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1. 发明授权

US08974632B2 Device and method for treating wafer-shaped articles 有权
标题翻译：用于处理晶片状物品的装置及方法
公开(公告)号：US08974632B2
公开(公告)日：2015-03-10
申请号：US13307421
申请日：2011-11-30
申请人： Ulrich Tschinderle , Andreas Gleissner , Michael Brugger
发明人： Ulrich Tschinderle , Andreas Gleissner , Michael Brugger
IPC分类号： C23C16/00 , C23F1/12 , B05D5/12 , B08B3/08 , H01L21/67
CPC分类号： H01L21/67051 , H01L21/6708 , H01L21/67126 , H01L21/6719
摘要： A method and device for processing wafer-shaped articles comprises a closed process chamber. A rotary chuck is located within the process chamber, and is adapted to hold a wafer shaped article thereon. An interior fluid distribution ring is positioned above the rotary chuck, and comprises an annular surface inclined downwardly from a radially inner edge to a radially outer edge thereof. At least one fluid distribution nozzle extends into the closed process chamber and is positioned so as to discharge fluid onto the annular surface of the fluid distribution ring.
摘要翻译：用于处理晶片状物品的方法和装置包括封闭的处理室。旋转卡盘位于处理室内，并且适于在其上保持晶片成形制品。内部流体分配环位于旋转卡盘上方，并且包括从径向内边缘向其径向外边缘向下倾斜的环形表面。至少一个流体分配喷嘴延伸到封闭的处理室中并且被定位成将流体排放到流体分配环的环形表面上。

2. 发明申请

US20100206481A1 APPARATUS FOR WET TREATMENT OF PLATE-LIKE ARTICLES 有权
标题翻译：用于治疗类似文章的设备
公开(公告)号：US20100206481A1
公开(公告)日：2010-08-19
申请号：US12675845
申请日：2008-08-07
申请人： Markus Gigacher , Michael Brugger
发明人： Markus Gigacher , Michael Brugger
IPC分类号： H01L21/683 , C23F1/08 , H01L21/465
CPC分类号： H01L21/67051 , H01L21/6838
摘要： Disclosed is an apparatus for wet treatment of a plate-like article, which includes: a spin chuck for holding and rotating the plate-like article including an element for holding the plate-like article at the plate-like article's edge and a gas supply element for directing gas towards the side of the plate-like article, which faces the spin chuck, wherein the gas supply element includes a gas nozzle rotating with the spin chuck, for providing a gas cushion between the plate-like article and the spin chuck; a fluid supply element for directing fluid onto the side of the plate-like article, which is facing the spin chuck, through a non-rotatable fluid nozzle.
摘要翻译：公开了一种用于湿处理板状物品的设备，其包括：用于保持和旋转板状物品的旋转卡盘，其包括用于将板状物品保持在板状物品的边缘的元件和气体供给用于将气体导向面向旋转卡盘的板状物品的侧面，其中气体供应元件包括与旋转卡盘一起旋转的气体喷嘴，用于在板状物品和旋转卡盘之间提供气垫 ; 用于通过不可旋转的流体喷嘴将流体引导到面向旋转卡盘的板状制品的侧面上的流体供应元件。

3. 发明授权

US08608146B2 Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin 有权
标题翻译：用于销夹头的加强销和使用这种加强销的销夹
公开(公告)号：US08608146B2
公开(公告)日：2013-12-17
申请号：US12642141
申请日：2009-12-18
申请人： Michael Brugger , Otto Lach , Dietmar Hammer
发明人： Michael Brugger , Otto Lach , Dietmar Hammer
IPC分类号： B23Q3/00 , B25B11/00
CPC分类号： H01L21/68742 , H01L21/68728 , H01L21/6875 , H01L21/68757
摘要： Improved durability and longevity of spin chucks is achieved by using a composite support pin structure in which a pin body of a chemically inert plastic includes a hollow cavity containing an insert formed from a material whose Young's modulus is greater than that of the inert plastic.
摘要翻译：通过使用复合支撑销结构来实现旋转卡盘的耐久性和寿命的延长，其中化学惰性塑料的针体包括具有由杨氏模量大于惰性塑料的材料形成的插入物的中空腔。

