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1. 发明申请

WO1997041589A1 EXTERNAL ELECTRODE FLUORESCENT LAMP AND ILLUMINATION UNIT 审中-公开
标题翻译：外部电极荧光灯和照明单元
公开(公告)号：WO1997041589A1
公开(公告)日：1997-11-06
申请号：PCT/JP1997001160
申请日：1997-04-04
申请人： USHIO DENKI KABUSHIKI KAISHA , YOKOKAWA, Yoshihisa , TADA, Motonori , INOUE, Masaki , YOSHIOKA, Masaki
发明人： USHIO DENKI KABUSHIKI KAISHA
IPC分类号： H01J65/00
CPC分类号： H01J61/025 , H01J61/70 , H01J65/046
摘要： An external electrode fluorescent lamp and an illumination unit using the same. An external electrode fluorescent lamp (10) that is made up of a glass tube (1) of which the inner surface is coated with a fluorescent material (3) and in which a predetermined amount of a rare gas is sealed, a pair of electrodes (2, 2') provide on the outer surface of the glass tube (1) in the axial direction, and a reflective member provided on the opposite side of the aperture (4) from which light is externally emitted. Part of the electrode (2, 2') is transparent. A reflective member (6') is provided at the transparent portion. Even when the transparent portion is provided at the part of the electrode (2, 2'), the capacitance of the lamp does not decrease considerably and the energy supplied to the lamp is close to that in the structure with no transparent portion. Hence, the light output is increased by the amount corresponding to the effect of the reflective member (6'). The transparent portion may be arbitrarily shaped, for example, slits or plural openings. Since the external electrode-type fluorescent lamp (10) has transparent external electrodes, light is emitted out of the aperture (4) and the transparent portions (6) formed on the external electrodes (2, 2'). The light emitted from the transparent portion (6) is reflected by the reflective member (11) and then radiated from the opening of the U-shaped reflective member. The lamp (10) has a structure where the external electrode is partly transparent and light passing through the transparent portion (6) is reflected by a reflective member (11) so that the light can illuminate the illumination area; in this way the amount of light is increased.
摘要翻译：外部电极荧光灯和使用其的照明单元。外部电极荧光灯（10）由玻璃管（1）构成，其内表面涂有荧光材料（3），其中预定量的稀有气体被密封，一对电极（2,2'）在轴向方向上在玻璃管（1）的外表面上提供反射构件，以及反射构件，设置在孔（4）的相反侧，光从外部排出。电极（2,2'）的一部分是透明的。反射构件（6'）设置在透明部分。即使当透明部分设置在电极（2,2'）的部分时，灯的电容也不会显着降低，并且提供给灯的能量接近于没有透明部分的结构中的能量。因此，光输出增加与反射构件（6'）的作用相对应的量。透明部分可以是任意形状的，例如狭缝或多个开口。由于外部电极型荧光灯（10）具有透明的外部电极，所以从形成在外部电极（2,2'）上的孔（4）和透明部（6）的外部发出光。从透明部分（6）发射的光被反射构件（11）反射，然后从U形反射构件的开口辐射。灯（10）具有外部电极部分透明的结构，并且穿过透明部分（6）的光被反射部件（11）反射，使得光线可以照亮照明区域; 以这种方式，光量增加。

