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1. 发明授权

US07485189B2 Thin film deposition device using an FTIR gas analyzer for mixed gas supply 失效
标题翻译：使用FTIR气体分析仪进行混合气体供应的薄膜沉积装置
公开(公告)号：US07485189B2
公开(公告)日：2009-02-03
申请号：US09793209
申请日：2001-02-26
申请人： Tsukasa Satake , Koji Tominaga , Hiroshi Funakubo
发明人： Tsukasa Satake , Koji Tominaga , Hiroshi Funakubo
IPC分类号： C23C16/455 , C23C16/52 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/40
CPC分类号： C23C16/45512 , C23C16/45561 , C23C16/52 , C30B25/165
摘要： This invention provides a thin film deposition process making it possible to form a thin film having a desired composition with good reproducibility and high efficiency; a thin film deposition device therefore; a FTIR gas analyzer used in the thin film deposition process; and a mixed gas supplying device used in the thin film deposition process. The thin film deposition process comprises the steps of mixing a plurality of organic metal gases in a gas mixing chamber and supplying the mixed gas into a reaction chamber to deposit a thin film on a substrate positioned in the reaction chamber, wherein the mixture ratio between/among the organic metal gases supplied into the gas mixing chamber is measured with a FTIR gas analyzer fitted to either the gas mixing chamber or the reaction chamber and then on the basis of results of the measurement, the flow rates of the organic metal gases are individually adjusted.
摘要翻译：本发明提供一种薄膜沉积方法，使得可以形成具有良好重现性和高效率的所需组成的薄膜; 因此，薄膜沉积装置; 用于薄膜沉积工艺的FTIR气体分析仪; 以及在薄膜沉积工艺中使用的混合气体供给装置。薄膜沉积工艺包括将气体混合室中的多个有机金属气体混合并将混合气体供应到反应室中以在位于反应室中的基底上沉积薄膜的步骤，其中/ 供给到气体混合室中的有机金属气体中的FTIR气体分析仪是测量气体混合室或反应室，然后基于测量结果，有机金属气体的流量分别调整。

2. 发明授权

US5870193A Apparatus for determining kinds of adsorbates 失效
标题翻译：用于确定吸附物种类的装置
公开(公告)号：US5870193A
公开(公告)日：1999-02-09
申请号：US944863
申请日：1997-10-06
申请人： Atsuhiro Sumiya , Itsuhei Ogata , Tsukasa Satake , Juichiro Ukon
发明人： Atsuhiro Sumiya , Itsuhei Ogata , Tsukasa Satake , Juichiro Ukon
IPC分类号： G01N21/27 , G01B9/02
CPC分类号： G01N21/274
摘要： An infrared spectrometer disperses a radiation ray from a catalyst which has been exposed to a gas for evaluation to adsorb adsorbates thereon, and outputs spectral data in accordance with a wavenumber of the radiation ray to a computer storing reference data. The computer normalizes the spectral data and the reference data, and then, it calculates a product of the normalized spectral data and the reference data. Thereafter, a function of the product is differentiated with respect to the wavenumber to obtain a differential function. Accordingly, a specified wavenumber for which the differential function is zero is determined, so that the common peak of the spectral data and the reference data at the specified wavenumber is accurately determined.
摘要翻译：红外光谱仪将已经暴露于用于评价的气体的催化剂的辐射线分散在其上吸附被吸附物，并且将根据辐射线的波数的光谱数据输出到存储参考数据的计算机。计算机对光谱数据和参考数据进行归一化，然后计算归一化光谱数据和参考数据的乘积。此后，产品的函数相对于波数是不同的，以获得差分函数。因此，确定差分函数为零的指定波数，从而准确地确定在指定波数处的频谱数据和参考数据的共同峰值。

3. 发明授权

US5911953A Apparatus for detecting and analyzing adsorbates 失效
标题翻译：用于检测和分析吸附物的装置
公开(公告)号：US5911953A
公开(公告)日：1999-06-15
申请号：US865484
申请日：1997-06-02
申请人： Itsuhei Ogata , Atsuhiro Sumiya , Tsukasa Satake
发明人： Itsuhei Ogata , Atsuhiro Sumiya , Tsukasa Satake
IPC分类号： G01N31/00 , G01N21/00 , G01N21/35 , G01N21/62 , G01N21/71 , G01N21/75 , G01N31/10
CPC分类号： G01N21/3563 , Y10T436/205831 , Y10T436/208339 , Y10T436/25875
摘要： A solid object carrying a catalyzer thereon is placed in a closed reaction chamber into which test gases are supplied and is heated up to a temperature of 1000.degree. C. Adsorbates are formed on the surface of the solid object under the test gas flow in the closed reaction chamber. Infrared radiations radiated from the adsorbates are emitted through an infrared-transmissive window hermetically formed on a wall of the closed reaction chamber, and are analyzed by an infrared radiation spectrometer and observed by a microscope. The infrared-transmissive window is cooled down by a cooling device attached thereto so that the temperature of the window does not exceed a certain level, e.g., 200.degree. C. Thus, the adsorbates formed on the solid object can be detected and analyzed under conditions where the test gas is actually flowing and the temperature of the solid object is elevated up to a high level. Since the infrared-transmissive window is cooled down and prevented from being broken by heat, the detection and analysis of the adsorbates are performed safely.
摘要翻译：在其上携带催化剂的固体物体放置在封闭的反应室中，向其中供应测试气体并加热至1000℃的温度。在封闭的试验气体流下的固体物体的表面上形成吸附物反应室。从被吸附物辐射的红外辐射通过气密地形成在封闭反应室的壁上的红外透射窗口发射，并通过红外辐射光谱仪分析并通过显微镜观察。红外线透过窗被连接在其上的冷却装置冷却，使得窗口的温度不超过一定水平，例如200℃。因此，可以在条件下检测和分析形成在固体物体上的吸附物质其中测试气体实际上流动并且固体物体的温度升高到高水平。由于红外线透过窗被冷却并防止被热分解，所以能够安全地进行被检测物的分析。

4. 发明授权

US4667105A Infrared radiation gas analyzer with PTC resistance heater 失效
标题翻译：带PTC电阻加热器的红外辐射气体分析仪
公开(公告)号：US4667105A
公开(公告)日：1987-05-19
申请号：US740055
申请日：1985-05-30
申请人： Kimio Miyatake , Tsukasa Satake
发明人： Kimio Miyatake , Tsukasa Satake
IPC分类号： G01N21/71 , G01N21/03
CPC分类号： G01N21/0332 , G01N21/3504
摘要： A sample gas is introduced into a sample cell housed in a cell block. A self-operated temperature-controlling type heater is disposed within the hollow place of the cell block and said sample cell is indirectly heated by the heat from said heater.
摘要翻译：将样品气体引入到容纳在电池块中的样品池中。自动温度控制型加热器设置在电池块的中空位置，并且所述样品池被来自所述加热器的热量间接地加热。

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