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1. 发明授权

US08801865B2 Device and process for wet treating a peripheral area of a wafer-shaped article 有权
标题翻译：用于湿处理晶片形制品的周边区域的装置和方法
公开(公告)号：US08801865B2
公开(公告)日：2014-08-12
申请号：US12743474
申请日：2008-11-12
申请人： Dieter Frank , Jurgen Parzefall , Alexander Schwarzfurtner
发明人： Dieter Frank , Jurgen Parzefall , Alexander Schwarzfurtner
IPC分类号： B08B7/04 , B08B5/04 , B08B3/00
CPC分类号： H01L21/67051 , H01L21/6708
摘要： A method and device for wet treating a peripheral area of a wafer-shaped article uses rollers for driving the wafer-shaped article at its edge. First and second liquid treatment units supply liquid towards the peripheral area. Each of the liquid treatment units comprises a liquid carrier, a liquid supply nozzle for supplying liquid to the liquid carrier and a liquid discharging channel for removing liquid from the liquid carrier. The second liquid treatment unit includes a gas treatment section with a gas supply nozzle for removing most of the second liquid from the peripheral area, and with a gas discharge channel for discharging gas and removed liquid.
摘要翻译：用于湿处理晶片状物品的周边区域的方法和装置使用用于在其边缘驱动晶片状物品的辊。第一和第二液体处理单元向周边区域供应液体。每个液体处理单元包括液体载体，用于向液体载体供应液体的液体供应喷嘴和用于从液体载体去除液体的液体排出通道。第二液体处理单元包括气体处理部，其具有用于从周边区域除去大部分第二液体的气体供给喷嘴，以及用于排出气体和除去的液体的气体排出通道。

2. 发明申请

US20100288312A1 DEVICE AND PROCESS FOR WET TREATING A PERIPHERAL AREA OF A WAFER-SHAPED ARTICLE 有权
标题翻译：湿法处理波浪形文字的外围区域的设备和方法
公开(公告)号：US20100288312A1
公开(公告)日：2010-11-18
申请号：US12743474
申请日：2008-11-12
申请人： Dieter Frank , Jurgen Parzefall , Alexander Schwarzfurtner
发明人： Dieter Frank , Jurgen Parzefall , Alexander Schwarzfurtner
IPC分类号： B08B3/00
CPC分类号： H01L21/67051 , H01L21/6708
摘要： A device for wet treating a peripheral area of a wafer-shaped article includes holding elements for holding and rotating the wafer-shaped article at its edge, a first and a second liquid treatment units for supplying liquid towards the peripheral area. The holding elements include rollers for driving the wafer-shaped article at its edge. The first liquid treatment unit includes a first liquid carrier for providing a first liquid to wet a first section of the peripheral area, a first liquid supply nozzle for supplying liquid to the first liquid carrier, and a first liquid discharging channel for removing liquid from the first liquid carrier. The second liquid treatment unit includes, a second liquid carrier for providing a second liquid to wet a second section of the peripheral area, a second liquid supply nozzle for supplying liquid to the second liquid carrier, a second liquid discharging channel for removing liquid from the second liquid carrier, and a second gas treatment section with a gas supply nozzle for supplying gas towards the peripheral area, which has been treated with the second liquid for removing most of the second liquid from the peripheral area, and with a gas discharge channel for discharging gas and removed liquid.
摘要翻译：用于湿处理晶片状物品的周边区域的装置包括用于在其边缘保持和旋转晶片状物品的保持元件，用于向周边区域供应液体的第一和第二液体处理单元。保持元件包括用于在其边缘处驱动晶片状物品的辊。第一液体处理单元包括用于提供第一液体以润湿周边区域的第一部分的第一液体载体，用于向第一液体载体供给液体的第一液体供给喷嘴和用于从第一液体载体中除去液体的第一液体排出通道第一液载体。第二液体处理单元包括用于提供第二液体以润湿周边区域的第二部分的第二液体载体，用于向第二液体载体供应液体的第二液体供应喷嘴，用于从第二液体载体中除去液体的第二液体排出通道第二液体载体和第二气体处理部，其具有用于向周边区域供应气体的气体供给喷嘴，所述气体供给喷嘴已经用用于从周边区域除去大部分第二液体的第二液体处理，并且具有气体排出通道排出气体并除去液体。

