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    • 5. 发明专利
    • Semiconductor device
    • 半导体器件
    • JP2010165756A
    • 2010-07-29
    • JP2009005143
    • 2009-01-13
    • Toshiba CorpToshiba Information Systems (Japan) Corp東芝情報システム株式会社株式会社東芝
    • KAWASHIMA DAIKIMORIMIZU YUTAKAFUJII OSAMUENDO FUMIHIKO
    • H01L21/82
    • PROBLEM TO BE SOLVED: To provide a semiconductor device for wiring which reduces offsets of a supply position, and suppresses an in-plane power supply potential difference. SOLUTION: This semiconductor device includes: a semiconductor substrate 5 having macro-cells 35; an upper high potential power supply wiring 21 which is linear on the semiconductor substrate 5, and includes trunk wiring 22a connected to a high potential pad 11 at both end parts, and nested wiring 22b crossing the trunk wiring 22a; an upper low potential power supply wiring 23 which is linear in parallel alternately on a face of the trunk wiring 22a, and includes a trunk wiring 24a connected to a low potential pad 13 at both end parts, and a nested wiring 24b crossing the trunk wiring 24a; a lower high potential power supply wiring 25 which extends linearly in parallel to the trunk wiring 22a between the semiconductor substrate 5 and the upper high potential power supply wiring 21, is connected to the macro-cells 35, and is connected to the upper high potential power supply wiring 21 by a via plug 31; and a lower low potential power supply wiring 27 which is linear in parallel alternately on a face of the lower high potential power supply wiring 25, is connected to the macro-cells 35, and is connected to the upper low potential power supply wiring 23 by the via plug 31. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供减少供给位置的偏移并且抑制面内电源电位差的布线用半导体装置。 解决方案:该半导体器件包括:具有宏单元35的半导体衬底5; 在半导体基板5上呈直线状的上部高电位电源布线21,并且包括与两端部的高电位焊盘11连接的主干布线22a和与主体布线22a交叉的嵌套布线22b; 在主体布线22a的表面上交替地并行线性并且包括连接到两端部的低电位焊盘13的主干布线24a和穿过主干布线的嵌套布线24b的上部低电位电源布线23 24A; 与半导体衬底5和上部高电位电源配线21之间的主体配线22a并行延伸的下部高电位电源配线25与大电池35连接,并连接到上部高电位 电源接线21由通孔塞31提供; 并且在下部高电位电源配线25的表面上交替并联成线性的低电位电源配线27连接到宏单元35,并且通过以下方式连接到上部低电位电源配线23 通过插头31.版权所有(C)2010,JPO&INPIT
    • 7. 发明专利
    • Semiconductor device
    • 半导体器件
    • JP2008072383A
    • 2008-03-27
    • JP2006248596
    • 2006-09-13
    • Toshiba CorpToshiba Microelectronics Corp東芝マイクロエレクトロニクス株式会社株式会社東芝
    • IKEGAMI TOSHIHIROFUJII OSAMU
    • H03L7/00
    • PROBLEM TO BE SOLVED: To provide a semiconductor device of high frequency precision in clock signal and low power consumption of a system. SOLUTION: The semiconductor device comprises a control circuit 11 which controls oscillation operation of an external oscillation circuit 17 which is externally attached using an oscillation stop signal, and outputs the signal from the external oscillation circuit 17 as an external clock signal, an internal oscillation circuit 12 which generates and outputs the clock signal, and a selector 14 which selects the external clock signal or the clock signal from the internal oscillation circuit 12 based on a switching signal, and outputs it as an internal clock signal. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种具有时钟信号的高频精度和系统的低功耗的半导体器件。 解决方案:半导体器件包括控制电路11,其控制外部振荡电路17的振荡操作,外部振荡电路17使用振荡停止信号进行外部连接,并将来自外部振荡电路17的信号作为外部时钟信号输出, 内部振荡电路12,其产生并输出时钟信号;以及选择器14,其基于切换信号从内部振荡电路12选择外部时钟信号或时钟信号,并将其作为内部时钟信号输出。 版权所有(C)2008,JPO&INPIT
