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1. 发明授权

US06595064B2 Capacitive pressure sensor 失效
标题翻译：电容式压力传感器
公开(公告)号：US06595064B2
公开(公告)日：2003-07-22
申请号：US09863271
申请日：2001-05-24
申请人： Ulfert Drewes , Andreas Rossberg , Frank Hegner , Elke Maria Schmidt , Jürgen Breme , Thomas Velten
发明人： Ulfert Drewes , Andreas Rossberg , Frank Hegner , Elke Maria Schmidt , Jürgen Breme , Thomas Velten
IPC分类号： G01L912
CPC分类号： G01L9/0075 , G01L9/0048 , G01L9/0073
摘要： A diaphragm 30 and basic body 20 of a pressure sensor 10 are interconnected via a joint F. A groove 26 is provided in the basic body 20 in order to reduce the stress concentration in the region of the joint F.
摘要翻译：压力传感器10的隔膜30和基体20经由接头F相互连接。在基体20中设置有槽26，以便减小接头F的区域内的应力集中。

2. 发明授权

US06374680B1 Capacitive pressure sensor or capacitive differential pressure sensor 失效
标题翻译：电容式压力传感器或电容差压传感器
公开(公告)号：US06374680B1
公开(公告)日：2002-04-23
申请号：US09511723
申请日：2000-02-21
申请人： Ulfert Drewes , Andreas Rossberg , Elke Schmidt , Frank Hegner , Thomas Velten
发明人： Ulfert Drewes , Andreas Rossberg , Elke Schmidt , Frank Hegner , Thomas Velten
IPC分类号： G01L912
CPC分类号： G01L9/0075
摘要： The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.
摘要翻译：这些压力传感器或差压传感器的电极使用丝网印刷或溅射以外的技术来形成：压力传感器（10）具有基板（1）和第一主表面（11），第二主表面（12））和圆周表面（13）。导电材料的板状电极（14）以高耐压和高真空密封的方式固定在主表面（11）的凹部（15）中，由连接材料（16），从电极（14）穿过基板（1）到主表面（12）或圆周表面（13）提供贯通连接件（17），陶瓷的隔膜（2）玻璃或单晶材料通过接合材料（26）沿着接头（18）附接到凹部（15）外部的基板（1）上，并且在其上面形成另外的电极或被覆盖在面向电极（14），具有通过接头（18）接触的另一个电极（24）。基板和隔膜 t的陶瓷，玻璃或单晶材料。各差压传感器具有共同的中心隔膜和两个基板或公共基板和两个隔膜。

3. 发明授权

US06267009B1 Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same 失效
标题翻译：电容式压力传感器单元或差压传感器单元及其制造方法
公开(公告)号：US06267009B1
公开(公告)日：2001-07-31
申请号：US09505489
申请日：2000-02-16
申请人： Ulfert Drewes , Elke Schmidt , Andreas Rossberg , Frank Hegner , Thomas Velten
发明人： Ulfert Drewes , Elke Schmidt , Andreas Rossberg , Frank Hegner , Thomas Velten
IPC分类号： G01L912
CPC分类号： G01L9/0075 , G01L9/0044
摘要： These capacitive pressure sensor cells have joints between substrates and diaphragms being both pressure and/or tension-proof and high-vacuum-tight and long-term-stable. The sensor cell comprises a ceramic substrate (1) having a cylindrical surface (11), a major surfaces (12, 13). The major surface (12) includes a concave central area (121) merging, in the direction of and up to said cylindrical surface (11), into a convex surface (124) having a vertex line (125) and forming a planar ring surface (126) in its area. An electrode (122) is located in the concave area (121). An electrical connection (123) extends from electrode (122) through the substrate (1) to surface (13). A ceramic diaphragm (5) has a planar inner surface (51) on which an electrode (52) is located and which rests on the ring surface (126) of the substrate (1). The diaphragm (5) is joined to the substrate by an active brazing solder forming a circumferential wedge zone (91) in the area of the substrate between the ring surface (126) and the cylindrical surface (11). An electrical connection to the electrode (52) is made through the wedge zone (91). Respective differential pressure sensors can comprise a central substrate (2) and two outer diaphragms (61, 71) or a central diaphragm (8) and two outer substrates (3, 4).
摘要翻译：这些电容式压力传感器单元在基板和隔膜之间具有接头，其压力和/或抗张力和高真空密封性和长期稳定性。传感器单元包括具有圆柱形表面（11），主表面（12,13）的陶瓷基底（1）。主表面（12）包括凹入的中心区域（121），其在所述圆柱形表面（11）的方向上并且与所述圆柱形表面（11）一起合并成具有顶点线（125）的凸形表面（124）并形成平面环表面（126）。电极（122）位于凹部（121）中。电连接（123）从电极（122）穿过衬底（1）延伸到表面（13）。陶瓷膜片（5）具有平面的内表面（51），电极（52）位于该平面内表面上，并且该陶瓷膜片位于衬底（1）的环表面（126）上。膜片（5）通过在环形表面（126）和圆柱形表面（11）之间的衬底区域中形成周向楔形区域（91）的活性钎焊焊料与衬底接合。通过楔形区域（91）制成与电极（52）的电连接。各差压传感器可以包括中央基板（2）和两个外隔膜（61,71）或中央隔膜（8）和两个外基板（3,4）。

