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    • 1. 发明授权
    • Pellicle for lithography and method for manufacturing pellicle film
    • 用于光刻的防护薄膜和防护薄膜制造方法
    • US08383297B2
    • 2013-02-26
    • US13032186
    • 2011-02-22
    • Toru ShirasakiKunihiro Ito
    • Toru ShirasakiKunihiro Ito
    • G03F1/62
    • G03F1/62
    • Provided are a pellicle for lithography which can prevent a haze from being generated on a photomask even if a short wave length laser such as an ArF excimer laser is used for a long period of time, and a method for producing a pellicle film to be attached to the pellicle for lithography. The pellicle 1 for lithography is comprised of a frame-like pellicle frame 4 having one open frame on one side of the pellicle frame and another open frame on another side of the pellicle frame; and a laser beam transmissive pellicle film 2 for lithography, which is attached to the one side of the pellicle frame. The another open frame is capable of attaching to a photomask 10 and the pellicle film has a venting hole 7 having a hole size through which a gas molecule 15 can pass but not a foreign particle 16.
    • 提供一种用于光刻的防护薄膜组件,即使长时间使用诸如ArF准分子激光器的短波长激光器也能够防止在光掩模上产生雾度,以及要附着的防护薄膜的制造方法 到光刻薄膜。 用于光刻的防护薄膜1由防护薄膜组件框架的一侧上具有一个开放框架的框架式防护薄膜框架4和防护薄膜组件框架的另一侧上的另一开放框架组成。 以及用于光刻的激光束透射防护薄膜2,其附接到防护薄膜组件框架的一侧。 另一个开放框架能够附着到光掩模10上,并且防护薄膜具有通气孔7,该通气孔具有孔尺寸,气体分子15可以通过孔径而不是外来颗粒16。
    • 3. 发明授权
    • Drive signal generator and optical scanning device provided with drive signal generator, and image display device
    • 驱动信号发生器和配有驱动信号发生器的光学扫描装置和图像显示装置
    • US08238009B2
    • 2012-08-07
    • US13005915
    • 2011-01-13
    • Kunihiro Ito
    • Kunihiro Ito
    • G02B26/08
    • G09G3/025G02B26/105G09G3/3413G09G5/02G09G2320/041H04N9/3129
    • A drive signal generator includes: a first storage part which stores data related to a primary processing signal acquired by subjecting a linearly changing saw-tooth signal to the low-pass filter processing; a parameter decision part which decides a parameter for the notch filter processing; a filter part which generates a secondary processing signal by subjecting the primary processing signal read from the first storage unit to the notch filter processing using the decided parameter decided by the parameter decision part; a second storage part which stores data related to the secondary processing signal generated by the filter unit; and a drive signal generation part which reads the data related to the secondary processing signal with a clock having a predetermined frequency and generates the drive signal by subjecting the data related to the secondary processing signal to analog conversion.
    • 驱动信号发生器包括:第一存储部,其存储与通过对线性变化的锯齿信号进行低通滤波处理而获取的主处理信号有关的数据; 确定陷波滤波处理的参数的参数决定部; 滤波器部分,通过使用由参数确定部分确定的所确定的参数对从第一存储单元读取的主处理信号进行陷波滤波处理来产生二次处理信号; 第二存储部,其存储与由所述滤波器单元生成的二次处理信号有关的数据; 以及驱动信号生成部,其利用具有预定频率的时钟读取与二次处理信号相关的数据,并通过对与二次处理信号相关的数据进行模拟转换来生成驱动信号。
    • 4. 发明授权
    • Differential type MOS transmission circuit
    • 差分型MOS传输电路
    • US5495186A
    • 1996-02-27
    • US275008
    • 1994-07-13
    • Nobuaki KanazawaMasao MizukamiKunihiro Ito
    • Nobuaki KanazawaMasao MizukamiKunihiro Ito
    • G06F3/00H03K3/3565H03K17/04H03K17/687H03K19/017H03K19/0175H03K19/0948H03K3/2897
    • H03K3/3565
    • A differential type MOS transmission circuit includes a signal driving circuit and a signal receiving circuit to realize high speed transmission for a short distance transmission between different LSIs, etc. A pair of transmission lines between the signal driving circuit and the signal receiving circuit are driven by a pair of drivers in the signal driving circuit so as to take either one of three states, i.e. one state where both of the lines are in a precharged states and two states where either one of the lines is in a discharged state. A signal driving circuit includes signal generating circuits generating variations in control signals varying pulse-like in response to rise and fall of an input signal to thereby obtain the discharge state. The signal receiving circuit generates an output signal depending on the state of the transmission lines and is constructed of a Schmitt trigger circuit with a hysteresis characteristic, for which an input threshold voltage for output logical values has a level smaller than a potential difference between the precharged level and the discharged level.
