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1. 发明申请

US20110283793A1 ANGULAR VELOCITY SENSOR 有权
标题翻译：角速度传感器
公开(公告)号：US20110283793A1
公开(公告)日：2011-11-24
申请号：US13113234
申请日：2011-05-23
申请人： Toshikazu ITAKURA
发明人： Toshikazu ITAKURA
IPC分类号： G01C19/56
CPC分类号： G01C19/5776
摘要： An angular velocity sensor includes a sensor unit, a detection unit and a connecting part electrically connecting the sensor unit and the detection unit. The detection unit drives the sensor unit and detects an angular velocity acting on the sensor unit. The detection unit supplies a carrier signal to a movable electrode of a capacitor of the sensor unit and supplies a driving signal to a fixed electrode of the capacitor via the connecting part for performing a servo control. A C/V converter circuit of the detection unit receives capacitance generated at the capacitor through a driving signal transmission line of the connecting part in a state where supply of the driving signal is stopped, and converts the capacitance into a voltage. A determination part of the detection unit determines whether the driving signal transmission line has disconnection or not based on the voltage outputted from the C/V converter circuit.
摘要翻译：角速度传感器包括传感器单元，检测单元和电连接传感器单元和检测单元的连接部。检测单元驱动传感器单元并检测作用在传感器单元上的角速度。检测单元将载波信号提供给传感器单元的电容器的可动电极，并通过用于执行伺服控制的连接部分将驱动信号提供给电容器的固定电极。检测单元的C / V转换电路在驱动信号的供给停止的状态下，通过连接部的驱动信号传输线接收在电容器产生的电容，并将该电容转换成电压。检测单元的确定部分基于从C / V转换器电路输出的电压来确定驱动信号传输线是否具有断开。

2. 发明授权

US07673493B2 Inspection device for humidity sensor and method for adjusting sensor characteristics of humidity sensor 失效
标题翻译：湿度传感器检测装置及湿度传感器传感器特性调整方法
公开(公告)号：US07673493B2
公开(公告)日：2010-03-09
申请号：US11727994
申请日：2007-03-29
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01N21/00
CPC分类号： G01N27/223
摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.
摘要翻译：检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探头的用于检查湿度传感器的电特性的测试器; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

3. 发明授权

US07481107B2 Humidity sensor with setting member for setting maximum amount of moisture in humidity sensitive member 有权
标题翻译：湿度传感器，带有设定部件，用于设置湿度敏感部件的最大湿度
公开(公告)号：US07481107B2
公开(公告)日：2009-01-27
申请号：US11633450
申请日：2006-12-05
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： H02H3/00
CPC分类号： G01N27/223
摘要： A humidity sensor includes: a substrate; a pair of electrodes on the substrate; a humidity sensitive member between the electrodes having a capacitance changeable in accordance with humidity; an output element connecting to the electrodes in order to detect a capacitance of the humidity sensitive member and outputting a signal corresponding to the capacitance; and a setting member for setting a maximum amount of moisture in the humidity sensitive member to be a standard maximum amount of moisture. The humidity sensitive member is capable of absorbing a moisture up to the maximum amount of moisture. The setting member includes at least one of an element for reducing the maximum amount of moisture and an element for increasing the maximum amount of moisture.
摘要翻译：湿度传感器包括：基板; 基板上的一对电极; 所述电极之间的湿度敏感部件具有可根据湿度而变化的电容; 连接到电极的输出元件，以便检测湿度敏感元件的电容并输出对应于电容的信号; 以及将湿度敏感部件中的最大湿度设定为标准最大湿度的设定部件。湿度敏感部件能够吸收水分达到最大量的水分。设置构件包括用于减少最大量的水分的元素和用于增加最大量的水分的元素中的至少一个。

4. 发明授权

US07430904B2 Capacitive humidity sensor and method of manufacturing the same 有权
标题翻译：电容式湿度传感器及其制造方法
公开(公告)号：US07430904B2
公开(公告)日：2008-10-07
申请号：US11265280
申请日：2005-11-03
申请人： Toshiki Isogai , Toshikazu Itakura
发明人： Toshiki Isogai , Toshikazu Itakura
IPC分类号： G01N27/22
CPC分类号： G01N27/223 , Y10T29/49007
摘要： A capacitive humidity sensor includes a semiconductor substrate, a protective layer and a humidity sensitive section including a pair of comb electrodes and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The comb electrodes are disposed on one surface of the semiconductor substrate through the protective layer to face each other with a predetermined gap. An interface between the protective layer and the humidity sensitive layer is planarized so that the sensor prevents a hysteresis in a variation of capacitance. For example, a surface of the protective layer can be made flat by polishing.
摘要翻译：电容式湿度传感器包括半导体衬底，保护层和湿度敏感部分，其包括一对梳状电极和根据湿度而变化的介电常数的湿度敏感层。梳状电极通过保护层设置在半导体衬底的一个表面上，以预定间隙彼此面对。保护层和湿度敏感层之间的界面被平坦化，使得传感器防止电容变化中的滞后。例如，可以通过抛光使保护层的表面平坦化。

