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    • 4. 发明申请
    • Programmable Image Computer
    • 可编程图像计算机
    • US20070005284A1
    • 2007-01-04
    • US11530153
    • 2006-09-08
    • Krishnamurthy BhaskarMark RouloJohn TaylorLawrence MillerPaul RussellJason LinEliezer RosengausRichard WallingfordKishore Bubna
    • Krishnamurthy BhaskarMark RouloJohn TaylorLawrence MillerPaul RussellJason LinEliezer RosengausRichard WallingfordKishore Bubna
    • G01R27/28
    • G06T1/0007G01N21/9501G01N21/956G01N2021/8825G01R31/311
    • An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. A high speed interface bus is coupled to the interface card, receives the image data from the interface card. A computer is coupled to the high speed interface bus, and receives the image data from the high speed interface bus and processes the image data according to an algorithm, to produce the anomaly report. A second high speed network is coupled to the process nodes, and receives the anomaly reports from the process nodes. A job manager is coupled to the second high speed network, and receives the anomaly reports from the process nodes and sends information to the process nodes to coordinate the processing of the image data in the array of process nodes. An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network and process the data to produce reports. Each process node has an interface card that formats the high speed interface bus that is couples to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.
    • 用于检测基板上的异常的检查系统。 检查系统具有用于生成图像数据的传感器阵列。 第一高速网络耦合到传感器阵列并接收并传送图像数据。 一系列过程节点耦合到第一高速网络,并接收和处理图像数据以产生异常报告。 每个处理节点具有耦合到第一高速网络的接口卡,其接收来自第一高速网络的图像数据,并且根据高速接口总线协议格式化图像数据。 高速接口总线耦合到接口卡,从接口卡接收图像数据。 计算机耦合到高速接口总线,并从高速接口总线接收图像数据,并根据算法对图像数据进行处理,以产生异常报告。 第二高速网络耦合到进程节点,并从进程节点接收异常报告。 作业管理器耦合到第二高速网络,并且从进程节点接收异常报告,并向进程节点发送信息以协调处理节点阵列中的图像数据的处理。 用于检测基板上的异常的检查系统。 第一网络耦合到传感器阵列并传送数据。 过程节点耦合到第一个网络并处理数据以产生报告。 每个进程节点都有一个接口卡,格式化耦合到接口卡的高速接口总线。 计算机接收并处理数据以生成报告。 第二个网络接收报告。 作业管理器耦合到第二网络,接收报告,并将信息发送到处理节点以协调数据的处理。
    • 5. 发明申请
    • Full swath analysis
    • 全幅分析
    • US20060106580A1
    • 2006-05-18
    • US11314627
    • 2005-12-21
    • Krishnamurthy BhaskarMark RouloJohn TaylorLawrence MillerPaul RussellJason LinEliezer RosengausRichard WallingfordKishore Bubna
    • Krishnamurthy BhaskarMark RouloJohn TaylorLawrence MillerPaul RussellJason LinEliezer RosengausRichard WallingfordKishore Bubna
    • G21C17/00G06F11/30G06F15/00
    • G06T7/0004G06T2207/30148
    • An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each of the process nodes has an amount of memory that is sufficient to receive image data representing a plurality of dice on an integrated circuit wafer, and each of the process nodes performs analysis on the plurality of dice. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. A high speed interface bus is coupled to the interface card, receives the image data from the interface card. A computer is coupled to the high speed interface bus, and receives the image data from the high speed interface bus and processes the image data according to an algorithm, to produce the anomaly report. A second high speed network is coupled to the process nodes, and receives the anomaly reports from the process nodes. A job manager is coupled to the second high speed network, and receives the anomaly reports from the process nodes and sends information to the process nodes to coordinate the processing of the image data in the array of process nodes.
    • 用于检测基板上的异常的检查系统。 检查系统具有用于生成图像数据的传感器阵列。 第一高速网络耦合到传感器阵列并接收并传送图像数据。 一系列过程节点耦合到第一高速网络,并接收和处理图像数据以产生异常报告。 每个处理节点具有足以接收表示集成电路晶片上的多个骰子的图像数据的存储器量,并且每个处理节点对多个骰子执行分析。 每个处理节点具有耦合到第一高速网络的接口卡,其接收来自第一高速网络的图像数据,并且根据高速接口总线协议格式化图像数据。 高速接口总线耦合到接口卡,从接口卡接收图像数据。 计算机耦合到高速接口总线,并从高速接口总线接收图像数据,并根据算法对图像数据进行处理,以产生异常报告。 第二高速网络耦合到进程节点,并从进程节点接收异常报告。 作业管理器耦合到第二高速网络,并且从进程节点接收异常报告,并向进程节点发送信息以协调处理节点阵列中的图像数据的处理。
    • 7. 发明申请
    • Simultaneous Multi-Spot Inspection and Imaging
    • 同时多点检测和成像
    • US20070153265A1
    • 2007-07-05
    • US11553174
    • 2006-10-26
    • Mehdi Vaez-IravaniLawrence Miller
    • Mehdi Vaez-IravaniLawrence Miller
    • G01N21/88
    • G01N21/95623G01N21/8806
    • A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. For patterned surface inspection, a cross-shaped filter is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface. In another embodiment, different portions of the same objective may be used for focusing the illumination beams onto the surface and for collecting the scattered radiation from the illuminated spots simultaneously. In another embodiment, a one-dimensional array of illumination beams are directed at an oblique angle to the surface to illuminate a line of illuminated spots at an angle to the plane of incidence. Radiation scattered from the spots are collected along directions perpendicular to the line of spots or in a double dark field configuration.
