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1. 发明申请

US20070048624A1 Magnetic recording head wiht overlaid leads 失效
标题翻译：磁记录头与重叠导线
公开(公告)号：US20070048624A1
公开(公告)日：2007-03-01
申请号：US11211877
申请日：2005-08-24
申请人： Tsung Chen , Frederick Dill , James Frietag , Kuok San Ho , Wipul Jayasekara , Kim Lee , Mustafa Pinarbasi , Ching Tsang , Pactrick Webb
发明人： Tsung Chen , Frederick Dill , James Frietag , Kuok San Ho , Wipul Jayasekara , Kim Lee , Mustafa Pinarbasi , Ching Tsang , Pactrick Webb
IPC分类号： G03H3/00 , G11B5/127
CPC分类号： G11B5/3932 , G11B5/3929 , G11B5/398 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： An embodiment of the invention is a magnetic head with overlaid lead pads that contact the top surface of the sensor between the hardbias structures and do not contact the hardbias structures which are electrically insulated from direct contact with the sensor. The lead pad contact area on the top of the sensor is defined by sidewall deposition of a conductive material to form leads pads on a photoresist prior to formation of the remainder of the leads. The conductive material for the lead pads is deposited at a shallow angle to maximize the sidewall deposition on the photoresist, then ion-milled at a high angle to remove the conductive material from the field while leaving the sidewall material. An insulation layer is deposited on the lead material at a high angle, then milled at a shallow angle to remove insulation from the sidewall.
摘要翻译：本发明的一个实施例是具有覆盖的引线焊盘的磁头，该焊盘在硬质合金结构之间接触传感器的顶表面，并且不接触与传感器直接接触的电绝缘的硬质合金结构。传感器顶部的引线焊盘接触区域由导电材料的侧壁沉积限定，以在形成其余引线之前在光致抗蚀剂上形成引线焊盘。用于引线焊盘的导电材料以浅角度沉积，以使光致抗蚀剂上的侧壁沉积最大化，然后以高角度离子研磨，以从外界移除导电材料，同时留下侧壁材料。绝缘层以高角度沉积在引线材料上，然后以浅角度铣削以除去与侧壁的绝缘。

2. 发明申请

US20050045580A1 Method of fabricating electronic component using resist structure with no undercut 有权
标题翻译：使用没有底切的抗蚀剂结构制造电子部件的方法
公开(公告)号：US20050045580A1
公开(公告)日：2005-03-03
申请号：US10652053
申请日：2003-08-29
申请人： Amanda Baer , Marie-Claire Cyrille , Frederick Dill , Wipul Jayasekara , Jui-Lung Li , Hugo Santini , Benjamin Wang
发明人： Amanda Baer , Marie-Claire Cyrille , Frederick Dill , Wipul Jayasekara , Jui-Lung Li , Hugo Santini , Benjamin Wang
IPC分类号： G11B5/31 , G11B5/39 , B44C1/22
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/3163 , G11B5/3903 , G11B5/3909 , G11B5/3967 , G11B2005/3996 , H01J2237/3114
摘要： A method for milling a structure. A single- or multi-layer resist having no undercut is added to a surface of a structure to be milled, the surface to be milled defining a plane. A milling process, such as ion milling, is performed. The milling process includes milling the structure at high incidence and milling the structure at razing incidence. The milling process can be performed only once, or repeated multiple times. High incidence can be defined as about 65 to about 90 degrees from the plane of the surface being milled. Razing incidence can be defined as about 0 to about 30 degrees from the plane of the surface being milled.
摘要翻译：一种铣削结构的方法。将未切割的单层或多层抗蚀剂加入要研磨的结构的表面，待研磨的表面限定一个平面。进行铣削加工，例如离子铣削。铣削过程包括以高发射率铣削结构并铣削结构。铣削加工只能执行一次，或重复多次。可以将高入射率定义为从被研磨表面的平面约65度至约90度。闪电发生率可以定义为距被研磨表面的平面约0至约30度。

