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1. 发明授权

US5136604A Apparatus and method for detecting the power level in single and multi-stripe integrated lasers 失效
标题翻译：用于检测单条和多条集成激光器功率电平的装置和方法
公开(公告)号：US5136604A
公开(公告)日：1992-08-04
申请号：US500814
申请日：1990-03-28
申请人： Thomas L. Paoli , Neville Connell , Doanld R. Scifres , Robert L. Thornton
发明人： Thomas L. Paoli , Neville Connell , Doanld R. Scifres , Robert L. Thornton
IPC分类号： H01S5/00 , H01L27/15 , H01S5/026 , H01S5/042 , H01S5/06 , H01S5/0683 , H01S5/40
CPC分类号： H01S5/0264 , H01L27/15 , H01S5/0683 , H01S5/4031
摘要： The present invention is an apparatus and method for providing detection of a laser output on a semiconductor wafer. A laser cavity and a detection cavity are formed on a semiconductor wafer in parallel such that light emitted laterally from the laser cavity is detected by the detection cavity. The amount of light detected can then be transformed into data, which in turn can be used to control the output of the laser.

2. 发明授权

US6121983A Method and apparatus for a solid state laser scanning architecture 有权
标题翻译：固体激光扫描架构的方法和装置
公开(公告)号：US6121983A
公开(公告)日：2000-09-19
申请号：US196396
申请日：1998-11-19
申请人： David K. Fork , G. A. Neville Connell , Eric Peeters , Robert L. Thornton , Patrick Y. Maeda , Ross D. Bringans , Thomas L. Paoli , Joel A. Kubby , Decai Sun , Philip D. Floyd
发明人： David K. Fork , G. A. Neville Connell , Eric Peeters , Robert L. Thornton , Patrick Y. Maeda , Ross D. Bringans , Thomas L. Paoli , Joel A. Kubby , Decai Sun , Philip D. Floyd
IPC分类号： B41J2/465 , G02B26/08 , G02B26/10 , H04N1/113 , H04N1/192 , H04N1/195 , G03G15/04
CPC分类号： H04N1/1135 , B41J2/465 , G02B26/0833 , G02B26/10 , H04N1/192 , H01S5/18388 , H01S5/423 , H04N1/195
摘要： A solid state laser array is multiplexed using an array of micromirrors to permit high resolution printing in a wide format. Each laser in the laser array and each micromirror in the mirror array is individually controlled. The laser array may be an array of VCSELs produced on a GaAs substrate.
摘要翻译：使用微镜阵列来复用固态激光器阵列，以允许以宽格式进行高分辨率打印。激光阵列中的每个激光器和反射镜阵列中的每个微镜单独控制。激光器阵列可以是在GaAs衬底上产生的VCSEL阵列。

3. 发明授权

US6116756A Monolithic scanning light emitting devices 有权
标题翻译：单片扫描发光装置
公开(公告)号：US6116756A
公开(公告)日：2000-09-12
申请号：US173329
申请日：1998-10-15
申请人： Eric Peeters , Decai Sun , G. A. Neville Connell , Ross D. Bringans , Raj B. Apte , Thomas L. Paoli , Patrick Y. Maeda , David K. Fork , Joel A. Kubby , Philip D. Floyd
发明人： Eric Peeters , Decai Sun , G. A. Neville Connell , Ross D. Bringans , Raj B. Apte , Thomas L. Paoli , Patrick Y. Maeda , David K. Fork , Joel A. Kubby , Philip D. Floyd
IPC分类号： B81B3/00 , B81B7/02 , H01L27/15 , H01S5/02 , H01S5/022 , H01S5/183 , F21V21/00
CPC分类号： H01S5/02252 , H01L27/15 , H01S5/183 , H01S5/423
摘要： A micro-machined movable light emitting assembly is formed on or from an undoped or pure III-V substrate or formed on or from a doped III-V substrate. The movable light emitting assemblies are to be actuated using force generators, to generate the various mechanical degrees of freedom depending on the type of stage suspension and actuation.
摘要翻译：微加工的可移动发光组件形成在未掺杂的或纯的III-V衬底上，或者形成在掺杂的III-V衬底上或从掺杂的III-V衬底上形成。使用力发生器来致动可移动发光组件，以根据舞台悬架和致动的类型产生各种机械自由度。