5. 发明授权

US07279728B2 Variable capacitance device with high accuracy 有权
标题翻译：可变电容器件具有高精度
公开(公告)号：US07279728B2
公开(公告)日：2007-10-09
申请号：US11151440
申请日：2005-06-14
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： H01L21/8242
CPC分类号： H01L27/0805 , B60T2201/10 , B60W10/06 , B60W10/20 , H01L27/0629 , H01L29/93 , H01L29/94
摘要： A capacitance device includes a dielectric film, the first electrode and the second electrode. One of the two electrodes is divided into a plurality of electrode portions. Each of the divided electrode portions is connected with each other through switching transistors so that appropriate portions contributing to the capacitance can be selected. The device can vary its capacitance with high accuracy.
摘要翻译：电容器件包括电介质膜，第一电极和第二电极。两个电极中的一个被分成多个电极部分。每个分割的电极部分通过开关晶体管彼此连接，从而可以选择有助于电容的适当部分。该器件可以高精度地改变其电容。

6. 发明申请

US20070131020A1 Humidity sensor with setting member for setting maximum amount of moisture in humidity sensitive member 有权
标题翻译：湿度传感器，带有设定部件，用于设置湿度敏感部件的最大湿度
公开(公告)号：US20070131020A1
公开(公告)日：2007-06-14
申请号：US11633450
申请日：2006-12-05
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01N19/10 , G01N27/12 , G01N19/00
CPC分类号： G01N27/223
摘要： A humidity sensor includes: a substrate; a pair of electrodes on the substrate; a humidity sensitive member between the electrodes having a capacitance changeable in accordance with humidity; an output element connecting to the electrodes in order to detect a capacitance of the humidity sensitive member and outputting a signal corresponding to the capacitance; and a setting member for setting a maximum amount of moisture in the humidity sensitive member to be a standard maximum amount of moisture. The humidity sensitive member is capable of absorbing a moisture up to the maximum amount of moisture. The setting member includes at least one of an element for reducing the maximum amount of moisture and an element for increasing the maximum amount of moisture.
摘要翻译：湿度传感器包括：基板; 基板上的一对电极; 所述电极之间的湿度敏感部件具有可根据湿度而变化的电容; 连接到电极的输出元件，以便检测湿度敏感元件的电容并输出对应于电容的信号; 以及将湿度敏感部件中的最大湿度设定为标准最大湿度的设定部件。湿度敏感部件能够吸收水分达到最大量的水分。设置构件包括用于减少最大量的水分的元素和用于增加最大量的水分的元素中的至少一个。

7. 发明授权

US07176700B2 Moisture sensor device and self-diagnosing method therefor 有权
标题翻译：水分传感器装置及其自诊断方法
公开(公告)号：US07176700B2
公开(公告)日：2007-02-13
申请号：US11353065
申请日：2006-02-14
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01R27/26 , G01N27/22
CPC分类号： G01N27/223
摘要： A moisture sensor device includes a sensor portion having a capacitance that is varied in accordance with surrounding humidity, a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity, a heating portion for heating the sensor portion, and a controller for controlling heating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period.
摘要翻译：一种湿度传感器装置包括具有根据周围湿度变化的电容的传感器部分，用于处理传感器部分的检测信号并输出对应于湿度的信号的信号处理器，用于加热传感器部分的加热部分，以及控制器，用于控制加热部分的加热，使得传感器部分的电容至少在自诊断周期期间基本上等于预定湿度下的值。

