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    • 2. 发明授权
    • Capacitive ceramic pressure measuring cell and pressure sensor with such a pressure measuring cell
    • 电容式陶瓷压力测量单元和压力传感器,带有这样的压力测量单元
    • US08966989B2
    • 2015-03-03
    • US13383696
    • 2010-06-22
    • Ulfert DrewesThomas UehlinElke SchmidtAndreas Rossberg
    • Ulfert DrewesThomas UehlinElke SchmidtAndreas Rossberg
    • G01L9/12G01L9/00
    • G01L9/0075
    • A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.
    • 一种电容式压力测量单元,包括陶瓷平台和陶瓷测量膜,它们沿接头压紧,在它们之间形成参考压力室。 测量膜具有面向平台的第一电极,并且平台具有面向测量膜的至少第二电极。 第一和第二电极之间的电容取决于外部作用在测量膜上的压力与参考压力室中的压力差之间的差异,其中接头具有厚度d,其限定了测量膜与测量膜之间的平衡距离 平台前方 在平台的前侧,布置有支撑层,其包括无机绝缘体,其中支撑层具有至少0.2的厚度,并且其中第二电极布置在支撑层上。
    • 6. 发明授权
    • Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
    • 电容式压力传感器单元或差压传感器单元及其制造方法
    • US06267009B1
    • 2001-07-31
    • US09505489
    • 2000-02-16
    • Ulfert DrewesElke SchmidtAndreas RossbergFrank HegnerThomas Velten
    • Ulfert DrewesElke SchmidtAndreas RossbergFrank HegnerThomas Velten
    • G01L912
    • G01L9/0075G01L9/0044
    • These capacitive pressure sensor cells have joints between substrates and diaphragms being both pressure and/or tension-proof and high-vacuum-tight and long-term-stable. The sensor cell comprises a ceramic substrate (1) having a cylindrical surface (11), a major surfaces (12, 13). The major surface (12) includes a concave central area (121) merging, in the direction of and up to said cylindrical surface (11), into a convex surface (124) having a vertex line (125) and forming a planar ring surface (126) in its area. An electrode (122) is located in the concave area (121). An electrical connection (123) extends from electrode (122) through the substrate (1) to surface (13). A ceramic diaphragm (5) has a planar inner surface (51) on which an electrode (52) is located and which rests on the ring surface (126) of the substrate (1). The diaphragm (5) is joined to the substrate by an active brazing solder forming a circumferential wedge zone (91) in the area of the substrate between the ring surface (126) and the cylindrical surface (11). An electrical connection to the electrode (52) is made through the wedge zone (91). Respective differential pressure sensors can comprise a central substrate (2) and two outer diaphragms (61, 71) or a central diaphragm (8) and two outer substrates (3, 4).
    • 这些电容式压力传感器单元在基板和隔膜之间具有接头,其压力和/或抗张力和高真空密封性和长期稳定性。 传感器单元包括具有圆柱形表面(11),主表面(12,13)的陶瓷基底(1)。 主表面(12)包括凹入的中心区域(121),其在所述圆柱形表面(11)的方向上并且与所述圆柱形表面(11)一起合并成具有顶点线(125)的凸形表面(124)并形成平面环表面 (126)。 电极(122)位于凹部(121)中。 电连接(123)从电极(122)穿过衬底(1)延伸到表面(13)。 陶瓷膜片(5)具有平面的内表面(51),电极(52)位于该平面内表面上,并且该陶瓷膜片位于衬底(1)的环表面(126)上。 膜片(5)通过在环形表面(126)和圆柱形表面(11)之间的衬底区域中形成周向楔形区域(91)的活性钎焊焊料与衬底接合。 通过楔形区域(91)制成与电极(52)的电连接。 各差压传感器可以包括中央基板(2)和两个外隔膜(61,71)或中央隔膜(8)和两个外基板(3,4)。
    • 7. 发明申请
    • Pressure Sensor and Method for its Manufacture
    • 压力传感器及其制造方法
    • US20130263670A1
    • 2013-10-10
    • US13993111
    • 2011-11-23
    • Peter SeldersAndreas RossbergElke SchmidtAndrea Berlinger
    • Peter SeldersAndreas RossbergElke SchmidtAndrea Berlinger
    • G01L7/00B23K31/02
    • G01L7/00B23K31/02G01L9/0044G01L9/0075
    • A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze. The intermediate ring is positioned between the measuring membrane and the platform; the active hard solder, or braze, is heated in a soldering, or brazing, process, wherein the intermediate ring remains essentially solid during the soldering, or brazing, process.
    • 一种制造压力传感器的方法,包括:提供陶瓷平台,陶瓷测量膜和中间环; 通过气相沉积至少在第一表面的第一表面部分和第二表面的第二表面部分上提供活性钎焊材料。 第一表面是平台表面,其将通过活性硬焊料或钎焊或中间环的表面与中间环连接,该表面将通过活性硬的 焊接或钎焊。 第二表面是测量膜表面,其将通过活性硬焊料或钎焊或中间环的表面与中间环连接,所述中间环将与测量膜连接,借助于 活性硬焊料或钎焊。 中间环位于测量膜和平台之间; 活性硬焊料或钎焊在焊接或钎焊工艺中被加热,其中中间环在焊接或钎焊过程中保持基本上固体。
    • 9. 发明授权
    • Hydrophobically coated pressure sensor
    • 疏水涂层压力传感器
    • US06941814B2
    • 2005-09-13
    • US10498515
    • 2002-12-18
    • Frank HegnerUlfert DrewesAndreas RossbergElke Schmidt
    • Frank HegnerUlfert DrewesAndreas RossbergElke Schmidt
    • G01L19/06G01L7/00G01L9/00G01L9/12
    • G01L9/0075
    • A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.
    • 用于测量压力的压力传感器包括压力室; 以及变形体,其可以在压力下暴露于介质,并且另外至少部分地限定压力室并且与介质如此压力地密封; 其中传感器室的壁具有通过气相和/或气相沉积施加的疏水涂层。 疏水涂层优选包括硅烷。 特别优选的是具有一个或多个疏水基团R和一个或多个锚定基团X的硅烷。特别优选的是:R-Si-X 3,R 1 R 1, 2 -Si-X 2,R 1 R 2 R 3 -Si-X。 疏水性基团R优选为烷基,全氟烷基,苯基或全氟苯基。 锚定基团X优选为-OH(硅烷醇),-X(卤化物,例如-Cl),-OR(酯,例如-OCH 3),-NH 2(胺)或-SH(巯基甲硅烷)。 另外,脂族或环状硅氮烷-Si-NH-Si-,例如 六甲基二硅氮烷。 同样合适的是类型R a-Me-X z z的化合物,其中Me = Zr,Ti。