3. 发明申请

US20050067374A1 Method of forming a read sensor using photoresist structures without undercuts which are removed using chemical-mechanical polishing (CMP) lift-off processes 审中-公开
标题翻译：使用光刻胶结构形成读取传感器的方法，而不使用化学机械抛光（CMP）剥离工艺除去底切
公开(公告)号：US20050067374A1
公开(公告)日：2005-03-31
申请号：US10675697
申请日：2003-09-30
申请人： Ananda Baer , Marie-Claire Cyrilla , Frederick Dill , Benjamin Wang , Charngye Hwang , Mustafa Pinarbasi
发明人： Ananda Baer , Marie-Claire Cyrilla , Frederick Dill , Benjamin Wang , Charngye Hwang , Mustafa Pinarbasi
IPC分类号： G11B5/31 , G11B5/39 , H01L43/08 , B44C1/22
CPC分类号： G11B5/3903 , G11B5/3163
摘要： A method of making a read sensor which defines its stripe height before its trackwidth using photoresist layers formed without undercuts is disclosed. The photoresist layers are removed using chemical-mechanical polishing (CMP) lift-off techniques instead of using conventional solvents. In particular, a first photoresist layer is formed in a central region over a plurality of read sensor layers. End portions of the read sensor layers around the first photoresist layer are removed by ion milling to define the stripe height for the read sensor. Next, insulator layers are deposited where the end portions of the read sensor layers were removed. The first photoresist layer is then removed through mechanical interaction with a CMP pad. In subsequently defining the trackwidth for the read sensor, a second photoresist layer is formed in a central region over the remaining read sensor layers. End portions of the read sensor layers around the second photoresist layer are then removed by ion milling to define the trackwidth for the read sensor. Next, hard bias and lead layers are deposited where the end portions of the read sensor layers were removed. The second photoresist layer is then removed through mechanical interaction with the CMP pad. Preferably, protective layers (e.g. carbon) between the photoresist layers and the read sensor layers are formed prior to photoresist removal. Thus, problems including those inherent with use of photoresist structures having undercuts are eliminated.
摘要翻译：公开了一种制造读取传感器的方法，该读取传感器在其没有底切形成的光致抗蚀剂层之前在其轨道宽度之前限定其条纹高度。使用化学机械抛光（CMP）剥离技术而不是使用常规溶剂来除去光致抗蚀剂层。特别地，在多个读取传感器层上的中心区域中形成第一光致抗蚀剂层。通过离子研磨去除第一光致抗蚀剂层周围的读取传感器层的端部，以限定读取传感器的条带高度。接下来，沉积读取传感器层的端部的绝缘体层被去除。然后通过与CMP垫的机械相互作用去除第一光致抗蚀剂层。随后定义读取传感器的轨道宽度，在剩余的读取传感器层上的中心区域中形成第二光致抗蚀剂层。然后通过离子铣削去除第二光致抗蚀剂层周围的读取传感器层的端部，以限定读取传感器的轨道宽度。接下来，在读取传感器层的端部被去除的地方沉积硬偏压和引线层。然后通过与CMP垫的机械相互作用去除第二光致抗蚀剂层。优选地，在光致抗蚀剂去除之前形成光致抗蚀剂层和读取传感器层之间的保护层（例如碳）。因此，消除了包括使用具有底切的光致抗蚀剂结构固有的那些问题。

4. 发明申请

US20060082932A1 Magnetic read head with dual layer lead 审中-公开
标题翻译：带双层引线的磁头
公开(公告)号：US20060082932A1
公开(公告)日：2006-04-20
申请号：US11292157
申请日：2005-12-01
申请人： Marie-Claire Cyrille , Frederick Dill , Kuok Ho , Jui-Lung Li , Scott MacDonald , James Nix , Ching Tsang
发明人： Marie-Claire Cyrille , Frederick Dill , Kuok Ho , Jui-Lung Li , Scott MacDonald , James Nix , Ching Tsang
IPC分类号： G11B5/33 , G11B5/127
CPC分类号： G11B5/313 , Y10T29/49048
摘要： A read head has a bottom lead made of material that is relatively polish resistant and a top lead layer that polishes down more easily than the bottom layer. With this structure, when the layers are deposited and then polished down, the top layer recesses away from the sensor (and bottom lead layer) in a controlled fashion, providing an acceptable lead structure that reduces the mismatch between the read head physical read width and magnetic read width.
摘要翻译：读头具有由相对耐光的材料制成的底部引线和比底层更容易抛光的顶部引线层。利用这种结构，当层沉积然后被抛光时，顶层以受控的方式远离传感器（和底部引线层），提供可接受的引线结构，其减小了读取头物理读取宽度和磁读宽度。

5. 发明申请

US20050024782A1 Magnetic read head with dual layer lead 失效
公开(公告)号：US20050024782A1
公开(公告)日：2005-02-03
申请号：US10629513
申请日：2003-07-29
申请人： Marie-Claire Cyrille , Frederick Dill , Kuok Ho , Jui-Lung Li , Scott MacDonald , James Nix , Ching Tsang
发明人： Marie-Claire Cyrille , Frederick Dill , Kuok Ho , Jui-Lung Li , Scott MacDonald , James Nix , Ching Tsang
IPC分类号： G11B5/31 , G11B5/39
CPC分类号： G11B5/313 , Y10T29/49048
摘要： A read head has a bottom lead made of material that is relatively polish resistant and a top lead layer that polishes down more easily than the bottom layer. With this structure, when the layers are deposited and then polished down, the top layer recesses away from the sensor (and bottom lead layer) in a controlled fashion, providing an acceptable lead structure that reduces the mismatch between the read head physical read width and magnetic read width.

