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1. 发明申请

WO2010011398A3 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探头外观
公开(公告)号：WO2010011398A3
公开(公告)日：2010-06-03
申请号：PCT/US2009043866
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , NANOINK INC , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
IPC分类号： G03F7/00 , G01Q70/10
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双尖端探针。双尖头探针包括设置在悬臂上的第一和第二尖端。第一和第二提示可以分别是读取器尖端和合成尖端。双尖头探针还包括设置在第一和第二尖端之间的悬臂上的肋条。双尖头探针还可以包括沿着悬臂的长度设置的应变仪。

2. 发明申请

WO2010011398A4 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探针外延
公开(公告)号：WO2010011398A4
公开(公告)日：2010-07-29
申请号：PCT/US2009043866
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , NANOINK INC , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
IPC分类号： G03F7/00 , G01Q70/10
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双尖探针。双头探针包括设置在悬臂上的第一和第二尖端。第一和第二尖端可以分别是阅读器尖端和合成尖端。双头探针还包括设置在第一和第二尖端之间的悬臂上的肋。双头探针还可以包括沿着悬臂长度布置的应变计。

3. 发明申请

WO2012158838A2 HIGH DENSITY, HARD TIP ARRAYS 审中-公开
标题翻译：高密度，硬尖端阵列
公开(公告)号：WO2012158838A2
公开(公告)日：2012-11-22
申请号：PCT/US2012038206
申请日：2012-05-16
申请人： NANOINK INC , HENNING ALBERT K , SHILE RAYMOND ROGER , FRAGALA JOSEPH S , AMRO NABIL A , HAAHEIM JASON R
发明人： HENNING ALBERT K , SHILE RAYMOND ROGER , FRAGALA JOSEPH S , AMRO NABIL A , HAAHEIM JASON R
IPC分类号： B81C99/00
CPC分类号： B81C99/009 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T156/10 , Y10T156/1052
摘要： Improved high density, hard tip arrays for use in patterning including an article comprises a handle chip; and a silicon nitride membrane bonded to at least a portion of the handle chip. The silicon nitride membrane comprises an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane. A method comprises preparing a silicon nitride membrane comprising an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane; preparing a handle wafer; and bonding the silicon nitride membrane to at least a portion of the handle wafer to form an bonded tip array. Another article comprises an elastomeric backing member; and an array of tips disposed on the elastomeric backing member. The tips of the array comprise a refractory material. Another method comprises providing at least one mold for a tip array comprising a plurality of mold regions for tips; filling or coating the mold regions for tips with a refractory material, to form an array of tips comprising a refractory material; and disposing a liquid elastomer precursor material in contact with the refractory material of the tips.
摘要翻译：用于包括制品的图案化中的改进的高密度硬尖头阵列包括手柄芯片; 以及结合到手柄芯片的至少一部分的氮化硅膜。氮化硅膜包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列。一种方法包括制备氮化硅膜，其包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列; 准备一个处理晶圆; 以及将所述氮化硅膜结合到所述处理晶片的至少一部分以形成接合的尖端阵列。另一制品包括弹性体背衬构件; 以及布置在弹性体背衬构件上的尖端阵列。阵列的尖端包括耐火材料。另一种方法包括提供至少一个用于尖端阵列的模具，其包括用于尖端的多个模具区域; 用耐火材料填充或涂覆用于尖端的模具区域，以形成包括耐火材料的尖端阵列; 并且将液体弹性体前体材料设置成与尖端的耐火材料接触。

4. 发明申请

WO2009140441A3 PIEZORESISTOR HEIGHT SENSING CANTILEVER 审中-公开
公开(公告)号：WO2009140441A3
公开(公告)日：2010-01-28
申请号：PCT/US2009043865
申请日：2009-05-13
申请人： NANOINK INC , FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
发明人： FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

5. 发明申请

WO2009140442A3 HEATED CANTILEVER 审中-公开
标题翻译：加热CANTILEVER
公开(公告)号：WO2009140442A3
公开(公告)日：2010-01-14
申请号：PCT/US2009043867
申请日：2009-05-13
申请人： HANOINK INC , FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
发明人： FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device is provided comprising at least one cantilever comprising at least one tip and at least one heating element. Methods for making and using such a device are also provided.
摘要翻译：提供了一种装置，其包括至少一个包括至少一个尖端和至少一个加热元件的悬臂。还提供了制造和使用这种装置的方法。