4. 发明授权

US5355382A Composite laser array support 失效
标题翻译：复合激光阵列支持
公开(公告)号：US5355382A
公开(公告)日：1994-10-11
申请号：US156229
申请日：1993-11-22
申请人： Gregory J. Kovacs , Harlan F. Chung , G. A. Neville Connell , R. Donald Yingling, Jr. , Rose M. Donaldson , Thomas L. Paoli
发明人： Gregory J. Kovacs , Harlan F. Chung , G. A. Neville Connell , R. Donald Yingling, Jr. , Rose M. Donaldson , Thomas L. Paoli
IPC分类号： H01S3/04 , H01S3/23 , H01S5/00 , H01S5/022 , H01S5/024 , H01S5/40 , H01S3/19
CPC分类号： H01S5/4025 , H01S5/02236 , H01S5/02272 , H01S5/02484 , H01S5/4043
摘要： Nonmonolithic laser arrays having lasing elements mounted on a composite support that enables accurate positioning and separation of the lasing elements, and that enables low thermal, optical, and electrical cross-talk. The support includes a low thermal diffusivity region surrounded by high thermal diffusivity regions which have defined mounting surfaces onto which the lasing elements mount. Heat generated in the lasing elements is conducted away by the high thermal diffusivity regions, while the low thermal diffusivity region reduces thermal cross-talk between the lasing elements. Beneficially, the support assists current flow to (or from) the lasing elements.
摘要翻译：具有安装在复合支撑上的激光元件的非单晶激光器阵列，其能够精确地定位和分离激光元件，并且能够实现低热，光学和电气串扰。该支撑件包括由具有限定的激光元件安装在其上的安装表面的高热扩散区域包围的低热扩散区域。激光元件中产生的热量由高热扩散区域传导掉，而低热扩散区域减小激光元件之间的热串扰。有利的是，支持有助于当前流向（或从）激光元件。

5. 发明授权

US06180428B2 Monolithic scanning light emitting devices using micromachining 有权
标题翻译：使用微加工的单片扫描发光器件
公开(公告)号：US06180428B2
公开(公告)日：2001-01-30
申请号：US09172883
申请日：1998-10-15
申请人： Eric Peeters , Decai Sun , G. A. Neville Connell , Ross D. Bringans , Raj B. Apte , Thomas L. Paoli , Patrick Y. Maeda , David K. Fork , Joel A. Kubby , Philip D. Floyd
发明人： Eric Peeters , Decai Sun , G. A. Neville Connell , Ross D. Bringans , Raj B. Apte , Thomas L. Paoli , Patrick Y. Maeda , David K. Fork , Joel A. Kubby , Philip D. Floyd
IPC分类号： H01L2100
CPC分类号： H01S5/02252 , H01L27/15 , H01S5/183 , H01S5/423
摘要： A micro-machined movable light emitting assembly is formed on or from an undoped or pure III-V substrate or formed on or from a doped III-V substrate. The movable light emitting assemblies are to be actuated using force generators, to generate the various mechanical degrees of freedom depending on the type of stage suspension and actuation.
摘要翻译：微加工的可移动发光组件形成在未掺杂的或纯的III-V衬底上，或者形成在掺杂的III-V衬底上或从掺杂的III-V衬底上形成。使用力发生器来致动可移动发光组件，以根据舞台悬架和致动的类型产生各种机械自由度。