    • 紧凑且通用的多点检查成像系统采用将辐射束阵列聚焦到表面的目标和具有大数值孔径的第二反射或折射物镜,用于收集来自照明点阵列的散射辐射。 来自每个照明点的散射辐射被聚焦到相应的光纤通道,使得关于散射的信息可以被传送到用于处理的远程检测器阵列中的相应检测器。 对于图案化表面检查,十字形过滤器与表面一起旋转,以减少曼哈顿几何形状的衍射效应。 也可以采用环形孔形状的空间滤光器,以减少从诸如表面上的阵列的图案的散射。 在另一个实施例中,相同物镜的不同部分可用于将照明光束聚焦到表面上并且用于从同时收集来自照明斑点的散射辐射。 在另一个实施例中,照明光束的一维阵列以与入射平面成一定角度的一定角度照射到该表面上的倾斜角度。 从斑点散射的辐射沿垂直于斑点线的方向或双暗场构型收集。
    • 9. 发明申请
    • Commutation of Brushless Electrodynamic Machines
    • 无刷电动机的换向
    • US20070085442A1
    • 2007-04-19
    • US11538781
    • 2006-10-04
    • John PetroKen WassonLawrence Miller
    • John PetroKen WassonLawrence Miller
    • H02K21/12H01R39/04H02K13/04
    • H02K13/006H02K21/12H02K23/62
    • A method, apparatus and system for selectably directing power signals to coils of active field pole members in brushless electrodynamic machinery are disclosed. In one embodiment, a field pole commutator includes a power transfer region configured to transfer at least a first power signal and second power signal to the coils. It also includes a first power region and a second power region configured to provide the first power signal and the second power signal, respectively, to the power transfer region. The first power region and the second power region each are configured to rotate together with the power transfer region about an axis of rotation. In one embodiment, the field pole commutator is implemented in a brushless direct current (“DC”) current motor, which includes a rotor having permanent magnets and a plurality of active field pole members. Each active field pole member has one or more coils wound about the periphery of field pole members to form said plurality of active field pole members. In a specific embodiment, permanent magnets of the rotor include either conical magnets or cylindrical magnets, or both.
    • 公开了一种用于将功率信号可选择地引导到无刷电动机械中的有源场极构件的线圈的方法,装置和系统。 在一个实施例中,场极换向器包括被配置为将至少第一功率信号和第二功率信号传送到线圈的功率传递区域。 它还包括分别将第一功率信号和第二功率信号分别提供给功率传输区域的第一功率区域和第二功率区域。 第一功率区域和第二功率区域各自被构造成与绕着旋转轴线的功率传递区域一起旋转。 在一个实施例中,场电流换向器实现在无刷直流(“DC”)电流电动机中,其包括具有永磁体的转子和多个有源场磁极构件。 每个有源场极元件具有围绕场极元件周围缠绕的一个或多个线圈,以形成所述多个有源场极元件。 在具体实施例中,转子的永磁体包括圆锥形磁体或圆柱形磁体,或两者。
    • 10. 发明申请
    • High throughput image for processing inspection images
    • 用于处理检查图像的高吞吐量图像
    • US20050249395A1
    • 2005-11-10
    • US10860617
    • 2004-06-02
    • Lawrence Miller
    • Lawrence Miller
    • G06K9/00G06T7/00
    • G06T7/0004G01N21/9501G01N2021/95615G01N2021/95676G06T2207/30148
    • Disclosed is an image processing system for analyzing images of a specimen to determine whether the specimen contains defects. The system includes a plurality of processors for receiving image data from a specimen and for analyzing one or more selected patch(es) of such image data to determine whether the specimen has a defect. The system also includes a plurality of buses for coupling the processors together, wherein the bus has the following specifications: a data rate of about 50 gigabits per second or more and an error rate less than about 10−16. In one implementation, the buses are low voltage differential signal type buses, and in another implementation, the buses are hyper transport type buses.
    • 公开了一种用于分析样本的图像以确定样本是否包含缺陷的图像处理系统。 该系统包括用于从样本接收图像数据并用于分析这些图像数据的一个或多个选定补丁以确定样本是否具有缺陷的多个处理器。 该系统还包括用于将处理器连接在一起的多个总线,其中总线具有以下规格:大约每秒50吉比特或更高的数据速率和小于大约10比特的错误率 。 在一个实施中,总线是低压差分信号型总线,在另一实现中,总线是超传输型总线。