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1. 发明申请

US20070093079A1 Imprinting method and imprinting apparatus 审中-公开
标题翻译：压印方法和压印装置
公开(公告)号：US20070093079A1
公开(公告)日：2007-04-26
申请号：US10565586
申请日：2004-07-23
申请人： Tsuyoshi Aruga , Junichi Hagihara
发明人： Tsuyoshi Aruga , Junichi Hagihara
IPC分类号： H01L21/00 , B44C1/22 , B29C47/00 , E04G11/22
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F9/00 , H01L21/4803 , H01L21/563 , H01L21/67109 , H01L24/75 , H01L24/81 , H01L2224/73203 , H01L2924/01029 , H01L2924/01078 , H01L2924/12042 , H01L2924/30107 , H01L2924/00
摘要： An imprinting method of the present invention is to press a mold member (40) having thereon a mold pattern onto a film carried on a principal plane of a substrate (50) as an object to be processed, so as to transfer the mold pattern to the film. A plurality of substrates (50) are fixed on a chuck stage (20). One of the substrates (50) can be selectively heated by a heater (21) and a cooling line (22). The mold member (40) is fixed on a head plate (30) which is disposed to be opposed to the chuck stage (20). The selectively heated substrate (50) and the mold member (40) are positioned relative to each other, and the mold member (40) is pressed onto a film on the substrate (50). By repeating this operation, all the substrates (50) are imprinted.
摘要翻译：本发明的压印方法是将其上具有模具图案的模具（40）压在作为被处理对象的基板（50）的主平面上的膜上，以将模具图案转印到这个电影。多个基板（50）固定在卡盘台（20）上。可以通过加热器（21）和冷却管线（22）选择性地加热基板（50）中的一个。模具构件（40）固定在设置成与卡盘台（20）相对的头板（30）上。选择性加热的基板（50）和模具构件（40）相对于彼此定位，并且将模具构件（40）压在基板（50）上的膜上。通过重复该操作，印制所有基板（50）。

2. 发明申请

US20070187868A1 Pasting method and pasting apparatus 审中-公开
标题翻译：粘贴方法和粘贴装置
公开(公告)号：US20070187868A1
公开(公告)日：2007-08-16
申请号：US10566217
申请日：2004-07-14
申请人： Tsuyoshi Aruga , Junichi Hagihara , Wataru Okase , Eiji Yamaguchi
发明人： Tsuyoshi Aruga , Junichi Hagihara , Wataru Okase , Eiji Yamaguchi
IPC分类号： B29C39/10
CPC分类号： B32B38/1833 , B32B37/1284 , B32B2038/1891 , H01L21/67092 , H01L27/14634
摘要： A pasting method and a pasting apparatus hold a thin plate 1 and a planar member 2 in high flatness respectively on a first holding member 44 and a second holding member 44, a main controller 40a controls a moving mechanism 45 and a parallelism adjusting mechanism 52 on the basis of information provided by position recognizing mechanisms 33 and 34 to align the thin plate 1 and the carrying member 2 with each other in a predetermined positional relation. The main controller 40a controls a moving mechanism 45 so as to move the thin plate 1 and the carrying member 2 relative to each other in a state where a liquid-phase liquid crystal wax heated by a heater 49 is held between the thin plate 1 and the carrying member 2 to spread the liquid-phase liquid crystal wax over the entire surfaces of the thin plate 1 and the carrying member 2. Thus the thin plate 1, such as a semiconductor wafer or a metal foil, can be accurately, surely and efficiently pasted to the carrying member 2, and the thin plate 1 pasted to the carrying member 2 can be readily separated from the carrying member 2.
摘要翻译：粘贴方法和粘贴装置将第一保持构件44和第二保持构件44上的薄板1和平面构件2分别保持在高平面度，主控制器40a控制移动机构45和平行度调节机构52 基于由位置识别机构33和34提供的信息，以使薄板1和承载构件2以预定的位置关系彼此对准。主控制器40a控制移动机构45，以便在由加热器49加热的液相蜡保持在薄板1之间的状态下相对于彼此移动薄板1和承载构件2 和携带部件2将液相液晶蜡扩散到薄板1和承载部件2的整个表面上。因此，可以将准确可靠且有效地粘贴到承载构件2上的诸如半导体晶片或金属箔的薄板1粘贴到承载构件2上的薄板1能够容易地从承载构件2分离。