4. 发明申请

US20100199778A1 CAPACITIVE PRESSURE SENSOR 有权
标题翻译：电容式压力传感器
公开(公告)号：US20100199778A1
公开(公告)日：2010-08-12
申请号：US12451209
申请日：2008-06-04
申请人： Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
发明人： Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
IPC分类号： G01L9/12 , H01R43/00
CPC分类号： G01L9/0075 , G01L13/025 , Y10T29/49117
摘要： A pressure sensor includes a platform 1 and an elastic measuring membrane 2, which is joined with a surface of the platform 1 to form a measuring chamber 3 sealed closed at the edge, wherein the platform 1 and/or the measuring membrane 2 comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode 6, which faces the surface of the platform 2, the surface of the platform 1 has at least a second electrode 5, which faces that of the measuring membrane 2, wherein the capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.
摘要翻译：压力传感器包括平台1和弹性测量膜2，其与平台1的表面接合以形成密封在边缘处的测量室3，其中平台1和/或测量膜2包括陶瓷，玻璃或单晶材料，测量膜至少具有面向平台2的表面的第一电极6，平台1的表面至少具有与测量膜2的表面相对的第二电极5，其中所述第一电极和所述第二电极之间的电容是待测压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

5. 发明授权

US5954900A Process for joining alumina ceramic bodies 失效
标题翻译：氧化铝陶瓷体的接合方法
公开(公告)号：US5954900A
公开(公告)日：1999-09-21
申请号：US935417
申请日：1997-09-23
申请人： Frank Hegner , Elke Maria Schmidt , Andreas Rossberg , Barbel Voigtsberger , Ingolf Voigt , Henry Ludwig
发明人： Frank Hegner , Elke Maria Schmidt , Andreas Rossberg , Barbel Voigtsberger , Ingolf Voigt , Henry Ludwig
IPC分类号： C04B37/00 , G01L9/00 , B32B31/26 , G01L9/12
CPC分类号： C04B35/645 , C04B37/005 , G01L9/0075 , C04B2235/656 , C04B2237/064 , C04B2237/343
摘要： This process serves to form a long-time-vacuum-tight, high-strength, and corrosion-resistant joint, by means of a joining material, between a first body and a second body each made of sintered, polycrystalline alumina ceramic with a purity greater than 92 wt. % or of sapphire. The joining material is interposed in the form of a paste, a foil, or a slip between the first body and the second body. The joining material has been made from 1) an agglomerate-free, highly disperse, high-purity .alpha.-alumina powder with particles of as high a degree of calcination as possible and of a size not exceeding 100 nm (=10.sup.-7 m), 2) an anorganic oxidic powder of an auxiliary sintering agent with particles of approximately the same size as the particle size of the .alpha.-alumina powder, 3) an organic vehicle which is dissolved or suspended in an organic or aqueous solvant and in which the particles of the respective powder are distributed as evenly as possible. Instead of the anorganic oxidic powder of an auxiliary sintering agent an anorganic oxidic auxiliary sintering agent produced chemically as envelopes around or attachment to the particles of the .alpha.-alumina powder can be used, the total .alpha.-alumina and auxiliary-sintering-agent content of the paste, the foil, or the slip ranging between 50% and 70%. After interposing the joining material the bodies are heated to a temperature of not more than 1,300.degree. C. and then allowing them to cool down.
摘要翻译：该方法用于通过连接材料在第一主体和第二主体之间形成长时间真空密封，高强度和耐腐蚀的接头，每个第一主体和第二主体由具有纯度的烧结多晶氧化铝陶瓷制成大于92wt。％或蓝宝石。接合材料以第一主体和第二主体之间的糊状物，箔片或滑动片的形式插入。接合材料由1）无聚集高分散，高纯度的α-氧化铝粉末制成，该粉末具有尽可能高的煅烧程度且尺寸不超过100nm（=10-7μm） 2）一种辅助烧结剂的无机氧化粉末，其颗粒大小与α-氧化铝粉末的粒度大致相同，3）有机载体，其溶解或悬浮在有机或水溶液中，其中各粉末的颗粒尽可能均匀地分布。代替辅助烧结剂的无机氧化物粉末，可以使用以α-氧化铝粉末的颗粒包围或附着于其上化学形成的无机氧化物辅助烧结剂，总α-氧化铝和辅助烧结剂的总量糊，箔或滑差在50％至70％之间。在插入接合材料之后，将本体加热至不高于1300℃的温度，然后使其冷却。

