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    • 9. 发明授权
    • Method of cleaning glass substrate for magnetic disk or semiconductor
substrate
    • 清洁磁盘或半导体衬底的玻璃衬底的方法
    • US6048466A
    • 2000-04-11
    • US44228
    • 1998-03-19
    • Toshinori MorizaneMasao KawaguchiTadao Tokushima
    • Toshinori MorizaneMasao KawaguchiTadao Tokushima
    • G11B5/84B08B6/00B01D17/06B44C1/22C25B9/00C25F1/00
    • G11B5/8404
    • To propose a method of cleaning a surface of a glass substrate fabricated by a process of strengthening a surface thereof by alkaline ion exchange reaction by selectively removing alkaline metal on the surface by cleaning the surface by using an activated ionic water produced by electric polarization and as a result, to provide a glass substrate for a magnetic disk having a magnetic medium with insignificant corrosion and excellent S/N ratio, in cleaning a glass substrate for a magnetic disk using a glass substrate pulled up from a chemically strengthening treatment solution produced by an alkaline ion exchange reaction, after a final polishing step of fabricating the glass substrate for a magnetic disk, the glass substrate is cleaned by an activated anodically electrolyzed water produced by electric polarization to thereby selectively remove the alkaline metal at the vicinity of the surface.
    • 提出一种通过碱性离子交换反应来强化其表面的方法来清洗玻璃基板的表面的方法,通过使用由电极化产生的活化离子水清洗表面,并且通过选择性地除去表面上的碱金属 结果是,提供一种具有磁性介质的玻璃基板,该磁盘具有不可忽视的腐蚀和优异的S / N比,在使用从由化学强化处理液生产的化学强化处理溶液提拉的玻璃基板上清洁用于磁盘的玻璃基板 碱性离子交换反应,在制造用于磁盘的玻璃基板的最终研磨步骤之后,通过由电极化产生的活性阳极电解水来清洗玻璃基板,从而选择性地除去表面附近的碱金属。