6. 发明申请

US20060023377A1 Method for fabricating a CPP magnetic transducer using CMP-assisted lift-off and a CMP-resistant metal layer 失效
标题翻译：使用CMP辅助剥离和耐CMP的金属层制造CPP磁换能器的方法
公开(公告)号：US20060023377A1
公开(公告)日：2006-02-02
申请号：US10909121
申请日：2004-07-30
申请人： Marie-Claire Cyrille , Frederick Dill , Jui-Lung Li
发明人： Marie-Claire Cyrille , Frederick Dill , Jui-Lung Li
IPC分类号： G11B5/127 , G11B5/33
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3163 , G11B5/3903 , G11B5/3909 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method is described which uses a CMP resistant metal layer to replace the upper dielectric layer in the track width definition phase of a TMR or CPP spin valve magnetic head. The metal which is selected to be resistant to the CMP process can be rhodium (Rh), platinum (Pt), chromium (Cr), vanadium (V), etc. The additional CMP resistance of the refill layer structure provides a much larger processing window which results in higher yields. A CPP head according to the invention has a metal layer according to the invention above the hard bias structures on the sides of the sensor which define the track width.
摘要翻译：描述了一种使用CMP抗蚀金属层代替TMR或CPP自旋阀磁头的磁道宽度清晰度相位中的上介质层的方法。选择耐CMP工艺的金属可以是铑（Rh），铂（Pt），铬（Cr），钒（V）等。补充层结构的附加CMP电阻提供了更大的加工这导致更高的产量。根据本发明的CPP头在传感器侧面上的硬偏压结构上方具有根据本发明的金属层，其限定轨道宽度。

7. 发明申请

US20050041341A1 CMP assisted liftoff micropatterning 失效
公开(公告)号：US20050041341A1
公开(公告)日：2005-02-24
申请号：US10949433
申请日：2004-09-24
申请人： Marie-Claire Cyrille , Frederick Dill , Cherngye Hwang , Jui-Lung Li
发明人： Marie-Claire Cyrille , Frederick Dill , Cherngye Hwang , Jui-Lung Li
IPC分类号： G11B5/39 , G11B5/31 , H01L21/304 , H01L43/08 , G11B5/33 , G11B5/127 , H01L21/302 , H01L21/461
CPC分类号： G11B5/313
摘要： A method and structure for a microelectronic device comprises a first film over a substrate, a first polish resistant layer over the first film, a second film over the first polish resistant layer, a second polish resistant layer over the second film, wherein the first and second polish resistant layers comprise diamond-like carbon. The first film comprises an electrically resistive material, while the second film comprises low resistance conductive material. The first film is an electrical resistor embodied as a magnetic read sensor. The electrically resistive material is sensitive to magnetic fields. The device further comprises a generally vertical junction between the first and second films and a dielectric film abutted to the electrically resistive material.

8. 发明申请

US20050241138A1 Method of making a read sensor while protecting it from electrostatic discharge (ESD) damage 失效
标题翻译：制造读取传感器同时防止静电放电（ESD）损坏的方法
公开(公告)号：US20050241138A1
公开(公告)日：2005-11-03
申请号：US10835807
申请日：2004-04-30
申请人： Frederick Dill , Meng Ding , Kuok Ho , Jordan Katine , Scott MacDonald , Huey-Ming Tzeng
发明人： Frederick Dill , Meng Ding , Kuok Ho , Jordan Katine , Scott MacDonald , Huey-Ming Tzeng
IPC分类号： G11B5/187 , G11B5/31 , G11B5/39 , G11B5/40
CPC分类号： G11B5/3906 , G11B5/3163 , G11B5/40 , Y10T29/49021 , Y10T29/49043 , Y10T29/49048
摘要： A method of making a read sensor while protecting it from electrostatic discharge (ESD) damage involves forming a severable shunt during the formation of the read sensor. The method may include forming a resist layer over a plurality of read sensor layers; performing lithography with use of a mask to form the resist layer into a patterned resist which exposes left and right side regions over the read sensor layers as well as a shunt region; etching, with the patterned resist in place, to remove materials in the left and right side regions and in the shunt region; and depositing, with the patterned resist in place, left and right hard bias and lead layers in the left and right side regions, respectively, and in the shunt region for forming a severable shunt which electrically couples the left and right hard bias and lead layers together for ESD protection.
摘要翻译：制造读取传感器同时防止静电放电（ESD）损坏的方法包括在形成读取的传感器期间形成可分离的分流。该方法可以包括在多个读取传感器层上形成抗蚀剂层; 使用掩模执行光刻以将抗蚀剂层形成图案化的抗蚀剂，其在读取的传感器层以及分流区域上暴露左侧区域和右侧区域; 蚀刻，图案化抗蚀剂就位，以去除左右侧区域和分流区域中的材料; 并且分别在左侧区域和右侧区域以及分流区域中分别将图案化的抗蚀剂沉积在左侧和右侧的硬偏压和引线层，以形成可分离的分流器，其将左右硬偏压和引线层电耦合一起为ESD保护。

