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1. 发明申请

US20060048572A1 Physical quantity sensor and method for manufacturing the same 有权
标题翻译：物理量传感器及其制造方法
公开(公告)号：US20060048572A1
公开(公告)日：2006-03-09
申请号：US11220543
申请日：2005-09-08
申请人： Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
发明人： Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
IPC分类号： G01N27/22 , H01L21/4763
CPC分类号： G01N27/223 , Y10T29/49007
摘要： A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.
摘要翻译：电容式湿度传感器包括：检测基板，其包括在检测基板的第一侧上的检测部分; 以及包括电路部分的电路板。检测部根据检测部的电容变化来检测湿度。电路部分将电容变化作为电信号进行处理。检测基板还包括在检测基板的第二侧上的传感器焊盘。传感器垫通过检测基板的通孔中的导体与检测部电连接。

2. 发明授权

US07181966B2 Physical quantity sensor and method for manufacturing the same 有权
标题翻译：物理量传感器及其制造方法
公开(公告)号：US07181966B2
公开(公告)日：2007-02-27
申请号：US11220543
申请日：2005-09-08
申请人： Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
发明人： Toshiki Isogai , Masato Ishihara , Michitaka Hayashi , Toshikazu Itakura
IPC分类号： G01N19/10 , G01N27/22 , G11C8/10
CPC分类号： G01N27/223 , Y10T29/49007
摘要： A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.
摘要翻译：电容式湿度传感器包括：检测基板，其包括在检测基板的第一侧上的检测部分; 以及包括电路部分的电路板。检测部根据检测部的电容变化来检测湿度。电路部分将电容变化作为电信号进行处理。检测基板还包括在检测基板的第二侧上的传感器焊盘。传感器垫通过检测基板的通孔中的导体与检测部电连接。

3. 发明授权

US07267002B2 Capacitance type physical quantity detector 失效
标题翻译：电容式物理量检测器
公开(公告)号：US07267002B2
公开(公告)日：2007-09-11
申请号：US11185751
申请日：2005-07-21
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01R27/26 , G01N19/00
CPC分类号： G01D5/24 , G01D5/2405 , G01N27/223
摘要： A capacitance type physical quantity detector includes a sensor unit of which the capacitance varies depending upon a change in the physical quantity and a C-V converter unit which converts a change in the capacitance of said sensor unit into a voltage. The C-V converter unit includes an operational amplifier, a feedback capacitor, switching means connected in parallel with said feedback capacitor, a reference voltage-generating circuit for applying a reference voltage to the operational amplifier, and a drive voltage-generating circuit for applying a drive voltage to said sensor unit. At least any one of the feedback capacitance of said feedback capacitor, the reference voltage formed by said reference voltage-generating circuit or the drive voltage formed by said drive voltage-generating circuit varies depending upon the temperature to correct temperature characteristics of the sensor unit.
摘要翻译：电容型物理量检测器包括其电容根据物理量的变化而变化的传感器单元和将所述传感器单元的电容变化转换为电压的C-V转换器单元。 CV转换器单元包括运算放大器，反馈电容器，与所述反馈电容并联连接的开关装置，用于向运算放大器施加参考电压的基准电压产生电路，以及用于施加驱动的驱动电压产生电路电压到所述传感器单元。所述反馈电容器的反馈电容，所述参考电压产生电路形成的参考电压或由所述驱动电压产生电路形成的驱动电压中的至少一个根据温度而变化，以校正传感器单元的温度特性。

4. 发明申请

US20070169535A1 Inspection device for humidity sensor and method for adjusting sensor characteristics of humidity sensor 失效
标题翻译：湿度传感器检测装置及湿度传感器传感器特性调整方法
公开(公告)号：US20070169535A1
公开(公告)日：2007-07-26
申请号：US11727994
申请日：2007-03-29
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01N27/22 , G01R31/27 , G01R31/28
CPC分类号： G01N27/223
摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.
摘要翻译：检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探针的测试器，用于检查湿度传感器的电特性; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

5. 发明申请

US20060201232A1 Inspection device for humidity sensor and method for adjusting sensor characteristics of humidity sensor 失效
标题翻译：湿度传感器检测装置及湿度传感器传感器特性调整方法
公开(公告)号：US20060201232A1
公开(公告)日：2006-09-14
申请号：US11362822
申请日：2006-02-28
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01N35/00
CPC分类号： G01N27/223
摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.
摘要翻译：检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探针的测试器，用于检查湿度传感器的电特性; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