3. 发明申请

US20070105459A1 Joining method and joining device 审中-公开
标题翻译：加盟方式和加盟设备
公开(公告)号：US20070105459A1
公开(公告)日：2007-05-10
申请号：US10563131
申请日：2004-06-29
申请人： Tsuyoshi Aruga , Junichi Hagihara
发明人： Tsuyoshi Aruga , Junichi Hagihara
IPC分类号： H01R13/73
CPC分类号： H01L21/67092 , B23K20/023 , B23K2101/40 , H01L21/4835 , H01L21/67057 , H01L23/481 , H01L24/75 , H01L24/81 , H01L24/90 , H01L2224/75 , H01L2224/7501 , H01L2224/75251 , H01L2224/75252 , H01L2224/75301 , H01L2224/75501 , H01L2224/75502 , H01L2224/75744 , H01L2224/75821 , H01L2224/80895 , H01L2224/8101 , H01L2224/81011 , H01L2224/81026 , H01L2224/81121 , H01L2224/81203 , H01L2224/81801 , H01L2224/81894 , H01L2224/83192 , H01L2224/83895 , H01L2224/90 , H01L2924/01006 , H01L2924/01029 , H01L2924/01033 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/30107 , H01L2924/00
摘要： The present invention relates to a bonding method of bonding a first object to be bonded and a second object to be bonded by a pressurizing operation. The bonding method of the present invention is a first step of causing a first holding member and a second holding member to respectively hold the first object to be bonded and the second object to be bonded in such a manner that a bonding surface of the first object to be bonded and a holding surface of the second object to be bonded face to each other, a second step of treating the bonding surface of the first object to be bonded and the holding surface of the second object to be bonded with a treatment liquid under a condition wherein the first object to be bonded and the second object to be bonded are held by the first holding member and the second holding member, and a third step of pressurizing the first object to be bonded and the second object to be bonded toward each other by the first holding member and the second holding member in order to bond both the bonding surfaces close to each other.
摘要翻译：本发明涉及通过加压操作来接合待接合的第一物体和待接合的第二物体的接合方法。本发明的接合方法是使第一保持构件和第二保持构件分别保持待接合物体和第二被接合物体的第一步骤，使得第一物体的接合面待接合的第二物体的保持面彼此面对;第二步骤，处理待接合物的接合面和待接合的第二物体的保持面，处理液在下面第一保持部件和第二保持部件保持要被接合的第一被接合体和第二被接合体的状态，以及第三工序，对第一被接合物体和第二被接合物体进行加压，另外通过第一保持构件和第二保持构件，以便将两个接合表面彼此接近。

4. 发明授权

US08674712B2 Apparatus for driving placing table 失效
标题翻译：用于驾驶放置台的装置
公开(公告)号：US08674712B2
公开(公告)日：2014-03-18
申请号：US13159108
申请日：2011-06-13
申请人： Tsuyoshi Aruga , Hiroshi Shimoyama , Hiroshi Yamada
发明人： Tsuyoshi Aruga , Hiroshi Shimoyama , Hiroshi Yamada
IPC分类号： G01R31/00 , G01R31/28
CPC分类号： G01R31/2891 , G01R31/2887 , H01L21/67242 , H01L21/67748
摘要： Disclosed is an apparatus for driving a placing table that contributes to saving a space and reducing the weight of an inspecting apparatus. The apparatus for driving a placing table according to an exemplary embodiment of the present disclosure includes a horizontal driving mechanism that horizontally moves a placing table in an inspecting chamber, a base that supports horizontal driving mechanism, a placing table lifting mechanism (for example, air bearing) that lifts placing table from support, using compressed air in inspecting chamber, a connecting mechanism that connects horizontal driving mechanism with placing table, and a case that accommodates the horizontal driving mechanism and the base.
摘要翻译：公开了一种用于驱动放置台的装置，其有助于节省空间并降低检查装置的重量。根据本公开的示例性实施例的用于驱动放置台的装置包括水平驱动机构，其水平地移动检查室中的放置台，支撑水平驱动机构的基座，放置台提升机构（例如，空气轴承），其从支撑件提升放置台，在检查室中使用压缩空气，将水平驱动机构与放置台连接的连接机构，以及容纳水平驱动机构和底座的壳体。

