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    • 5. 发明授权
    • Solid-state imaging device
    • 固态成像装置
    • US08294185B2
    • 2012-10-23
    • US12658714
    • 2010-02-12
    • Chiaki Sakai
    • Chiaki Sakai
    • H01L21/8238
    • H04N5/369H01L27/1464H01L27/14698
    • A solid-state imaging device includes: a photoelectric conversion portion that receives an incident light from a back surface side of a silicon layer to perform photoelectric conversion on the incident light; and a pixel transistor portion that outputs signal charges generated in the photoelectric conversion portion towards a front surface side of the silicon layer, wherein a gettering layer having internal stress is provided on the front surface side of the silicon layer at a position to overlap the photoelectric conversion portion on a plan view layout thereof.
    • 一种固态成像装置,包括:光电转换部,其从硅层的背面侧接收入射光,对入射光进行光电转换; 以及像素晶体管部分,其在所述光电转换部分中产生的信号电荷朝向所述硅层的前表面侧输出,其中在所述硅层的前表面侧上与所述硅层的重叠的位置处设置具有内应力的吸杂层 转换部分。
    • 9. 发明授权
    • Method for manufacturing solid-state image pick-up device
    • 固态摄像装置的制造方法
    • US07897427B2
    • 2011-03-01
    • US12686021
    • 2010-01-12
    • Chiaki Sakai
    • Chiaki Sakai
    • H01L21/00
    • H01L21/76254H01L21/265H01L21/26506H01L27/14632H01L27/1464H01L27/14683H01L27/14689H01L2221/68363
    • There is provided a method for manufacturing a solid-state image device which includes the steps of: forming a silicon epitaxial growth layer on a silicon substrate; forming photoelectric conversion portions, transfer gates, and a peripheral circuit portion in and/or on the silicon epitaxial growth layer and further forming a wiring layer on the silicon epitaxial growth layer; forming a split layer in the silicon substrate at a side of the silicon epitaxial growth layer; forming a support substrate on the wiring layer; peeling the silicon substrate from the split layer so as to leave a silicon layer formed of a part of the silicon substrate at a side of the support substrate; and planarizing the surface of the silicon layer.
    • 提供了一种用于制造固态图像器件的方法,其包括以下步骤:在硅衬底上形成硅外延生长层; 在硅外延生长层中和/或内部形成光电转换部分,转移栅极和外围电路部分,并进一步在硅外延生长层上形成布线层; 在所述硅衬底中在所述硅外延生长层的一侧上形成分裂层; 在所述布线层上形成支撑基板; 从分离层剥离硅衬底,以便在支撑衬底的一侧留下由硅衬底的一部分形成的硅层; 并且平坦化硅层的表面。
    • 10. 发明授权
    • Method for manufacturing solid-state image pickup-device
    • 固态摄像装置的制造方法
    • US08524574B2
    • 2013-09-03
    • US13029320
    • 2011-02-17
    • Chiaki Sakai
    • Chiaki Sakai
    • H01L21/00
    • H01L21/76254H01L21/265H01L21/26506H01L27/14632H01L27/1464H01L27/14683H01L27/14689H01L2221/68363
    • A method for manufacturing a solid-state image device which includes the steps of: forming a silicon epitaxial growth layer on a silicon substrate; forming photoelectric conversion portions, transfer gates, and a peripheral circuit portion in and/or on the silicon epitaxial growth layer and further forming a wiring layer on the silicon epitaxial growth layer; forming a split layer in the silicon substrate at a side of the silicon epitaxial growth layer; forming a support substrate on the wiring layer; peeling the silicon substrate from the split layer so as to leave a silicon layer formed of a part of the silicon substrate at a side of the support substrate; and planarizing the surface of the silicon layer.
    • 一种制造固态图像器件的方法,包括以下步骤:在硅衬底上形成硅外延生长层; 在硅外延生长层中和/或内部形成光电转换部分,转移栅极和外围电路部分,并进一步在硅外延生长层上形成布线层; 在所述硅衬底中在所述硅外延生长层的一侧上形成分裂层; 在所述布线层上形成支撑基板; 从分离层剥离硅衬底,以便在支撑衬底的一侧留下由硅衬底的一部分形成的硅层; 并且平坦化硅层的表面。