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1. 发明授权

US08590861B2 Gate valve and substrate processing apparatus equipped with the same 有权
标题翻译：闸阀及其配备的基板处理装置
公开(公告)号：US08590861B2
公开(公告)日：2013-11-26
申请号：US13258519
申请日：2010-03-29
申请人： Tsutomu Hiroki , Masaaki Nose , Masanao Matsushita , Takehiro Nishiba
发明人： Tsutomu Hiroki , Masaaki Nose , Masanao Matsushita , Takehiro Nishiba
IPC分类号： F16K25/00
CPC分类号： F16K51/02 , F16K1/24 , F16K1/443
摘要： A gate valve apparatus is disclosed. The gate valve apparatus is provided with a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed; and a closure element that includes a sealing member that contacts the first valve seat to seal the opening portion. In addition, the gate valve apparatus is provided with a shutoff member that contacts the second valve seat to thereby be deformed, so that a space between the opening portion and a sealing member is shut off by the shutoff member when the closure element closes the opening portion. The shutoff member is deformed and continues to contact the second valve seat under normal and high temperature environments when the closure element closes the opening portion.
摘要翻译：公开了一种闸阀装置。闸阀装置设置有包括第一阀座和第二阀座的阀壳体，其中形成有开口部分; 以及闭合元件，其包括接触所述第一阀座以密封所述开口部的密封构件。此外，闸阀装置设置有与第二阀座接触从而变形的切断构件，使得当闭合元件闭合开口时，通过关闭构件将开口部和密封构件之间的空间切断一部分。当闭合元件关闭开口部分时，关闭构件变形并在正常和高温环境下继续接触第二阀座。

2. 发明申请

US20120055400A1 GATE VALVE AND SUBSTRATE PROCESSING APPARATUS EQUIPPED WITH THE SAME 有权
标题翻译：门阀和底板加工设备配备
公开(公告)号：US20120055400A1
公开(公告)日：2012-03-08
申请号：US13258519
申请日：2010-03-29
申请人： Tsutomu Hiroki , Masaaki Nose , Masanao Matsushita , Takehiro Nishiba
发明人： Tsutomu Hiroki , Masaaki Nose , Masanao Matsushita , Takehiro Nishiba
IPC分类号： H01L21/00 , B05C9/00 , F16K3/00
CPC分类号： F16K51/02 , F16K1/24 , F16K1/443
摘要： Agate valve apparatus is disclosed. The gate valve apparatus is provided with a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed; and a closure element that includes a sealing member that contacts the first valve seat to seal the opening portion. In addition, the gate valve apparatus is provided with a shutoff member that contacts the second valve seat to thereby be deformed, so that a space between the opening portion and a sealing member is shut off by the shutoff member when the closure element closes the opening portion. The shutoff member is deformed and continues to contact the second valve seat under normal and high temperature environments when the closure element closes the opening portion.
摘要翻译：公开了玛盖特阀装置。闸阀装置设置有包括第一阀座和第二阀座的阀壳体，其中形成有开口部分; 以及闭合元件，其包括接触所述第一阀座以密封所述开口部的密封构件。此外，闸阀装置设置有与第二阀座接触从而变形的切断构件，使得当闭合元件闭合开口时，通过关闭构件将开口部和密封构件之间的空间切断一部分。当闭合元件关闭开口部分时，关闭构件变形并在正常和高温环境下继续接触第二阀座。

3. 发明申请

US20090189107A1 Valve device 审中-公开
标题翻译：阀门装置
公开(公告)号：US20090189107A1
公开(公告)日：2009-07-30
申请号：US12320757
申请日：2009-02-04
申请人： Takehiro Nishiba
发明人： Takehiro Nishiba
IPC分类号： F16K31/44
CPC分类号： F16K51/02 , F16K1/24
摘要： A valve device includes a valve element unit for closing or opening a first opening formed in a casing; a valve element driving unit for rotating the valve element unit around an axis to move to a position facing the first opening, and for moving the valve element unit in a radial direction to seat at the first opening; a first sealing member provided on the valve element unit; and a stopper for restricting a rotation of the valve element unit. The valve element driving unit includes a support for supporting the valve element unit to be rotatable; a shaft part having an eccentric shaft portion connected to the valve element unit and having a center located at a position apart from a rotational center by a predetermined distance; and a driving source for rotating the shaft part. The stopper restricts a rotation of the support in one direction at a position where the valve element unit faces the opening.
摘要翻译：阀装置包括用于关闭或打开形成在壳体中的第一开口的阀元件单元; 阀元件驱动单元，用于使所述阀元件单元绕轴线旋转以移动到面向所述第一开口的位置，并且用于沿所述径向移动所述阀元件单元以在所述第一开口处座位; 设置在阀元件单元上的第一密封构件; 以及用于限制阀芯单元的旋转的止动件。阀元件驱动单元包括用于支撑阀元件可旋转的支撑件; 轴部，其具有连接到所述阀元件单元的偏心轴部，并且具有位于与旋转中心离开预定距离的位置的中心; 以及用于旋转轴部的驱动源。止动器在阀元件单元朝向开口的位置处一个方向限制支撑件的旋转。