5. 发明申请

US20110304348A1 Apparatus for Driving Placing Table 失效
标题翻译：驱动配售表装置
公开(公告)号：US20110304348A1
公开(公告)日：2011-12-15
申请号：US13159108
申请日：2011-06-13
申请人： Tsuyoshi Aruga , Hiroshi Shimoyama , Hiroshi Yamada
发明人： Tsuyoshi Aruga , Hiroshi Shimoyama , Hiroshi Yamada
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2887 , H01L21/67242 , H01L21/67748
摘要： Disclosed is an apparatus for driving a placing table that contributes to saving a space and reducing the weight of an inspecting apparatus. The apparatus for driving a placing table according to an exemplary embodiment of the present disclosure includes a horizontal driving mechanism that horizontally moves a placing table in an inspecting chamber, a base that supports horizontal driving mechanism, a placing table lifting mechanism (for example, air bearing) that lifts placing table from support, using compressed air in inspecting chamber, a connecting mechanism that connects horizontal driving mechanism with placing table, and a case that accommodates the horizontal driving mechanism and the base.
摘要翻译：公开了一种用于驱动放置台的装置，其有助于节省空间并降低检查装置的重量。根据本公开的示例性实施例的用于驱动放置台的装置包括水平驱动机构，其水平地移动检查室中的放置台，支撑水平驱动机构的基座，放置台提升机构（例如，空气轴承），其从支撑件提升放置台，在检查室中使用压缩空气，将水平驱动机构与放置台连接的连接机构，以及容纳水平驱动机构和底座的壳体。

6. 发明授权

US5798651A Probe system 失效
标题翻译：探测系统
公开(公告)号：US5798651A
公开(公告)日：1998-08-25
申请号：US661405
申请日：1996-06-07
申请人： Tsuyoshi Aruga , Wataru Mochizuki , Shuji Akiyama , Hisatomi Hosaka , Yuichi Abe
发明人： Tsuyoshi Aruga , Wataru Mochizuki , Shuji Akiyama , Hisatomi Hosaka , Yuichi Abe
IPC分类号： G01R31/01 , G01R31/28 , G01R31/02
CPC分类号： G01R31/01 , G01R31/2887
摘要： A probe system according to the present invention has a plurality of exploration portions disposed in a line, spaced apart from one another for predetermined distances and each having a test head, for establishing electrical connection between the test head and electrodes of a subject of exploration so as to explore electrical characteristics of the subject of exploration, a conveyance passage running parallel to the line of the exploration portions, a retainer portion on which a plurality of the subjects of exploration are placed, which is facing to the conveyance passage and which is capable of elevating vertical with respect to the conveyance passage at a position above the conveyance passage, and delivery and acceptance unit arranged capable of moving along the conveyance passage and arranged to deliver and accept the subjects of exploration between the retainer portion and each of the exploration portions.
摘要翻译：根据本发明的探针系统具有多个探测部分，其设置成一条线，彼此间隔开预定距离，并且每个具有测试头，用于建立测试头与探测对象的电极之间的电连接。为了探索探测对象的电气特性，平行于探测部分的线路延伸的输送通道，放置有多个探测对象的保持器部分，其面向输送通道并且能够在输送通道上方的位置相对于输送通道垂直升降;以及输送接收单元，其布置成能够沿着输送通道移动并且布置成输送和接受保持器部分和每个勘探部分之间的探测对象。

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