    • 9. 发明专利
    • Semiconductor device
    • 半导体器件
    • JP2012084796A
    • 2012-04-26
    • JP2010231633
    • 2010-10-14
    • Toshiba Corp株式会社東芝
    • FUJII OSAMU
    • H01L21/20H01L21/76H01L21/8234H01L27/088H01L29/78
    • H01L29/7848H01L29/165H01L29/78
    • PROBLEM TO BE SOLVED: To provide a semiconductor device in which adverse effect on, for example, the other elements on a substrate due to dislocation loops is suppressed while having a dummy pattern region that can cause the dislocation loops.SOLUTION: A semiconductor device comprises: an element isolation insulating film formed on a substrate; an element region and a dummy pattern region on the substrate that are partitioned by the element isolation insulating film; a first epitaxial crystal layer formed on the substrate in the element region; and a second epitaxial crystal layer formed on the substrate in the dummy pattern region. The first epitaxial crystal layer is composed of a crystal having a lattice constant different from a that of the crystal constituting the substrate. The second epitaxial crystal layer is composed of the same crystal as that of the first epitaxial crystal layer. The (111) plane of the substrate including any point on the interface between the second epitaxial crystal layer and the substrate is surrounded by the element isolation insulating film in a region deeper than the second epitaxial crystal layer.
    • 要解决的问题:提供一种半导体器件,其中抑制了例如位错环上的其它元件对衬底的不利影响,同时具有可能引起位错环的虚拟图案区域。 解决方案:半导体器件包括:形成在衬底上的元件隔离绝缘膜; 由元件隔离绝缘膜分隔的衬底上的元件区域和虚设图案区域; 在所述元件区域中的所述基板上形成的第一外延晶体层; 以及在所述虚拟图案区域中的所述基板上形成的第二外延晶体层。 第一外延晶体层由与构成基板的晶体的晶格常数不同的晶体构成。 第二外延晶体层由与第一外延晶体层相同的晶体构成。 包括在第二外延晶体层和衬底之间的界面上的任何点的衬底的(111)面被元件隔离绝缘膜包围在比第二外延晶体层更深的区域中。 版权所有(C)2012,JPO&INPIT
    • 10. 发明专利
    • Production management apparatus and production management method for semiconductor device
    • 半导体器件的生产管理设备和生产管理方法
    • JP2009099745A
    • 2009-05-07
    • JP2007269461
    • 2007-10-16
    • Toshiba Corp株式会社東芝
    • FUJII OSAMUYOSHIMURA HISAOAKIYAMA TATSUOKOMATSU SHIGERU
    • H01L21/02G05B19/418
    • Y02P90/02
    • PROBLEM TO BE SOLVED: To provide a production management apparatus and a production management method for a semiconductor device that can predict the yield of the semiconductor device fast during manufacturing steps and can improve the yield. SOLUTION: A manufacturing device 10 forms the semiconductor device on a semiconductor substrate. A measuring device 20 measures a featured structure of the semiconductor device formed on the semiconductor substrate by the manufacturing apparatus. An arithmetic unit 34 computes a yield value of the semiconductor device formed on the semiconductor substrate on the basis of measurement data obtained by the measuring device. A judging device 32 judges whether the manufacture of the semiconductor device is carried on or quit, or whether corrections are made from the computed yield value, and changes processing parameters of the manufacturing device when it is judged that corrections are to be made. COPYRIGHT: (C)2009,JPO&INPIT
    • 解决的问题:提供一种半导体器件的生产管理装置和生产管理方法,其可以在制造步骤期间快速预测半导体器件的产量并且可以提高产量。 解决方案:制造装置10在半导体衬底上形成半导体器件。 测量装置20通过制造装置测量在半导体衬底上形成的半导体器件的特征结构。 算术单元34基于由测量装置获得的测量数据计算形成在半导体衬底上的半导体器件的屈服值。 判断装置32判断是否进行或退出半导体装置的制造,或者根据计算出的屈服值进行修正,并且在判断为要进行修正时,改变制造装置的处理参数。 版权所有(C)2009,JPO&INPIT