6. 发明授权

US08104353B2 Capacitive pressure sensor 有权
标题翻译：电容式压力传感器
公开(公告)号：US08104353B2
公开(公告)日：2012-01-31
申请号：US12451209
申请日：2008-06-04
申请人： Ulfert Drewes , Frank Hegner , Andreas Rossberg , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
发明人： Ulfert Drewes , Frank Hegner , Andreas Rossberg , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
IPC分类号： G01L9/12 , H01R43/00
CPC分类号： G01L9/0075 , G01L13/025 , Y10T29/49117
摘要： A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.
摘要翻译：压力传感器包括平台和弹性测量膜，其与平台的表面结合以形成密封在边缘处的测量室，其中平台和/或测量膜包括陶瓷，玻璃或单晶材料测量膜至少具有面向平台表面的第一电极，平台的表面具有至少第二电极，其面向测量膜的表面。第一电极和第二电极之间的电容是测量压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

7. 发明授权

US06941814B2 Hydrophobically coated pressure sensor 有权
标题翻译：疏水涂层压力传感器
公开(公告)号：US06941814B2
公开(公告)日：2005-09-13
申请号：US10498515
申请日：2002-12-18
申请人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
发明人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
IPC分类号： G01L19/06 , G01L7/00 , G01L9/00 , G01L9/12
CPC分类号： G01L9/0075
摘要： A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.
摘要翻译：用于测量压力的压力传感器包括压力室; 以及变形体，其可以在压力下暴露于介质，并且另外至少部分地限定压力室并且与介质如此压力地密封; 其中传感器室的壁具有通过气相和/或气相沉积施加的疏水涂层。疏水涂层优选包括硅烷。特别优选的是具有一个或多个疏水基团R和一个或多个锚定基团X的硅烷。特别优选的是：R-Si-X 3，R 1 R 1， 2 -Si-X 2，R 1 R 2 R 3 -Si-X。疏水性基团R优选为烷基，全氟烷基，苯基或全氟苯基。锚定基团X优选为-OH（硅烷醇），-X（卤化物，例如-Cl），-OR（酯，例如-OCH 3），-NH 2（胺）或-SH（巯基甲硅烷）。另外，脂族或环状硅氮烷-Si-NH-Si-，例如六甲基二硅氮烷。同样合适的是类型R a-Me-X z z的化合物，其中Me = Zr，Ti。

8. 发明授权

US09136662B2 Method for manufacturing a connection between two ceramic parts, especially parts of a pressure sensor, and a ceramic product, especially a ceramic pressure sensor 有权
标题翻译：用于制造两个陶瓷部件，特别是压力传感器的部件和陶瓷产品，特别是陶瓷压力传感器之间的连接的方法
公开(公告)号：US09136662B2
公开(公告)日：2015-09-15
申请号：US13881533
申请日：2011-10-28
申请人： Andreas Rossberg , Michael Philipps , Frank Hegner , Ulfert Drewes , Jorg Muller , Marco Doms
发明人： Andreas Rossberg , Michael Philipps , Frank Hegner , Ulfert Drewes , Jorg Muller , Marco Doms
IPC分类号： C04B37/00 , G01L7/08 , B23K1/00 , H01R43/02 , B23K35/02 , B23K35/32 , B23K1/008 , B23K1/19 , G01L7/00
CPC分类号： H01R43/0235 , B23K1/0008 , B23K1/008 , B23K1/19 , B23K35/0222 , B23K35/32 , C04B37/006 , C04B2235/6581 , C04B2235/72 , C04B2237/122 , C04B2237/127 , C04B2237/128 , C04B2237/343 , C04B2237/592 , C04B2237/60 , C04B2237/708 , G01L7/00 , G01L9/0075
摘要： A method for manufacturing a connection between two ceramic parts comprises: providing a first ceramic part and a second ceramic part; providing an active hard solder, or active braze, on at least one surface section of at least one of the ceramic parts; and heating the active hard solder, or active braze, in a vacuum soldering, brazing process. The entire active hard solder, or active braze, for connecting the first and second ceramic parts is provided in such a manner that at least one surface section of at least one of the ceramic parts, preferably both ceramic parts, is coated by means of gas phase deposition of the alloy of the active hard solder, or active braze.
摘要翻译：一种用于制造两个陶瓷部件之间的连接的方法包括：提供第一陶瓷部件和第二陶瓷部件; 在至少一个陶瓷部件的至少一个表面部分上提供活性硬焊料或活性钎焊; 并在真空钎焊钎焊工艺中加热活性硬焊料或活性钎焊。提供了用于连接第一和第二陶瓷部件的整个活性硬焊料或活性钎焊，使得至少一个陶瓷部件的至少一个表面部分，优选两个陶瓷部件都通过气体涂覆活性硬焊料的合金的相沉积或活性钎焊。