9. 发明申请

US20060025057A1 Method for fabricating a magnetic transducer using a slurry with spherical particles for CMP-assisted photoresist lift-off 失效
公开(公告)号：US20060025057A1
公开(公告)日：2006-02-02
申请号：US11222611
申请日：2005-09-09
申请人： Marie-Claire Cyrille , Frederick Dill , Jui-Lung Li
发明人： Marie-Claire Cyrille , Frederick Dill , Jui-Lung Li
IPC分类号： B24B1/00
CPC分类号： B82Y25/00 , B82Y40/00 , H01F41/308 , Y10T29/49032
摘要： A method is described which uses a CMP slurry with an abrasive of spherical particles to lift-off photoresist used in the patterning of the sensor for a magnetic transducer. The spherical particles, preferably less than 0.015 microns, are preferably silica, alumina, titania or zirconia with colloidal silica being preferred. An alternative method of fabricating a CPP sensor structure according to the invention deposits a dielectric or CMP resistant metal over the hard bias structure. The CMP-resistant metal is preferably selected from the group consisting of rhodium, chromium, vanadium and platinum. A CMP resistant mask deposited over the dielectric or CMP-resistant metal can include an optional adhesion layer such as tantalum followed by a DLC layer. The CMP-assisted lift-off of the photoresist and the excess materials is executed at this point. The photoresist used to protect the selected area of the sensor structure is lifted-off using the slurry.

10. 发明申请

US20060025053A1 Method for fabricating a magnetic transducer using a slurry with spherical particles for CMP-assisted photoresist lift-off 审中-公开
标题翻译：使用具有用于CMP辅助光致抗蚀剂剥离的球形颗粒的浆料制造磁换能器的方法
公开(公告)号：US20060025053A1
公开(公告)日：2006-02-02
申请号：US10909127
申请日：2004-07-30
申请人： Marie-Claire Cyrille , Frederick Dill , Jui-Lung Li
发明人： Marie-Claire Cyrille , Frederick Dill , Jui-Lung Li
IPC分类号： B24B1/00
CPC分类号： B82Y25/00 , B82Y40/00 , H01F41/308 , Y10T29/49032
摘要： A method is described which uses a CMP slurry with an abrasive of spherical particles to lift-off photoresist used in the patterning of the sensor for a magnetic transducer. The spherical particles are preferably silica, alumina, titania or zirconia with colloidal silica being preferred. The size of the particle is preferably less than 0.015 microns. The pH is preferably alkaline and even more preferably with a pH of about 10-11. In a method according to the invention a CPP sensor structure width or height is defined according to the prior art by removing excess sensor material at opposite sides of the sensor structure to form voids to define the track width or stripe height. The photoresist used to protect the selected area of the sensor structure is lifted-off using the slurry.
摘要翻译：描述了一种方法，其使用具有球形颗粒磨料的CMP浆料来剥离用于磁传感器的传感器的图案化中使用的光致抗蚀剂。球形颗粒优选为二氧化硅，氧化铝，二氧化钛或具有胶体二氧化硅的氧化锆。颗粒的尺寸优选小于0.015微米。 pH优选为碱性，甚至更优选pH为约10-11。在根据本发明的方法中，根据现有技术通过在传感器结构的相对侧移除多余的传感器材料来形成CPP传感器结构的宽度或高度，以形成空隙以限定轨迹宽度或条纹高度。用于保护传感器结构的选定区域的光致抗蚀剂使用浆料被剥离。

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