会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • PRECISION TRENCH FORMATION FOR SEMICONDUCTOR DEVICE
    • 半导体器件的精密成型
    • US20080305614A1
    • 2008-12-11
    • US12134087
    • 2008-06-05
    • Fumihiko INOUETakayuki MARUYAMATomohiro WATANABE
    • Fumihiko INOUETakayuki MARUYAMATomohiro WATANABE
    • H01L21/762
    • H01L21/3065H01L21/30604H01L29/785
    • Structures and methods for precision trench formation are disclosed. In one embodiment, a method for manufacturing a semiconductor device comprises forming a first oxygen-containing region in a semiconductor substrate by performing an oxygen ion implantation to a portion of the semiconductor substrate, and oxidizing the first oxygen-containing region using oxygen contained therein by performing a thermal processing to the semiconductor substrate, where the first oxygen-containing region is converted to a first oxide region. The method further comprises forming a groove in the semiconductor substrate by eliminating the first oxide region, where the performing thermal processing comprises subjecting the first oxygen-containing region to a gas low on oxygen.
    • 公开了用于精密沟槽形成的结构和方法。 在一个实施例中,一种制造半导体器件的方法包括通过对半导体衬底的一部分进行氧离子注入,在半导体衬底中形成第一含氧区域,并且通过使用其中包含的氧的第一含氧区域氧化 对所述半导体衬底进行热处理,其中所述第一含氧区域被转换为第一氧化物区域。 该方法还包括通过消除第一氧化物区域在半导体衬底中形成沟槽,其中执行热处理包括使第一含氧区域处于低于氧的气体。