9. 发明授权

US06925884B2 Capacitive differential pressure sensor 失效
标题翻译：电容差压传感器
公开(公告)号：US06925884B2
公开(公告)日：2005-08-09
申请号：US10472766
申请日：2002-04-04
申请人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
发明人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
IPC分类号： G01L13/06 , G01L9/00 , G01L13/02 , G01L15/00
CPC分类号： G01L9/0073 , G01L9/0075 , G01L13/025
摘要： In a differential pressure sensor, the measurement value is corrected with the help of the nominal pressure NP. In this way, influences on the measurement value because of deformations of the body of the differential pressure sensor and change in the material stiffness of the membrane are decreased.
摘要翻译：在差压传感器中，借助标称压力NP来校正测量值。以这种方式，由于差压传感器的主体的变形和膜的材料刚度的变化，对测量值的影响减小。

10. 发明申请

US20130213138A1 METHOD FOR MANUFACTURING A CONNECTION BETWEEN TWO CERAMIC PARTS, ESPECIALLY PARTS OF A PRESSURE SENSOR, AND A CERAMIC PRODUCT, ESPECIALLY A CERAMIC PRESSURE SENSOR 有权
标题翻译：用于制造两个陶瓷部件之间的连接的方法，压力传感器的特别部件和陶瓷产品，特别是陶瓷压力传感器
公开(公告)号：US20130213138A1
公开(公告)日：2013-08-22
申请号：US13881533
申请日：2011-10-28
申请人： Andreas Rossberg , Michael Philipps , Frank Hegner , Ulfert Drewes , Jorg Muller , Marco Doms
发明人： Andreas Rossberg , Michael Philipps , Frank Hegner , Ulfert Drewes , Jorg Muller , Marco Doms
IPC分类号： H01R43/02 , G01L7/00
CPC分类号： H01R43/0235 , B23K1/0008 , B23K1/008 , B23K1/19 , B23K35/0222 , B23K35/32 , C04B37/006 , C04B2235/6581 , C04B2235/72 , C04B2237/122 , C04B2237/127 , C04B2237/128 , C04B2237/343 , C04B2237/592 , C04B2237/60 , C04B2237/708 , G01L7/00 , G01L9/0075
摘要： A method for manufacturing a connection between two ceramic parts comprises: providing a first ceramic part and a second ceramic part; providing an active hard solder, or active braze, on at least one surface section of at least one of the ceramic parts; and heating the active hard solder, or active braze, in a vacuum soldering, brazing process. The entire active hard solder, or active braze, for connecting the first and second ceramic parts is provided in such a manner that at least one surface section of at least one of the ceramic parts, preferably both ceramic parts, is coated by means of gas phase deposition of the alloy of the active hard solder, or active braze.
摘要翻译：一种用于制造两个陶瓷部件之间的连接的方法包括：提供第一陶瓷部件和第二陶瓷部件; 在至少一个陶瓷部件的至少一个表面部分上提供活性硬焊料或活性钎焊; 并在真空钎焊钎焊工艺中加热活性硬焊料或活性钎焊。提供了用于连接第一和第二陶瓷部件的整个活性硬焊料或活性钎焊，使得至少一个陶瓷部件的至少一个表面部分，优选两个陶瓷部件都通过气体涂覆活性硬焊料的合金的相沉积或活性钎焊。

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