2. 发明申请

WO2015025218A1 VERFAHREN UND VORRICHTUNG ZUR KÜHLUNG VON STRAHLUNGSQUELLEN AUF BASIS EINES PLASMAS 审中-公开
标题翻译：方法和设备冷却辐射源基于等离子
公开(公告)号：WO2015025218A1
公开(公告)日：2015-02-26
申请号：PCT/IB2014/002055
申请日：2014-08-21
申请人： USHIO DENKI KABUSHIKI KAISHA
发明人： WEVERS, Rutger , BECKERS, Job , JONKERS, Jeroen , CONRADS, Ralf, Gordon
IPC分类号： H05G2/00
CPC分类号： H05G2/005
摘要： Die Erfindung betrifft ein Verfahren und Vorrichtungen zur Kühlung von Strahlungsquellen auf Basis eines Plasmas. Die Aufgabe der Erfindung, eine robuste und effektive Kühlung von plasmabasierten Strahlungsquellen auch bei stark wechselndem Wärmeeintrag ohne aufwändige Temperaturregelung und ohne Gefahr des Erstarrens eines metallischen Kühlmittels zu realisieren, wird erfindungsgemäß gelöst, indem die umlaufende Komponente (12) bei deren Bewegung durch partielles Eintauchen in ein erschmolzenes Metall als erstes Kühlmittel (11) gekühlt wird, eine sekundäre Kühlung durch thermischen Kontakt des ersten Kühlmittels (11) mit einem zweiten Kühlmittel (21) in einem geschlossenen Gefäß (2) erfolgt, wobei ein hermetisch separierter Gefäßteil (15; 18) des ersten Kühlmittels (11) das zweite Kühlmittel (21), das eine Siedetemperatur (T BC2 ) oberhalb der Schmelztemperatur (T MC1 ) des ersten Kühlmittels (11) aufweist, verdampft und in einen Dampfraum (22) des geschlossenen Gefäßes (2) überführt, die flüssige Phase (21.1) des zweiten Kühlmittels (21) auf eine Temperatur oberhalb der Schmelztemperatur (T MC1 ) des ersten Kühlmittels (11) temperiert wird, und eine tertiäre Kühlung durch einen Kondensator (3) im Dampfraum (22) des geschlossenen Gefäßes (2) des zweiten Kühlmittels (21) erfolgt.
摘要翻译：本发明涉及一种用于冷却等离子的基础上的辐射源的方法和装置。本发明的目的是提供一种基于等离子体的辐射源健壮和有效的冷却，即使大大不同程度的热没有广泛的温度控制和不带金属冷却剂来实现的凝固的风险，根据本发明，通过绕动部件（12）实现的移动通过在部分浸入一个erschmolzenes金属作为第一冷却装置（11）被冷却，通过（11）的第一冷却装置的热接触的二次冷却在与第二冷却装置（21）在封闭容器（2），其特征在于，气密分隔容器部分（15; 18）传送包括所述第一冷却剂（11），所述第二冷却剂（21）具有熔融温度以上的第一冷却剂的（TMC1）（11）蒸发并到密闭容器内的蒸汽空间（22）的沸点（TBC2）（2）所述第二冷却剂（21）的液相（21.1）与SCH以上的温度 melztemperatur第一冷却剂（11）是加热的（TMC1），并且通过在所述第二冷却剂（21）的密闭容器（2）的蒸汽空间（22）的冷凝器（3）的叔冷却。

3. 发明授权

US12128150B2 Ultraviolet irradiation device 有权
公开(公告)号：US12128150B2
公开(公告)日：2024-10-29
申请号：US17764078
申请日：2020-10-05
申请人： Ushio Denki Kabushiki Kaisha
发明人： Hideaki Yagyu
IPC分类号： A61L2/10
CPC分类号： A61L2/10 , A61L2202/11
摘要： Provided is a compact ultraviolet irradiation device in which a degree of an adverse effect on the human body is suppressed. The ultraviolet irradiation device includes: a lamp house on the surface of which a light extraction surface is formed; an excimer lamp accommodated in the lamp house, a main emission wavelength of which belongs to a first wavelength band of 190-225 nm; an optical filter that is arranged on the light extraction surface and substantially transmits the ultraviolet light in the first wavelength band and substantially reflect the ultraviolet light of a wavelength of 240-300 nm; and a reflecting surface that is a surface located outside the luminous tube of the excimer lamp and inclined with respect to the light extraction surface, the reflecting surface exhibiting reflectivity with respect to the ultraviolet light in the first wavelength band.

4. 发明公开

US20240332045A1 OPTICAL HEATING APPARATUS AND LIGHT SOURCE UNIT 审中-公开
公开(公告)号：US20240332045A1
公开(公告)日：2024-10-03
申请号：US18622319
申请日：2024-03-29
申请人： Ushio Denki Kabushiki Kaisha
发明人： Kazumasa YOSHIOKA , Shinji TANIGUCHI
IPC分类号： H01L21/67 , H01L33/00
CPC分类号： H01L21/67115 , H01L33/0095
摘要： Provided is an optical heating apparatus that allows high flexibility in setting an in-plane heating condition for a processing target substrate. The optical heating apparatus includes: a chamber; a supporter to support the processing target substrate; a light source unit including a plurality of heating groups being configured to emit light; and a controller to control electricity supplied to each of the plurality of the heating groups. One of the processing target substrate and the light source unit is configured to rotate relative to an other on a rotation axis. The plurality of the heating groups each include a plurality of light sources, and a nth and (n+1)th circular rotation loci partially overlap each other. The nth and (n+1)th circular rotation loci are drawn by virtual rotation of the light emission region of each light source belonging to a nth and (n+1)th heating group around the rotation axis.