4. 发明授权

US08047231B2 Valve element unit and gate valve apparatus 有权
标题翻译：阀元件和闸阀装置
公开(公告)号：US08047231B2
公开(公告)日：2011-11-01
申请号：US12227979
申请日：2007-06-18
申请人： Takehiro Nishiba
发明人： Takehiro Nishiba
IPC分类号： F16K11/04 , C23C14/56
CPC分类号： F16K1/24 , F16K51/02 , H01L21/67126 , Y10T137/86863
摘要： To provide a valve element unit and a gate valve apparatus which realize a reduction in manufacturing cost by a compact and simple structure and smooth rotary driving of the valve element without greatly moving the valve element in the direction of the center of rotation when the valve element is rotary driven.When a valve element unit 52 is rotary driven by valve element driving mechanisms 54, a rotary drive radius R2 of longitudinal both end sides of a first valve element 56 is smaller than a rotary drive radius R1 of a longitudinal center side of the first valve element 56. Therefore, even when a sidewall is formed on a longitudinal outer side of a transfer port 46 of a casing 44, part of the valve element unit 52 does not come into contact (interfere) with the sidewall, which makes it possible to rotary drive the valve element unit 52 only by slightly moving the valve element unit 52 in a direction of the center of rotation, without greatly moving the valve element unit 52 in the direction of the center of rotation at the time of the rotary driving.
摘要翻译：提供一种阀芯单元和闸阀装置，其通过紧凑且简单的结构实现了制造成本的降低，并且在阀元件的旋转驱动时，在阀元件的旋转驱动方向上不会使阀元件沿旋转中心方向大大移动，是旋转驱动的。当阀元件单元52被阀元件驱动机构54旋转驱动时，第一阀元件56的纵向两端侧的旋转驱动半径R2小于第一阀元件的纵向中心侧的旋转驱动半径R1 因此，即使当侧壁形成在壳体44的输送口46的纵向外侧上时，阀元件单元52的一部分不会与侧壁接触（干涉），这使得可以旋转仅通过在旋转中心的方向上稍微移动阀元件单元52来驱动阀元件单元52，而不会在旋转驱动时沿着旋转中心的方向大大地移动阀元件单元52。

5. 发明申请

US20090108226A1 VALVE ELEMENT UNIT AND GATE VALVE APPARATUS 有权
标题翻译：阀门元件和门阀装置
公开(公告)号：US20090108226A1
公开(公告)日：2009-04-30
申请号：US12227979
申请日：2007-06-18
申请人： Takehiro Nishiba
发明人： Takehiro Nishiba
IPC分类号： F16K3/30
CPC分类号： F16K1/24 , F16K51/02 , H01L21/67126 , Y10T137/86863
摘要： To provide a valve element unit and a gate valve apparatus which realize a reduction in manufacturing cost by a compact and simple structure and smooth rotary driving of the valve element without greatly moving the valve element in the direction of the center of rotation when the valve element is rotary driven.When a valve element unit 52 is rotary driven by valve element driving mechanisms 54, a rotary drive radius R2 of longitudinal both end sides of a first valve element 56 is smaller than a rotary drive radius R1 of a longitudinal center side of the first valve element 56. Therefore, even when a sidewall is formed on a longitudinal outer side of a transfer port 46 of a casing 44, part of the valve element unit 52 does not come into contact (interfere) with the sidewall, which makes it possible to rotary drive the valve element unit 52 only by slightly moving the valve element unit 52 in a direction of the center of rotation, without greatly moving the valve element unit 52 in the direction of the center of rotation at the time of the rotary driving.
摘要翻译：提供一种阀芯单元和闸阀装置，其通过紧凑且简单的结构实现了制造成本的降低，并且在阀元件的旋转驱动时，在阀元件的旋转驱动方向上不会使阀元件沿旋转中心方向大大移动，是旋转驱动的。当阀元件单元52被阀元件驱动机构54旋转驱动时，第一阀元件56的纵向两端侧的旋转驱动半径R2小于第一阀元件的纵向中心侧的旋转驱动半径R1 因此，即使当侧壁形成在壳体44的输送口46的纵向外侧上时，阀元件单元52的一部分不会与侧壁接触（干涉），这使得可以旋转仅通过在旋转中心的方向上稍微移动阀元件单元52来驱动阀元件单元52，而不会在旋转驱动时沿着旋转中心的方向大大地移动阀元件单元52。

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