4. 发明授权

US08029641B2 Device and method for liquid treatment of wafer-shaped articles 有权
标题翻译：晶片状物品的液体处理装置及方法
公开(公告)号：US08029641B2
公开(公告)日：2011-10-04
申请号：US11915352
申请日：2006-05-18
申请人： Andreas Baldy , Markus Gacher , Michael Brugger
发明人： Andreas Baldy , Markus Gacher , Michael Brugger
IPC分类号： H01L21/306 , B08B3/04 , B05C13/00
CPC分类号： H01L21/6715 , H01L21/67017 , H01L21/67051 , H01L21/6708
摘要： Method and device for wet treating a defined peripheral edge-region of a wafer-shaped article having a first surface plane W1, a second surface plane W2 and an edge surface. The device includes a support for holding the wafer-shaped article; liquid dispensing members for dispensing liquid onto the first surface plane W1 of the wafer-shaped article not facing the support and liquid guiding member connected to the support for guiding at least a part of the liquid around the edge surface of the wafer-shaped article towards the second surface plane W2 of the wafer-shaped article facing the support thereby wetting at least the edge surface, wherein the liquid guiding member has the form of a ring.
摘要翻译：用于湿处理具有第一表面平面W1，第二表面平面W2和边缘表面的晶片状制品的限定的周缘区域的方法和装置。该装置包括用于保持晶片状物品的支撑体; 用于将液体分配到不面向支撑件的晶片状物品的第一表面平面W1上的液体分配构件，以及连接到支撑件的液体引导构件，用于将晶片形物品的边缘表面周围的至少一部分液体导向面对支撑体的晶片状制品的第二表面平面W2至少润湿至少边缘表面，其中液体引导构件具有环的形式。

5. 发明授权

US09997379B2 Method and apparatus for wafer wet processing 有权
公开(公告)号：US09997379B2
公开(公告)日：2018-06-12
申请号：US12956988
申请日：2010-11-30
申请人： Harald Kraus , Marco Nardoni , Michael Brugger
发明人： Harald Kraus , Marco Nardoni , Michael Brugger
IPC分类号： H01L21/67
CPC分类号： H01L21/67051
摘要： A gas dispenser in a process module for wet processing of wafer-shaped articles is substantially smaller than the article to be processed and is movable laterally of the article as it dispenses inert gas above the article.

6. 发明授权

US08936832B2 Device and method for wet treating plate-like-articles 有权
标题翻译：用于湿处理板状制品的装置和方法
公开(公告)号：US08936832B2
公开(公告)日：2015-01-20
申请号：US13333004
申请日：2011-12-21
申请人： Michael Brugger , Alexander Schwarzfurtner
发明人： Michael Brugger , Alexander Schwarzfurtner
IPC分类号： B05D3/12 , B05C11/02 , B05C5/00 , H01L21/687 , G03F7/16 , H01L21/67
CPC分类号： H01L21/68735 , G03F7/162 , H01L21/67023 , H01L21/6704 , H01L21/67051 , H01L21/67063 , H01L21/67075 , H01L21/6708 , H01L21/6715
摘要： A method for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.
摘要翻译：用于湿式处理板状制品的方法包括：用于保持单个板状制品的卡盘，所述卡盘用于当用液体处理时具有用于接收从板状物品流出的液体的向上表面的单个板状制品，其中所述卡盘由周向环形唇缘。卡盘具有大于待处理的板状物品的最大直径的外径，以及具有朝上的环形表面的可旋转部分，用于接收从卡盘的周缘移出的液体。可旋转部分相对于卡盘可旋转，环形表面相对于周向环形唇缘同轴布置，环形表面的内径小于卡盘的外径，距离d 在唇缘和向上的环形表面之间的距离在0.1mm至5mm的范围内。

