灯可用并且发射波长适当,则用校正值校正光学传感器的灵敏度。