5. 发明授权

US12103246B2 Method of bonding substrates, microchip and method of manufacturing the same 有权
公开(公告)号：US12103246B2
公开(公告)日：2024-10-01
申请号：US15814267
申请日：2017-11-15
申请人： USHIO DENKI KABUSHIKI KAISHA
发明人： Motohiro Sakai , Shinji Suzuki , Fumitoshi Takemoto , Kenichi Hirose
IPC分类号： B29C65/74 , B29C35/08 , B29C59/14 , B29C59/16 , B29C65/00 , B29C65/02 , B29C65/14 , B29L11/00 , B29L31/00 , B81C3/00 , C09J5/02 , H01L21/18 , H01L21/20 , H01L21/67
CPC分类号： B29C65/7415 , B29C59/14 , B29C59/16 , B29C65/1406 , B29C65/1432 , B29C66/028 , B29C66/1122 , B29C66/53461 , B29C66/54 , B29C66/83221 , B81C3/001 , C09J5/02 , H01L21/187 , H01L21/2007 , H01L21/67005 , B29C2035/0827 , B29C65/02 , B29C66/232 , B29C66/30223 , B29C66/534 , B29C66/71 , B29C66/712 , B29C66/73366 , B29C66/7465 , B29C66/919 , B29C66/92445 , B29C66/929 , B29C66/949 , B29L2011/00 , B29L2011/0016 , B29L2031/756 , C09J2400/143 , C09J2400/146 , C09J2400/163 , C09J2400/166 , B29C66/71 , B29K2083/00 , B29C66/71 , B29K2023/38 , B29C66/71 , B29K2069/00 , B29C66/71 , B29K2025/06
摘要： Disclosed herein is a method of bonding substrates, a microchip, and a method of manufacturing the microchip capable of joining two substrates in a higher adhered state even when at least one of the substrate has a warpage or a roll. A method of bonding a first substrate and a second substrate each of which is made of glass or a resin comprises: a surface activating step for activating each of joining surfaces of the first substrate and the second substrate; and a pressurizing step for pressurizing the first substrate and the second substrate in a state that the first substrate and the second substrate are stacked such that respective joining surfaces contact each other. The joining surface of the first substrate and/or the joining surface of the second substrate are constituted with a plurality of joining regions segmented to be separate from one another by a segmenting recessed portion.

6. 发明授权

US12064525B2 Dry sterilizing device and dry sterilizing method 有权
公开(公告)号：US12064525B2
公开(公告)日：2024-08-20
申请号：US17827595
申请日：2022-05-27
申请人： USHIO DENKI KABUSHIKI KAISHA
发明人： Tatsushi Igarashi
IPC分类号： A61L2/00 , A47K10/48 , A61L2/26
CPC分类号： A61L2/0047 , A47K10/48 , A61L2/26 , A61L2202/11 , A61L2202/14
摘要： A sterilizing device includes a housing having an opening in at least one direction thereof. The housing also has a hollow portion configured to allow insertion of an object (target) including part of a human body from the opening into the hollow portion. The sterilizing device also includes at least one air blower unit configured to send a flow of air toward an interior of the hollow portion, and at least one ultraviolet light emitting unit configured to emit ultraviolet light toward the interior of the hollow portion. The ultraviolet light emitted from each ultraviolet light emitting unit includes at least part of ultraviolet light having a wavelength between 190 nm and 230 nm and at least part of ultraviolet light having a wavelength between 230 nm and 237 nm, but does not include ultraviolet light having a wavelength below 190 nm and beyond 237 nm.

