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    • 4. 发明申请
    • SURFACE DEFECT INSPECTION METHOD AND APPARATUS
    • 表面缺陷检查方法和装置
    • US20110075148A1
    • 2011-03-31
    • US12855873
    • 2010-08-13
    • Kenichi SHITARAHiroshi NAKAJIMA
    • Kenichi SHITARAHiroshi NAKAJIMA
    • G01N21/55G01N21/47G01N21/17
    • G01N21/9501G01N21/47
    • The present invention provides an apparatus and method which enable detecting a microscopic defect sensitively by efficiently collecting and detecting scattering light from a defect in a wider region without enlarging the apparatus. In the apparatus for inspecting a defect on a surface of a sample, including illumination means which irradiates a surface of a sample with laser, reflected light detection means which detects reflected light from the sample, and signal processing means which processes a detected signal and detecting a defect on the sample, the reflected light detection means is configured to include a scattering light detection unit which collects scattering light components of the reflected light from the sample by excluding specularly reflected light components by using an aspheric flannel lens and detecting the scattering light components.
    • 本发明提供了一种能够通过在不扩大设备的情况下有效地收集和检测来自较宽区域的缺陷的散射光而敏感地检测微观缺陷的装置和方法。 在用于检查样品表面上的缺陷的装置中,包括用激光照射样品表面的照射装置,检测来自样品的反射光的反射光检测装置和处理检测信号的信号处理装置, 反射光检测装置被配置为包括:散射光检测单元,其通过使用非球面法兰绒透镜排除镜面反射光分量并且检测散射光分量来收集来自样品的反射光的散射光分量 。