3. 发明授权

US08231939B2 Device and method for wet treating plate-like-articles 有权
标题翻译：用于湿处理板状制品的装置和方法
公开(公告)号：US08231939B2
公开(公告)日：2012-07-31
申请号：US12519232
申请日：2007-11-19
申请人： Michael Brugger , Alexander Schwarzfurtner
发明人： Michael Brugger , Alexander Schwarzfurtner
IPC分类号： B05D3/12 , B05C11/02 , B05C5/00
CPC分类号： H01L21/68735 , G03F7/162 , H01L21/67023 , H01L21/6704 , H01L21/67051 , H01L21/67063 , H01L21/67075 , H01L21/6708 , H01L21/6715
摘要： A method and device for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.
摘要翻译：用于板状制品的湿处理的方法和装置包括：用于保持单个板状制品的卡盘，其具有向上表面，用于在用液体处理时接收从板状物品流出的液体，其中卡盘向外由圆周环形唇形边界。卡盘具有大于待处理的板状物品的最大直径的外径，以及具有朝上的环形表面的可旋转部分，用于接收从卡盘的周缘移出的液体。可旋转部分相对于卡盘可旋转，环形表面相对于周向环形唇缘同轴布置，环形表面的内径小于卡盘的外径，距离d 在唇缘和向上的环形表面之间的距离在0.1mm至5mm的范围内。

4. 发明授权

US08936832B2 Device and method for wet treating plate-like-articles 有权
标题翻译：用于湿处理板状制品的装置和方法
公开(公告)号：US08936832B2
公开(公告)日：2015-01-20
申请号：US13333004
申请日：2011-12-21
申请人： Michael Brugger , Alexander Schwarzfurtner
发明人： Michael Brugger , Alexander Schwarzfurtner
IPC分类号： B05D3/12 , B05C11/02 , B05C5/00 , H01L21/687 , G03F7/16 , H01L21/67
CPC分类号： H01L21/68735 , G03F7/162 , H01L21/67023 , H01L21/6704 , H01L21/67051 , H01L21/67063 , H01L21/67075 , H01L21/6708 , H01L21/6715
摘要： A method for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.
摘要翻译：用于湿式处理板状制品的方法包括：用于保持单个板状制品的卡盘，所述卡盘用于当用液体处理时具有用于接收从板状物品流出的液体的向上表面的单个板状制品，其中所述卡盘由周向环形唇缘。卡盘具有大于待处理的板状物品的最大直径的外径，以及具有朝上的环形表面的可旋转部分，用于接收从卡盘的周缘移出的液体。可旋转部分相对于卡盘可旋转，环形表面相对于周向环形唇缘同轴布置，环形表面的内径小于卡盘的外径，距离d 在唇缘和向上的环形表面之间的距离在0.1mm至5mm的范围内。

5. 发明申请

US20120085374A1 DEVICE AND METHOD FOR WET TREATING PLATE-LIKE-ARTICLES 有权
标题翻译：用于湿处理板状物品的装置和方法
公开(公告)号：US20120085374A1
公开(公告)日：2012-04-12
申请号：US13333004
申请日：2011-12-21
申请人： Michael BRUGGER , Alexander SCHWARZFURTNER
发明人： Michael BRUGGER , Alexander SCHWARZFURTNER
IPC分类号： B05C5/00
CPC分类号： H01L21/68735 , G03F7/162 , H01L21/67023 , H01L21/6704 , H01L21/67051 , H01L21/67063 , H01L21/67075 , H01L21/6708 , H01L21/6715
摘要： A method for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.
摘要翻译：用于湿式处理板状制品的方法包括：用于保持单个板状制品的卡盘，所述卡盘用于当用液体处理时具有用于接收从板状物品流出的液体的向上表面的单个板状制品，其中所述卡盘由周向环形唇缘。卡盘具有大于待处理的板状物品的最大直径的外径，以及具有朝上的环形表面的可旋转部分，用于接收从卡盘的周缘移出的液体。可旋转部分相对于卡盘可旋转，环形表面相对于周向环形唇缘同轴布置，环形表面的内径小于卡盘的外径，距离d 在唇缘和向上的环形表面之间的距离在0.1mm至5mm的范围内。

6. 发明申请

US20110059242A1 DEVICE AND METHOD FOR WET TREATING PLATE-LIKE-ARTICLES 有权
标题翻译：用于湿处理板状物品的装置和方法
公开(公告)号：US20110059242A1
公开(公告)日：2011-03-10
申请号：US12519232
申请日：2007-11-19
申请人： Michael Brugger , Alexander Schwarzfurtner
发明人： Michael Brugger , Alexander Schwarzfurtner
IPC分类号： B05C11/02 , B05D3/12
CPC分类号： H01L21/68735 , G03F7/162 , H01L21/67023 , H01L21/6704 , H01L21/67051 , H01L21/67063 , H01L21/67075 , H01L21/6708 , H01L21/6715
摘要： A method and device for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.
摘要翻译：用于板状制品的湿处理的方法和装置包括：用于保持单个板状制品的卡盘，其具有向上表面，用于在用液体处理时接收从板状物品流出的液体，其中卡盘向外由圆周环形唇形边界。卡盘具有大于待处理的板状物品的最大直径的外径，以及具有朝上的环形表面的可旋转部分，用于接收从卡盘的周缘移出的液体。可旋转部分相对于卡盘可旋转，环形表面相对于周向环形唇缘同轴布置，环形表面的内径小于卡盘的外径，距离d 在唇缘和向上的环形表面之间的距离在0.1mm至5mm的范围内。

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