6. 发明申请

WO2011009094A3 LEVELING DEVICES AND METHODS 审中-公开
标题翻译：水平设备和方法
公开(公告)号：WO2011009094A3
公开(公告)日：2012-04-12
申请号：PCT/US2010042352
申请日：2010-07-16
申请人： NANOINK INC , BUSSAN JOHN EDWARD , ROZHOK SERGEY V , VAL-KHVALABOV VADIM , FRAGALA JOSEPH S , HAAHEIM JASON R , NELSON MICHAEL R , SOLHEIM EDWARD R , VAKIL JAVAD M
发明人： BUSSAN JOHN EDWARD , ROZHOK SERGEY V , VAL-KHVALABOV VADIM , FRAGALA JOSEPH S , HAAHEIM JASON R , NELSON MICHAEL R , SOLHEIM EDWARD R , VAKIL JAVAD M
IPC分类号： G03F7/00 , B82B3/00 , G03F9/00
CPC分类号： G03F7/0002 , G01Q80/00 , G03F9/7034 , G03F9/7053
摘要： Devices for leveling an object for patterning a substrate surface, including an array of scanning probe tips, are provided. A device may include a support structure adapted to mount an object, the object having a plurality of protrusions adapted to form a pattern on a surface of a substrate upon contact of the object to the surface; and at least one flexible joint assembly mounted to the support structure and adapted to allow the object to achieve a parallel orientation with respect to the surface upon contact of the object to the surface. Also provided are apparatuses and kits incorporating the devices and methods of making and using the devices and apparatuses.
摘要翻译：提供了用于调整用于图案化衬底表面的对象的设备，包括扫描探针尖端的阵列。装置可以包括适于安装物体的支撑结构，所述物体具有适于在物体与表面接触时在基底的表面上形成图案的多个突起; 以及至少一个柔性接头组件，其安装到所述支撑结构并且适于允许所述物体在所述物体与所述表面接触时相对于所述表面实现平行取向。还提供了结合设备的装置和套件以及制造和使用设备和装置的方法。

7. 发明专利

AU2008225175A1 Nanolithography with use of viewports 未知
公开(公告)号：AU2008225175A1
公开(公告)日：2008-09-18
申请号：AU2008225175
申请日：2008-03-11
申请人： NANOINK INC
发明人： FRAGALA JOSEPH S , HAAHEIM JASON , SHILE RAYMOND R
IPC分类号： G03F7/00 , G01Q60/38 , G01Q60/42
摘要： Two dimensional arrays of cantilevers for use in transferring inks from the cantilever tip to substrates are improved with use of viewports to view the cantilevers from a far side. This improves the leveling behavior when large numbers of cantilevers are present. It also provides for better laser access. Bioarrays and combinatorial applications are particularly important. Massively parallel direct write printing with more than 55,000 cantilever tips can be achieved.

8. 发明专利

CA2795920A1 IMPROVED CANTILEVERS FOR DEPOSITION 未知
公开(公告)号：CA2795920A1
公开(公告)日：2011-10-20
申请号：CA2795920
申请日：2011-04-13
申请人： NANOINK INC
发明人： FRAGALA JOSEPH S , SHILE R ROGER , ROZHOK SERGEY V
IPC分类号： G03F7/00 , B82B3/00
摘要： Cantilever design for patterning from a cantilever tip can be improved with, for example, a recessed area surrounding the cantilever tip. A device for printing nanoscopic and microscopic patterns includes at least one cantilever having a front surface, a first side edge, a second side edge, and a first end which is a free end and a second end which is a non-free end. The front surface includes at least one first sidewall disposed at the first cantilever side edge and at least one second sidewall disposed at the second cantilever side edge opposing the first cantilever side edge, at least one channel, adapted to hold a fluid, disposed between the first and second sidewalls, wherein the channel, the first sidewall, and the second sidewall extend toward the cantilever free end but do not reach the free end, and a base region having a boundary defined by the first edge, the second edge, and the cantilever free end and also the first sidewall, second sidewall, and the channel, wherein the base region comprises a tip extending away from the cantilever front surface. Improved deposition can result. Fluidic inks comprising biomolecules can be patterned successfully.

9. 发明专利

CA2763640A1 LEVELING DEVICES AND METHODS 未知
公开(公告)号：CA2763640A1
公开(公告)日：2011-01-20
申请号：CA2763640
申请日：2010-07-16
申请人： NANOINK INC
发明人： BUSSAN JOHN EDWARD , ROZHOK SERGEY V , VAL-KHVALABOV VADIM , FRAGALA JOSEPH S , HAAHEIM JASON R , NELSON MICHAEL R , SOLHEIM EDWARD R , VAKIL JAVAD M
IPC分类号： G03F7/00 , B82B3/00 , G03F9/00
摘要： Devices for leveling an object for patterning a substrate surface, including an array of scanning probe tips, are provided. A device may include a support structure adapted to mount an object, the object having a plurality of protrusions adapted to form a pattern on a surface of a substrate upon contact of the object to the surface; and at least one flexible joint assembly mounted to the support structure and adapted to allow the object to achieve a parallel orientation with respect to the surface upon contact of the object to the surface. Also provided are apparatuses and kits incorporating the devices and methods of making and using the devices and apparatuses.

10. 发明专利

AU2008251612A1 Compact nanofabrication apparatus 未知
公开(公告)号：AU2008251612A1
公开(公告)日：2008-11-20
申请号：AU2008251612
申请日：2008-05-07
申请人： NANOINK INC
发明人： NELSON MICHAEL , BUSSAN JOHN EDWARD , FRAGALA JOSEPH S , SHILE RAYMOND ROGER , AMRO NABIL A , ROZHOK SERGEY V , VANMERKESTYN DIRK N
IPC分类号： G03F7/00 , G03F7/20
摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.

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