6. 发明申请

US20060096371A1 Capacitive humidity sensor and method of manufacturing the same 有权
标题翻译：电容式湿度传感器及其制造方法
公开(公告)号：US20060096371A1
公开(公告)日：2006-05-11
申请号：US11265280
申请日：2005-11-03
申请人： Toshiki Isogai , Toshikazu Itakura
发明人： Toshiki Isogai , Toshikazu Itakura
IPC分类号： G01N27/22 , G01R3/00
CPC分类号： G01N27/223 , Y10T29/49007
摘要： A capacitive humidity sensor includes a semiconductor substrate, a protective layer and a humidity sensitive section including a pair of comb electrodes and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The comb electrodes are disposed on one surface of the semiconductor substrate through the protective layer to face each other with a predetermined gap. An interface between the protective layer and the humidity sensitive layer is planarized so that the sensor prevents a hysteresis in a variation of capacitance. For example, a surface of the protective layer can be made flat by polishing.
摘要翻译：电容式湿度传感器包括半导体衬底，保护层和湿度敏感部分，其包括一对梳状电极和根据湿度而变化的介电常数的湿度敏感层。梳状电极通过保护层设置在半导体衬底的一个表面上，以预定间隙彼此面对。保护层和湿度敏感层之间的界面被平坦化，使得传感器防止电容变化中的滞后。例如，可以通过抛光使保护层的表面平坦化。

7. 发明申请

US20080257037A1 Humidity sensor 有权
标题翻译：湿度传感器
公开(公告)号：US20080257037A1
公开(公告)日：2008-10-23
申请号：US12081513
申请日：2008-04-17
申请人： Toshiki Isogai , Toshikazu Itakura
发明人： Toshiki Isogai , Toshikazu Itakura
IPC分类号： G01N27/22
CPC分类号： G01N27/225
摘要： A capacitive humidity sensor includes: a humidity sensing element with a humidity sensitive film and electrodes; and a processing circuit. The film has a dielectric constant variable in accordance with moisture. The electrodes detect capacitance of the film and outputs a signal corresponding to the capacitance. The processing circuit processes the signal. The film is made of inorganic material having fine pores for adsorbing the moisture. A diameter of the fine pores is set to be a predetermined diameter so that capillary tube aggregation phenomenon occurs at a predetermined relative humidity. The capacitance of the film has a change rate with respect to the relative humidity. The change rate in case of the relative humidity higher than the predetermined relative humidity is larger than that in case of the relative humidity lower than the predetermined relative humidity.
摘要翻译：电容式湿度传感器包括：具有湿敏膜和电极的湿度感测元件; 和处理电路。该膜具有根据水分变化的介电常数。电极检测胶片的电容并输出对应于电容的信号。处理电路处理该信号。该膜由具有用于吸附水分的细孔的无机材料制成。细孔的直径设定为规定的直径，使得在规定的相对湿度下发生毛细管聚集现象。膜的电容相对于相对湿度具有变化率。在相对湿度高于预定相对湿度的情况下的变化率大于相对湿度低于预定相对湿度的情况。

8. 发明授权

US07213441B2 Method for adjusting sensor characteristics of humidity sensor 失效
标题翻译：调整湿度传感器传感器特性的方法
公开(公告)号：US07213441B2
公开(公告)日：2007-05-08
申请号：US11362822
申请日：2006-02-28
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01N21/00
CPC分类号： G01N27/223
摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.
摘要翻译：检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探针的测试器，用于检查湿度传感器的电特性; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

9. 发明申请

US20050285221A1 Variable capacitance device with high accuracy 有权
标题翻译：可变电容器件具有高精度
公开(公告)号：US20050285221A1
公开(公告)日：2005-12-29
申请号：US11151440
申请日：2005-06-14
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： B60R21/00 , B60W10/06 , B60W10/20 , B60W30/06 , B62D6/00 , B62D15/02 , G01S15/93 , G05D1/02 , H01G7/00 , H01G17/00 , H01L27/06 , H01L27/08 , H01L29/00 , H01L29/92 , H01L29/93 , H01L29/94
CPC分类号： H01L27/0805 , B60T2201/10 , B60W10/06 , B60W10/20 , H01L27/0629 , H01L29/93 , H01L29/94
摘要： A capacitance device includes a dielectric film, the first electrode and the second electrode. One of the two electrodes is divided into a plurality of electrode portions. Each of the divided electrode portions is connected with each other through switching transistors so that appropriate portions contributing to the capacitance can be selected. The device can vary its capacitance with high accuracy.
摘要翻译：电容器件包括电介质膜，第一电极和第二电极。两个电极中的一个被分成多个电极部分。每个分割的电极部分通过开关晶体管彼此连接，从而可以选择有助于电容的适当部分。该器件可以高精度地改变其电容。

10. 发明授权

US07673493B2 Inspection device for humidity sensor and method for adjusting sensor characteristics of humidity sensor 失效
标题翻译：湿度传感器检测装置及湿度传感器传感器特性调整方法
公开(公告)号：US07673493B2
公开(公告)日：2010-03-09
申请号：US11727994
申请日：2007-03-29
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01N21/00
CPC分类号： G01N27/223
摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.
摘要翻译：检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探头的用于检查湿度传感器的电特性的测试器; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

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