    • 差分型MOS发送电路包括信号驱动电路和信号接收电路,以实现不同LSI之间的短距离传输的高速传输等。信号驱动电路和信号接收电路之间的一对传输线由 信号驱动电路中的一对驱动器,以便采取三种状态中的任何一种,即两条线都处于预充电状态的一种状态和两条线中的任一条处于放电状态的两种状态。 信号驱动电路包括信号发生电路,其产生响应于输入信号的上升和下降而脉冲变化的控制信号的变化,从而获得放电状态。 信号接收电路根据传输线的状态产生输出信号,并且由具有滞后特性的施密特触发电路构成,输出逻辑值的输入阈值电压的电平小于预充电的电位差 水平和排放水平。
    • 5. 发明授权
    • Signal receiving circuit and digital signal processing system
    • 信号接收电路和数字信号处理系统
    • US5880601A
    • 1999-03-09
    • US750581
    • 1997-02-27
    • Nobuaki KanazawaMasao MizukamiKunihiro Ito
    • Nobuaki KanazawaMasao MizukamiKunihiro Ito
    • H03K19/0185H04L25/02H03K19/094
    • H04L25/0292H03K19/018521H03K19/018528
    • A signal receiving circuit comprising a first P-channel MOSFET amplifier and a first N-channel MOSFET amplifier having gates supplied with positive signals from a pair of signal transmission lines; and a second P-channel MOSFET amplifier and a second N-channel MOSFET amplifier having gates supplied with negative signals from said pair of signal transmission lines; wherein a first output signal is formed by so adjusting the gains of the first P-channel MOSFET amplifier and of the second N-channel MOSFET amplifier that the resultant signals have an intermediate amplitude between the operation voltages, and a second output signal is formed by so adjusting the gains of the second P-channel MOSFET amplifier and of the first N-channel MOSFET amplifier that the resultant signals have an intermediate amplitude between the operation voltages. This makes it possible to receive various small signals lying over a wide range even by using a sense amplifier which has only a fixed operation range in the signal receiving circuit as well as to constitute a novel and optimum system by combining semiconductor integrated circuit devices having different low-amplitude interfaces.
    • PCT No.PCT / JP95 / 01001 Sec。 371日期1997年2月27日 102(e)日期1997年2月27日PCT提交1995年5月25日PCT公布。 出版物WO95 / 34954 日期1995年12月21日一种信号接收电路,包括第一P沟道MOSFET放大器和第一N沟道MOSFET放大器,其具有来自一对信号传输线的正信号的栅极; 以及第二P沟道MOSFET放大器和第二N沟道MOSFET放大器,其具有来自所述一对信号传输线的负信号的栅极; 其中通过如此调节第一P沟道MOSFET放大器和第二N沟道MOSFET放大器的增益来形成第一输出信号,所得到的信号在工作电压之间具有中间幅度,而第二输出信号由 因此调整第二P沟道MOSFET放大器和第一N沟道MOSFET放大器的增益,所得到的信号在工作电压之间具有中间幅度。 这使得即使通过使用在信号接收电路中仅具有固定的操作范围的读出放大器也可以接收宽范围的各种小信号,并且通过组合具有不同的半导体集成电路器件来构成新的和最佳的系统 低振幅接口。
    • 8. 发明授权
    • Flying shear machine for cutting traveling stock
    • 用于切割行车的飞剪机
    • US4085641A
    • 1978-04-25
    • US755611
    • 1976-12-29
    • Kunihiro Ito
    • Kunihiro Ito
    • B23D25/04B23D25/10B23D36/00B26D1/56
    • B23D25/10B23D25/04B23D36/0041Y10T83/4786
    • A pair of shifting supports for supporting a shiftable shear housing in a flying shear machine for cutting traveling stock comprises a parallel crank mechanism which, together with a crank mechanism of a pair of shearing drives, is incorporated in a motive power transmission mechanism provided on a base and driven, together with a pair of shifting drives, by a common driving power source, the cranks of the parallel crank mechanism rotating one or two revolutions per revolution of a main shaft for shifting drive of the pair of shifting drives, a movement approximating a straight-line motion along the travel direction of the stock being imparted to the shiftable shear housing in at least a shearing interval of the forward stroke of the reciprocating movement thereof caused by the pair of shifting drives.
    • 用于支撑用于切割行进车辆的飞剪机中的可移动剪切机壳的一对换档支架包括平行曲柄机构,该平行曲柄机构与一对剪切驱动器的曲柄机构一起被并入设置在动力传动机构 通过公共驱动力源与一对变速驱动装置一起驱动,平行曲柄机构的曲柄旋转主轴每转一转或两转,用于换档一对变速驱动装置的驱动,运动近似 沿着所述坯料的行进方向的直线运动在由所述一对换档驱动器引起的往复运动的前进冲程的至少剪切间隔中被赋予所述可移动剪切壳体。