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1. 发明申请

WO2009140442A3 HEATED CANTILEVER 审中-公开
标题翻译：加热CANTILEVER
公开(公告)号：WO2009140442A3
公开(公告)日：2010-01-14
申请号：PCT/US2009043867
申请日：2009-05-13
申请人： HANOINK INC , FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
发明人： FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device is provided comprising at least one cantilever comprising at least one tip and at least one heating element. Methods for making and using such a device are also provided.
摘要翻译：提供了一种装置，其包括至少一个包括至少一个尖端和至少一个加热元件的悬臂。还提供了制造和使用这种装置的方法。

2. 发明申请

WO2012158838A2 HIGH DENSITY, HARD TIP ARRAYS 审中-公开
标题翻译：高密度，硬尖端阵列
公开(公告)号：WO2012158838A2
公开(公告)日：2012-11-22
申请号：PCT/US2012038206
申请日：2012-05-16
申请人： NANOINK INC , HENNING ALBERT K , SHILE RAYMOND ROGER , FRAGALA JOSEPH S , AMRO NABIL A , HAAHEIM JASON R
发明人： HENNING ALBERT K , SHILE RAYMOND ROGER , FRAGALA JOSEPH S , AMRO NABIL A , HAAHEIM JASON R
IPC分类号： B81C99/00
CPC分类号： B81C99/009 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T156/10 , Y10T156/1052
摘要： Improved high density, hard tip arrays for use in patterning including an article comprises a handle chip; and a silicon nitride membrane bonded to at least a portion of the handle chip. The silicon nitride membrane comprises an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane. A method comprises preparing a silicon nitride membrane comprising an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane; preparing a handle wafer; and bonding the silicon nitride membrane to at least a portion of the handle wafer to form an bonded tip array. Another article comprises an elastomeric backing member; and an array of tips disposed on the elastomeric backing member. The tips of the array comprise a refractory material. Another method comprises providing at least one mold for a tip array comprising a plurality of mold regions for tips; filling or coating the mold regions for tips with a refractory material, to form an array of tips comprising a refractory material; and disposing a liquid elastomer precursor material in contact with the refractory material of the tips.
摘要翻译：用于包括制品的图案化中的改进的高密度硬尖头阵列包括手柄芯片; 以及结合到手柄芯片的至少一部分的氮化硅膜。氮化硅膜包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列。一种方法包括制备氮化硅膜，其包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列; 准备一个处理晶圆; 以及将所述氮化硅膜结合到所述处理晶片的至少一部分以形成接合的尖端阵列。另一制品包括弹性体背衬构件; 以及布置在弹性体背衬构件上的尖端阵列。阵列的尖端包括耐火材料。另一种方法包括提供至少一个用于尖端阵列的模具，其包括用于尖端的多个模具区域; 用耐火材料填充或涂覆用于尖端的模具区域，以形成包括耐火材料的尖端阵列; 并且将液体弹性体前体材料设置成与尖端的耐火材料接触。

3. 发明申请

WO2009140441A3 PIEZORESISTOR HEIGHT SENSING CANTILEVER 审中-公开
公开(公告)号：WO2009140441A3
公开(公告)日：2010-01-28
申请号：PCT/US2009043865
申请日：2009-05-13
申请人： NANOINK INC , FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
发明人： FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

4. 发明申请

WO2010011398A3 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探头外观
公开(公告)号：WO2010011398A3
公开(公告)日：2010-06-03
申请号：PCT/US2009043866
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , NANOINK INC , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
IPC分类号： G03F7/00 , G01Q70/10
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双尖端探针。双尖头探针包括设置在悬臂上的第一和第二尖端。第一和第二提示可以分别是读取器尖端和合成尖端。双尖头探针还包括设置在第一和第二尖端之间的悬臂上的肋条。双尖头探针还可以包括沿着悬臂的长度设置的应变仪。

5. 发明申请

WO2010011398A4 SCANNING PROBE EPITAXY 审中-公开
标题翻译：扫描探针外延
公开(公告)号：WO2010011398A4
公开(公告)日：2010-07-29
申请号：PCT/US2009043866
申请日：2009-05-13
申请人： UNIV NORTHWESTERN , NANOINK INC , MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
发明人： MIRKIN CHAD A , LIU CHANG , WANG YUHUANG , BRAUNSCHWEIG ADAM B , LIAO XING , GIAM LOUISE R , LEE BYUNG YANG , FRAGALA JOSEPH S , HENNING ALBERT K
IPC分类号： G03F7/00 , G01Q70/10
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A dual tip probe for scanning probe epitaxy is disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The dual tip probe further includes a rib disposed on the cantilever arm between the first and second tips. The dual tip probe can also include a strain gauge disposed along the length of the cantilever arm.
摘要翻译：公开了一种用于扫描探针外延的双尖探针。双头探针包括设置在悬臂上的第一和第二尖端。第一和第二尖端可以分别是阅读器尖端和合成尖端。双头探针还包括设置在第一和第二尖端之间的悬臂上的肋。双头探针还可以包括沿着悬臂长度布置的应变计。

6. 发明申请

WO2011009094A3 LEVELING DEVICES AND METHODS 审中-公开
标题翻译：水平设备和方法
公开(公告)号：WO2011009094A3
公开(公告)日：2012-04-12
申请号：PCT/US2010042352
申请日：2010-07-16
申请人： NANOINK INC , BUSSAN JOHN EDWARD , ROZHOK SERGEY V , VAL-KHVALABOV VADIM , FRAGALA JOSEPH S , HAAHEIM JASON R , NELSON MICHAEL R , SOLHEIM EDWARD R , VAKIL JAVAD M
发明人： BUSSAN JOHN EDWARD , ROZHOK SERGEY V , VAL-KHVALABOV VADIM , FRAGALA JOSEPH S , HAAHEIM JASON R , NELSON MICHAEL R , SOLHEIM EDWARD R , VAKIL JAVAD M
IPC分类号： G03F7/00 , B82B3/00 , G03F9/00
CPC分类号： G03F7/0002 , G01Q80/00 , G03F9/7034 , G03F9/7053
摘要： Devices for leveling an object for patterning a substrate surface, including an array of scanning probe tips, are provided. A device may include a support structure adapted to mount an object, the object having a plurality of protrusions adapted to form a pattern on a surface of a substrate upon contact of the object to the surface; and at least one flexible joint assembly mounted to the support structure and adapted to allow the object to achieve a parallel orientation with respect to the surface upon contact of the object to the surface. Also provided are apparatuses and kits incorporating the devices and methods of making and using the devices and apparatuses.
摘要翻译：提供了用于调整用于图案化衬底表面的对象的设备，包括扫描探针尖端的阵列。装置可以包括适于安装物体的支撑结构，所述物体具有适于在物体与表面接触时在基底的表面上形成图案的多个突起; 以及至少一个柔性接头组件，其安装到所述支撑结构并且适于允许所述物体在所述物体与所述表面接触时相对于所述表面实现平行取向。还提供了结合设备的装置和套件以及制造和使用设备和装置的方法。

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