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    • 2. 发明专利
    • Insulated gate transistor
    • 绝缘栅晶体管
    • JP2012069797A
    • 2012-04-05
    • JP2010214240
    • 2010-09-24
    • Denso CorpToyota Central R&D Labs IncToyota Motor Corpトヨタ自動車株式会社株式会社デンソー株式会社豊田中央研究所
    • SUGIMOTO MASAHIROISHIKAWA TAKESHISOEJIMA SHIGEMASAWATANABE YUKIHIKOSUZUKI MASAHIROMATSUKI HIDEO
    • H01L29/78H01L29/739
    • PROBLEM TO BE SOLVED: To provide an insulated gate transistor, having a trench gate electrode with a high breakdown voltage characteristic, hardly producing a manufacturing error in the breakdown voltage characteristic.SOLUTION: The insulated gate transistor includes: a first region of first conductive type, formed in the range facing the upper surface of a semiconductor layer and connected to a first electrode; a second region of second conductive type, formed on the lower side of the first region; a third region of first conductive type formed on the lower side of the second region; a pair of fourth regions of second conductive type, connected to the first electrode; and a trench gate electrode. Each of the pair of fourth regions is formed on each side of a trench to sandwich the center of the trench. Each of the fourth regions has a vertical region extending to a position deeper than the lower end of an insulating film in the third region, and a horizontal region extending to the center side of the trench from the vertical region in the third region, in the position deeper than the lower end of the insulating film.
    • 解决的问题:为了提供具有高击穿电压特性的沟槽栅电极的绝缘栅晶体管,几乎不产生击穿电压特性的制造误差。 解决方案:绝缘栅晶体管包括:第一导电类型的第一区域,形成在面向半导体层的上表面并连接到第一电极的范围内; 第二导电类型的第二区域,形成在第一区域的下侧; 形成在所述第二区域的下侧的第一导电类型的第三区域; 连接到第一电极的一对第二导电类型的第四区域; 和沟槽栅电极。 一对第四区域中的每一个形成在沟槽的每一侧以夹住沟槽的中心。 每个第四区域具有延伸到比第三区域中的绝缘膜的下端更深的位置的垂直区域,以及从第三区域中的垂直区域延伸到沟槽的中心侧的水平区域,在 位置比绝缘膜的下端深。 版权所有(C)2012,JPO&INPIT
    • 5. 发明专利
    • Semiconductor device and method of manufacturing semiconductor device
    • 半导体器件及制造半导体器件的方法
    • JP2011216783A
    • 2011-10-27
    • JP2010085438
    • 2010-04-01
    • Denso CorpToyota Central R&D Labs IncToyota Motor Corpトヨタ自動車株式会社株式会社デンソー株式会社豊田中央研究所
    • TAKATANI HIDESHIMATSUKI HIDEOSUZUKI MASAHIROISHIKAWA TAKESHI
    • H01L29/78H01L21/336H01L29/12
    • PROBLEM TO BE SOLVED: To provide a semiconductor device having a structure such that a trench gate insulating film is not broken by an applied electric field without increasing the on resistance.SOLUTION: The semiconductor device includes a first semiconductor layer 12a of a first conductivity type formed on a semiconductor substrate 16, a second semiconductor layer 12b of the first conductivity type formed in a partial region on the first semiconductor layer, a third semiconductor layer 13 of a second conductivity type formed on the first semiconductor layer and second semiconductor layer, a trench having a bottom at the second semiconductor layer, a fourth semiconductor layer 17 of a first conductivity type formed on both sides of the trench, a gate insulating film 14 formed in the trench, and a gate electrode 15, wherein the gate insulating film is formed having a thicker film thickness on the bottom of the trench than that on a side face of the trench, and a depth-directional interface between the gate insulating film and gate electrode on the bottom of the trench is formed at a position deeper than a depth-directional interface between the second semiconductor layer and third semiconductor layer.
    • 要解决的问题:提供一种半导体器件,其具有这样的结构,使得沟槽栅极绝缘膜在不增加导通电阻的情况下不受施加的电场的破坏。解决方案:半导体器件包括第一导电类型的第一半导体层12a 形成在半导体基板16上,形成在第一半导体层上的部分区域中的第一导电类型的第二半导体层12b,形成在第一半导体层和第二半导体层上的第二导电类型的第三半导体层13, 在第二半导体层具有底部的沟槽,形成在沟槽的两侧的第一导电类型的第四半导体层17,形成在沟槽中的栅极绝缘膜14和栅极电极15,其中栅极绝缘膜为 在沟槽的底部形成的厚度比沟槽的侧面上的膜厚更深,并具有深度方向的相互之间 沟槽底部的栅极绝缘膜与栅电极之间的面形成在比第二半导体层与第三半导体层之间的深度方向界面更深的位置。