7. 发明授权

US08888952B2 Apparatus for wet treatment of plate-like articles 有权
标题翻译：用于湿板处理的装置
公开(公告)号：US08888952B2
公开(公告)日：2014-11-18
申请号：US12675845
申请日：2008-08-07
申请人： Markus Gigacher , Michael Brugger
发明人： Markus Gigacher , Michael Brugger
IPC分类号： H01L21/683 , C23F1/08 , H01L21/465 , H01L21/67
CPC分类号： H01L21/67051 , H01L21/6838
摘要： Disclosed is an apparatus for wet treatment of a plate-like article, which includes: a spin chuck for holding and rotating the plate-like article including an element for holding the plate-like article at the plate-like article's edge and a gas supply element for directing gas towards the side of the plate-like article, which faces the spin chuck, wherein the gas supply element includes a gas nozzle rotating with the spin chuck, for providing a gas cushion between the plate-like article and the spin chuck; a fluid supply element for directing fluid onto the side of the plate-like article, which is facing the spin chuck, through a non-rotatable fluid nozzle.
摘要翻译：公开了一种用于湿处理板状物品的设备，其包括：用于保持和旋转板状物品的旋转卡盘，其包括用于将板状物品保持在板状物品的边缘的元件和气体供给用于将气体导向面向旋转卡盘的板状物品的侧面，其中气体供应元件包括与旋转卡盘一起旋转的气体喷嘴，用于在板状物品和旋转卡盘之间提供气垫 ; 用于通过不可旋转的流体喷嘴将流体引导到面向旋转卡盘的板状制品的侧面上的流体供应元件。

8. 发明授权

US08613288B2 High temperature chuck and method of using same 有权
标题翻译：高温卡盘及其使用方法
公开(公告)号：US08613288B2
公开(公告)日：2013-12-24
申请号：US12642101
申请日：2009-12-18
申请人： Michael Brugger , Otto Lach
发明人： Michael Brugger , Otto Lach
IPC分类号： B08B11/02 , B25B11/00
CPC分类号： H01L21/67103 , H01L21/67051 , H01L21/68728 , H01L21/6875 , H01L21/68785
摘要： Improved resistance to temperature-related degradation or deformation in a wafer-supporting chuck is provided by at least one shielding member that physically and/or thermally shields chuck components from effects of elevated temperature processing fluids.
摘要翻译：通过至少一个屏蔽构件提供对晶片支撑卡盘中与温度有关的降解或变形的抗性，所述屏蔽构件物理和/或热屏蔽卡盘部件免受高温加工流体的影响。

9. 发明申请

US20110059242A1 DEVICE AND METHOD FOR WET TREATING PLATE-LIKE-ARTICLES 有权
标题翻译：用于湿处理板状物品的装置和方法
公开(公告)号：US20110059242A1
公开(公告)日：2011-03-10
申请号：US12519232
申请日：2007-11-19
申请人： Michael Brugger , Alexander Schwarzfurtner
发明人： Michael Brugger , Alexander Schwarzfurtner
IPC分类号： B05C11/02 , B05D3/12
CPC分类号： H01L21/68735 , G03F7/162 , H01L21/67023 , H01L21/6704 , H01L21/67051 , H01L21/67063 , H01L21/67075 , H01L21/6708 , H01L21/6715
摘要： A method and device for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.
摘要翻译：用于板状制品的湿处理的方法和装置包括：用于保持单个板状制品的卡盘，其具有向上表面，用于在用液体处理时接收从板状物品流出的液体，其中卡盘向外由圆周环形唇形边界。卡盘具有大于待处理的板状物品的最大直径的外径，以及具有朝上的环形表面的可旋转部分，用于接收从卡盘的周缘移出的液体。可旋转部分相对于卡盘可旋转，环形表面相对于周向环形唇缘同轴布置，环形表面的内径小于卡盘的外径，距离d 在唇缘和向上的环形表面之间的距离在0.1mm至5mm的范围内。

10. 发明授权

US09190310B2 Grounded chuck 有权
标题翻译：接地卡盘
公开(公告)号：US09190310B2
公开(公告)日：2015-11-17
申请号：US12761713
申请日：2010-04-16
申请人： Michael Brugger , Otto Lach
发明人： Michael Brugger , Otto Lach
IPC分类号： B23B31/18 , H01L21/683 , H01L21/687
CPC分类号： H01L21/6838 , H01L21/68728 , H01L21/68785 , H01L21/68792 , Y10T279/18 , Y10T279/20 , Y10T279/3493
摘要： Improved reduction of static charge in spin chucks is achieved by providing one or more pin assemblies which are formed from chemically inert material and which include an electrically conductive inlay.
摘要翻译：通过提供由化学惰性材料形成并且包括导电嵌入物的一个或多个销组件来实现旋转卡盘中静电荷的改善。

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