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    • 1. 发明授权
    • Method and device for plasma treatment
    • 等离子体处理的方法和装置
    • US06177646B1
    • 2001-01-23
    • US09180974
    • 1998-11-17
    • Tomohiro OkumuraIchiro NakayamaShozo WatanabeHideo Haraguchi
    • Tomohiro OkumuraIchiro NakayamaShozo WatanabeHideo Haraguchi
    • B23K900
    • H01J37/32522H01J37/321H01L21/3065
    • Plasma is generated in a vacuum chamber (1) by supplying high frequency power to a spiral antenna (5) from an antenna-use high frequency power source (4) and by supplying high frequency power to an electrode (6) by an electrode-use high frequency power source (8) in a state where evacuating a vacuum chamber (1) while introducing a specified gas into the vacuum chamber, thereby controlling the vacuum chamber at a predetermined pressure. Plasma processing such as etching is performed on a substrate (7) located on the electrode (6), the interior of the vacuum chamber is heated to 80° C. or higher, wherein a resistance-heating heater (11) constituted of a heating element shielded from electromagnetic waves by a conductive sheath and a pressure-weld type thermocouple (10) provided on a dielectric body (9) are connected to a temperature adjuster (12). A insulating material (13) is arranged between the heater (11) and the antenna (5), and an inner chamber (16) including a belt heater (22) is also arranged.
    • 通过从天线用高频电源(4)向螺旋天线(5)提供高频电力,并通过电极 - 电极(6)向电极(6)供给高频电力,在真空室(1)中产生等离子体, 在将特定气体引入真空室的同时,在真空室(1)抽真空的状态下使用高频电源(8),从而将真空室控制在规定的压力。 在位于电极(6)的基板(7)上进行蚀刻等离子体处理,将真空室的内部加热至80℃以上,由加热 通过导电护套屏蔽电磁波的元件和设置在电介质体(9)上的压焊型热电偶(10)连接到温度调节器(12)。 绝热材料(13)设置在加热器(11)和天线(5)之间,并且还布置有包括带加热器(22)的内室(16)。
    • 5. 发明授权
    • Apparatus for continuously vulcanizing rubber product
    • 用于连续硫化橡胶制品的装置
    • US5542833A
    • 1996-08-06
    • US306006
    • 1994-09-14
    • Shozo WatanabeKibatsu Shinohara
    • Shozo WatanabeKibatsu Shinohara
    • B29C35/14B29C35/04B29C35/06B29C35/08B29C35/10B29C47/00B29K21/00B29K105/24B28B5/00
    • B29C47/0028B29C35/06B29C35/10B29C2035/0822B29C2035/0855B29C2037/903B29C35/045B29C47/00B29C47/003B29K2021/00B29L2031/003
    • An apparatus for continuously vulcanizing a rubber molding extruded from an extruder is disclosed in which a single or plural microwave heating apparatus is arranged within a heating bath. The microwave heating apparatus can generate internal heating of the rubber molding so that a surface temperature of the rubber molding can be held at a temperature substantially equal to the internal temperature of the rubber molding. Thus, uniform vulcanization of the rubber molding occurs. In addition, when both the microwave heating apparatus and an external heating source are arranged within the heating bath, an infrared ray radiator, arranged within the heating bath, radiates infra-red rays according to energy absorbed from the microwave heating apparatus and the external heating source. Thus overall heating efficiency can be increased. Furthermore, when single or plural temperature sensors are arranged within the heating bath so as to detect temperatures on particular portions of the rubber molding, an on-and-off control of the microwave heating apparatus is carried out so as to maintain the temperature of the rubber molding on the basis of a previously set temperature.
    • 公开了一种用于连续硫化从挤出机挤出的橡胶模制件的装置,其中在加热浴中布置单个或多个微波加热装置。 微波加热装置可以产生橡胶模制件的内部加热,使得橡胶模制件的表面温度可以保持在基本上等于橡胶模制件的内部温度的温度。 因此,发生橡胶成型体的均匀硫化。 此外,当微波加热装置和外部加热源都布置在加热槽内时,布置在加热槽内的红外线辐射器根据从微波加热装置吸收的能量和外部加热辐射红外线 资源。 因此,可以提高总体加热效率。 此外,当单个或多个温度传感器布置在加热浴中以便检测橡胶模制件的特定部分上的温度时,进行微波加热装置的开关控制,以保持温度 橡胶成型基于以前设定的温度。
    • 7. 发明授权
    • Slidable variable resistor of electric shock prevention type
    • 防电击型可变电阻器
    • US3996550A
    • 1976-12-07
    • US644904
    • 1975-12-29
    • Tadashi YanoShozo Watanabe
    • Tadashi YanoShozo Watanabe
    • C07C69/63B01J27/00B01J31/00C07B61/00C07C69/73H01C10/38H01C10/06
    • H01C10/38
    • A slidable avriable resistor to be used in television receiver and in stereophonic set comprises a lower case member of an insulating material having a resistor member and a conductor on it disposed in lengthwise direction, a upper metallic cover having a long opening in lengthwise direction at the top of the cover, a slidable member of an insulating material with an arm projecting through the opening from the top of the slidable member having a brush extending from the lower side of the slidable member and sliding on the resistor and the conductor for electric conduction, and a flat rectangular plate of insulating material slidably disposed through a passage in the slidable body. By this construction should any metallic piece enter through the opening, the metallic piece is prevented from making contact with the resistor member or the conductor. Thus unexpected electric shock or damage can be prevented.
    • 一种用于电视接收机和立体声组件中的可滑动可乘用电阻器包括具有电阻器构件的绝缘材料的下壳体构件和沿其长度方向设置的导体,上部金属盖在长度方向上具有长的开口 所述盖的顶部具有绝缘材料的可滑动构件,其具有从所述可滑动构件的顶部穿过所述开口突出的臂,所述臂具有从所述可滑动构件的下侧延伸并在所述电阻器和所述导体上滑动的电刷, 以及通过滑动体中的通道可滑动地设置的平坦矩形的绝缘材料板。 通过这种结构,如果任何金属片通过开口进入,则金属片被阻止与电阻器构件或导体接触。 因此可以防止意外的电击或损坏。