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1. 发明授权

US4408126A Cassette retaining device of electron beam apparatus 失效
标题翻译：电子束装置的盒式保持装置
公开(公告)号：US4408126A
公开(公告)日：1983-10-04
申请号：US250386
申请日：1981-04-02
申请人： Toru Tojo , Kazuyoshi Sugihara , Shuntaro Hata , Hirooki Numaga , Haruhisa Mukooyama , Yoshio Suzuki
发明人： Toru Tojo , Kazuyoshi Sugihara , Shuntaro Hata , Hirooki Numaga , Haruhisa Mukooyama , Yoshio Suzuki
IPC分类号： H01L21/027 , G21K5/08 , H01J37/20 , H01L21/673 , G21K5/10
CPC分类号： H01J37/20 , G21K5/08
摘要： A cassette retaining device comprises a pair of retaining mechanisms disposed respectively on both sides of the top surface of a sample table and pressing respectively on both sides of the top surface of a cassette to hold the cassette in said predetermined position between said retaining mechanisms and the sample table. Each retaining mechanism includes a presser capable of moving between a first position where the presser presses on a side portion of the top surface of the cassette to hold the cassette and a second position where the presser is separated from the top surface of the sample table to allow the cassette to be inserted or removed from between the presser and the sample table, a rocking arm rockable around a first pin relatively to the sample table and bearing the presser so that the presser may rock around a second pin parallel to the first pin, and a spring urging the rocking arm to rock in one direction, thereby locating the presser in the first position.
摘要翻译：盒保持装置包括分别位于样品台的顶表面的两侧上的一对保持机构，分别在盒的顶表面的两侧上按压以将盒保持在所述保持机构和所述保持机构的所述预定位置之间样品表。每个保持机构包括能够在第一位置和第二位置之间移动的压力器，第一位置和第二位置之间，压缩机压在盒的顶表面的侧面部分以保持盒子;第二位置，其中压脚与样品台的顶表面分离，允许盒子从压脚和样品台之间插入或取出，摆动臂可相对于样品台围绕第一销摆动并承载压脚，使得压脚可绕平行于第一销的第二销摆动，以及促使摇臂沿一个方向摇动的弹簧，从而将压脚定位在第一位置。

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