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    • 7. 发明授权
    • Removal of metal skin from a copper-Invar-copper laminate
    • 从铜Inv铜层压板去除金属表皮
    • US06228246B1
    • 2001-05-08
    • US09347581
    • 1999-07-01
    • Madhav DattaRaymond T. GalascoLawrence P. LehmanRoy H. MagnusonRobin A. SuskoRobert D. Topa
    • Madhav DattaRaymond T. GalascoLawrence P. LehmanRoy H. MagnusonRobin A. SuskoRobert D. Topa
    • C25F300
    • H05K3/44C25F3/00H05K3/07H05K2201/0338H05K2201/0347H05K2203/0285H05K2203/0361
    • A method of removing a metal skin from a through-hole surface of a copper-Invar-copper (CIC) laminate without causing differential etchback of the laminate. The metal skin includes debris deposited on the through-hole surface as the through hole is being formed by laser or mechanical drilling of a substrate that includes the laminate as an inner plane. Removing the metal skin combines electrochemical polishing (ECP) with ultrasonics. ECP dissolves the metal skin in an acid solution, while ultrasonics agitates and circulates the acid solution to sweep the metal skin out of the through hole. ECP is activated when a pulse power supply is turned on and generates a periodic voltage pulse from a pulse power supply whose positive terminal is coupled to the laminate and whose negative terminal is coupled to a conductive cathode. After the metal skin is removed, the laminate is differentially etched such that the copper is etched at a faster rate than the Invar. To prevent the differential etching, a copper layer is formed on a surface of the substrate with an electrical resistance R1 between the copper layer and the positive terminal of the pulse power supply. Additionally, an electrical resistance R2 is formed between the laminate and the positive terminal of the pulse power supply. Adjustment of R1 and R2 controls the relative etch rates of the copper and the Invar.
    • 从铜 - 堇青铜(CIC)层压板的通孔表面去除金属表皮而不会引起层压板的不均匀回蚀的方法。 金属皮肤包括沉积在通孔表面上的碎屑,因为通孔是通过激光或机械钻孔形成的,所述基底包括层压体作为内平面。 去除金属皮肤结合电化学抛光(ECP)与超声波。 ECP将金属皮肤溶解在酸性溶液中,同时超声波搅拌并循环酸溶液以将金属皮肤从通孔中扫出。 当脉冲电源接通时,ECP被激活,并从脉冲电源产生周期性的电压脉冲,该脉冲电源的正极端子耦合到层压板并且其负极端子连接到导电阴极。 在去除金属表皮之后,层压体被差异蚀刻,使得以比Invar更快的速度蚀刻铜。 为了防止差分蚀刻,在衬底的表面上在铜层和脉冲电源的正端之间具有电阻R1形成铜层。 此外,在层压体和脉冲电源的正极端之间形成电阻R2。 R1和R2的调整控制铜和殷钢的相对蚀刻速率。