7. 发明公开

US20240241457A1 DETECTION APPARATUS, ALIGNMENT MICROSCOPE, AND EXPOSURE APPARATUS 审中-公开
公开(公告)号：US20240241457A1
公开(公告)日：2024-07-18
申请号：US18393599
申请日：2023-12-21
申请人： Ushio Denki Kabushiki Kaisha
发明人： Naoya SOHARA
IPC分类号： G03F9/00 , G03F7/00
CPC分类号： G03F9/7088 , G03F7/70175 , G03F7/70191
摘要： A detection apparatus includes: an alignment microscope that captures an image of a mask mark and an image of a workpiece mark; and a position detector that detects a position of the mask mark and a position of the workpiece mark on the basis of those images. The alignment microscope includes an imaging unit, a beam splitter that splits each of the first light and the second light, and one or more aberration correction lenses. The beam splitter includes first and second members connected to each other with a light-splitting surface being sandwiched therebetween. All of first and second incident surfaces and emission surfaces are configured to have different surface directions with respect to the light-splitting surface. The one or more aberration correction lenses includes a first aberration correction lens disposed in a first optical path and a second aberration correction lens disposed in a second optical path.

8. 发明公开

US20240207470A1 ULTRAVIOLET IRRADIATION DEVICE, METHOD FOR USING ULTRAVIOLET IRRADIATION DEVICE, AND ULTRAVIOLET IRRADIATION METHOD 审中-公开
公开(公告)号：US20240207470A1
公开(公告)日：2024-06-27
申请号：US18557811
申请日：2022-03-04
申请人： Ushio Denki Kabushiki Kaisha
发明人： Kyosuke FUJINA
IPC分类号： A61L2/10 , A61L9/20
CPC分类号： A61L2/10 , A61L9/20 , A61L2202/11
摘要： Provided are an ultraviolet irradiation device that can effectively inactivate pathogens while ensuring safety for a human body, a method for using the irradiation device, and the ultraviolet irradiation method. The ultraviolet irradiation device according to the present invention includes: a light source that emits ultraviolet light having a main emission wavelength belonging to a range from 190 nm to 240 nm; a housing that accommodates the light source; an extraction part that extracts the ultraviolet light emitted from the light source to the outside of the housing; and a diverging optical system that enlarges a light distribution angle of the ultraviolet light passing through the extraction part.

9. 发明公开

US20240203725A1 ULTRAVIOLET RAY GENERATION DEVICE 审中-公开
公开(公告)号：US20240203725A1
公开(公告)日：2024-06-20
申请号：US18555367
申请日：2022-04-15
申请人： Ushio Denki Kabushiki Kaisha
发明人： Akihiro KUNO , Hideaki YAGYU , Shigeki FUJISAWA
IPC分类号： H01J61/54 , H01J61/16 , H01J65/00
CPC分类号： H01J61/54 , H01J61/16 , H01J65/00
摘要： The startability of an ultraviolet ray generation device including an excimer lamp as an ultraviolet light source is to be improved. An ultraviolet ray generation device includes: an excimer lamp having a discharge container in which a discharge gas is sealed; a first electrode body and a second electrode body that are disposed so as not to be exposed to the discharge gas; and a first conductor electrically connected to one of the first electrode body and the second electrode body. The first conductor faces the other electrode body or a second conductor electrically connected to the other electrode body, through a dielectric member. The first conductor causes an atmospheric discharge around the first conductor.

10. 发明公开

US20240176246A1 ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, IRRADIATION METHOD, AND COMPONENT MANUFACTURING METHOD 审中-公开
公开(公告)号：US20240176246A1
公开(公告)日：2024-05-30
申请号：US18519917
申请日：2023-11-27
申请人： Ushio Denki Kabushiki Kaisha
发明人： Osamu OSAWA , Koichi ITO
IPC分类号： G03F7/00 , G01J1/42
CPC分类号： G03F7/70066 , G01J1/42 , G02B5/20
摘要： An illumination optical system that irradiates a target object with light from a light source unit includes an integrator optical system, a condenser lens, and a bandpass filter. The integrator optical system is disposed on an optical path of the light emitted from the light source unit and uniformizes an illuminance distribution of the light with which the target object is to be irradiated. The condenser lens includes a plurality of lenses and irradiates the target object with the light emitted from the integrator optical system. The bandpass filter is disposed between any two of the plurality of lenses included in the condenser lens.

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