8. 发明授权

US07129798B2 Oscillator circuit having stable frequency 有权
标题翻译：振荡电路频率稳定
公开(公告)号：US07129798B2
公开(公告)日：2006-10-31
申请号：US10678132
申请日：2003-10-06
申请人： Seiki Aoyama , Toshikazu Itakura
发明人： Seiki Aoyama , Toshikazu Itakura
IPC分类号： H03B5/20
CPC分类号： H03K3/0315 , H03K3/011 , H03K3/0231 , H03L1/02
摘要： An oscillator includes first, second and third inverters (1, 2, 3) connected in series. A feedback path is connected from the output terminal of the third inverter (3) to the input terminal of the first inverter 1 through a resistor (5) while a second feedback path is connected from the output terminal of the second inverter (2) to the input terminal of the first inverter (1) through a capacitor (4). The second feedback path further includes a resistor (6) having a temperature coefficient larger than that of resistor (5) is inserted to adjust the charge/discharge trigger voltage and charge/discharge time of the capacitor (4).
摘要翻译：振荡器包括串联连接的第一，第二和第三反相器（1,2,3）。反馈路径通过电阻器（5）从第三反相器（3）的输出端子连接到第一反相器1的输入端子，而第二反馈路径从第二逆变器（2）的输出端子连接到第一反相器（1）的输入端通过电容器（4）。第二反馈路径还包括具有大于电阻器（5）的温度系数的电阻器（6）的电阻器（6），以调整充电/放电触发电压和电容器（4）的充电/放电时间。

9. 发明申请

US20050099251A1 Circuit for detecting capacitance change in variable capacitance 有权
标题翻译：用于检测可变电容中电容变化的电路
公开(公告)号：US20050099251A1
公开(公告)日：2005-05-12
申请号：US10940014
申请日：2004-09-14
申请人： Toshikazu Itakura , Hisanori Yokura
发明人： Toshikazu Itakura , Hisanori Yokura
IPC分类号： G01L9/00 , G01P15/125 , G01R27/26 , H01H75/00
CPC分类号： G01R27/2605 , G01P15/125
摘要： A capacitance of a capacitor member, which varies according to a dynamic force such as an acceleration force imposed on the capacitor member, is detected by a detecting circuit. The detecting circuit is composed of an operational amplifier and a switched capacitor circuit connected in parallel to each other. A reset time (t), during which a feedback capacitor in the switched capacitor circuit is discharged, is set to satisfy the following formula: t>(ΔC+m)/n, where ΔC is an initial capacitance of the capacitor member, and n and m are constant factors having values in certain ranges. By setting the reset time (t) according to the above formula, an amount of acceleration imposed on the capacitor member is accurately detected even when the capacitor member has a certain level of the initial capacitance.
摘要翻译：通过检测电路检测电容器部件的电容，其根据施加在电容器部件上的加速力等动力而变化。检测电路由并联连接的运算放大器和开关电容电路构成。将开关电容电路中的反馈电容器放电的复位时间（t）设定为满足以下公式：t>（DeltaC + m）/ n，其中DeltaC是电容器部件的初始电容， n和m是在一定范围内具有值的常数因子。通过根据上述公式设定复位时间（t），即使电容器部件具有初始电容的一定水平，也能够精确地检测施加在电容器部件上的加速度。

10. 发明授权

US07267002B2 Capacitance type physical quantity detector 失效
标题翻译：电容式物理量检测器
公开(公告)号：US07267002B2
公开(公告)日：2007-09-11
申请号：US11185751
申请日：2005-07-21
申请人： Toshikazu Itakura , Toshiki Isogai
发明人： Toshikazu Itakura , Toshiki Isogai
IPC分类号： G01R27/26 , G01N19/00
CPC分类号： G01D5/24 , G01D5/2405 , G01N27/223
摘要： A capacitance type physical quantity detector includes a sensor unit of which the capacitance varies depending upon a change in the physical quantity and a C-V converter unit which converts a change in the capacitance of said sensor unit into a voltage. The C-V converter unit includes an operational amplifier, a feedback capacitor, switching means connected in parallel with said feedback capacitor, a reference voltage-generating circuit for applying a reference voltage to the operational amplifier, and a drive voltage-generating circuit for applying a drive voltage to said sensor unit. At least any one of the feedback capacitance of said feedback capacitor, the reference voltage formed by said reference voltage-generating circuit or the drive voltage formed by said drive voltage-generating circuit varies depending upon the temperature to correct temperature characteristics of the sensor unit.
摘要翻译：电容型物理量检测器包括其电容根据物理量的变化而变化的传感器单元和将所述传感器单元的电容变化转换为电压的C-V转换器单元。 CV转换器单元包括运算放大器，反馈电容器，与所述反馈电容并联连接的开关装置，用于向运算放大器施加参考电压的基准电压产生电路，以及用于施加驱动的驱动电压产生电路电压到所述传感器单元。所述反馈电容器的反馈电容，所述参考电压产生电路形成的参考电压或由所述驱动电压产生电路形成的驱动电压中的至少一个根据温度而变化，以校正传感器单元的温度特性。

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