6. 发明授权

US5843802A Semiconductor laser formed by layer intermixing 失效
标题翻译：半导体激光由层间混合形成
公开(公告)号：US5843802A
公开(公告)日：1998-12-01
申请号：US923092
申请日：1997-09-04
申请人： Kevin J. Beernink , Robert L. Thornton , David P. Bour , Thomas L. Paoli , Jack Walker
发明人： Kevin J. Beernink , Robert L. Thornton , David P. Bour , Thomas L. Paoli , Jack Walker
IPC分类号： H01S5/00 , H01L21/18 , H01S5/34 , H01S5/343 , H01S5/40 , H01S3/18 , H01S3/19
CPC分类号： B82Y20/00 , H01L21/182 , H01S5/34 , H01S5/4043 , H01S5/3413 , H01S5/3414 , H01S5/3432 , H01S5/34326 , H01S5/4087
摘要： A method for fabricating a multiple layer semiconductor device, such as a laser, using impurity-induced, or vacancy-enhanced, intermixing of semiconductor layers to selectively inactivate quantum well regions in the device.
摘要翻译：一种用于制造诸如激光器的多层半导体器件的方法，其使用杂质诱导或空穴增强的半导体层的混合来选择性地使器件中的量子阱区域失活。

7. 发明授权

US5708674A Semiconductor laser or array formed by layer intermixing 失效
标题翻译：半导体激光器或由层间混合形成的阵列
公开(公告)号：US5708674A
公开(公告)日：1998-01-13
申请号：US367554
申请日：1995-01-03
申请人： Kevin J. Beernink , Robert L. Thornton , David P. Bour , Thomas L. Paoli , Jack Walker
发明人： Kevin J. Beernink , Robert L. Thornton , David P. Bour , Thomas L. Paoli , Jack Walker
IPC分类号： H01S5/00 , H01L21/18 , H01S5/34 , H01S5/343 , H01S5/40 , H01S3/19
CPC分类号： B82Y20/00 , H01L21/182 , H01S5/34 , H01S5/4043 , H01S5/3413 , H01S5/3414 , H01S5/3432 , H01S5/34326 , H01S5/4087
摘要： A fabrication process and several structures for an index-guided laser diode formed by IILD or for a multiple wavelength laser array containing stacked semi-conductive active layers with quantum wells. The laser wavelength is varied laterally by effectively inactivating quantum wells which have transition wavelengths longer than that desired in the selected portion of the device. The quantum wells are inactivated by intermixing them with the surrounding high band gap semiconductor layers. To accomplish this intermixing without affecting the active layer in nearby regions, a finite source of impurity inducing or promoting intermixing is located in proximity to the quantum well to be intermixed, and the sample is annealed under conditions which allow for lateral patterning of the impurity-induced intermixing. Alternatively, the body is capped over the quantum well to be inactivated with a material which induces vacancies in semi-conductive material during thermal annealing, thus promoting vacancy-enhanced intermixing of the undesired quantum well. The intermixing can also be brought about by patterned annealing or selective laser heating which produces local annealing, or by use of two different caps. For the index-guided laser diode, the flanking index-guiding regions are formed by IILD from a buried impurity source, in which surface conditions are controlled to promote impurity diffusion to the flanking regions but not to the active stripe region between the flanking regions.
摘要翻译：用于由IILD或包含具有量子阱的堆叠半导电有源层的多波长激光器阵列形成的折射率引导激光二极管的制造工艺和若干结构。通过有效地使具有比器件所选部分中所需要的转换波长更长的量子阱来激活激光波长。量子阱通过将它们与周围的高带隙半导体层混合而失活。为了实现这种混合而不影响附近区域中的有源层，杂质诱导或促进混合的有限源位于量子阱附近，以便混合，并且样品在允许杂质 - 诱导混合。或者，通过在热退火期间在半导电材料中引起空位的材料将物体盖在量子阱上以使其失活，从而促进不期望的量子阱的空位增强的混合。混合还可以通过图案化退火或选择性激光加热产生局部退火，或通过使用两个不同的盖来实现。对于折射率引导激光二极管，侧翼引导区域由埋藏杂质源的IILD形成，其中控制表面条件以促进杂质扩散到侧翼区域而不是侧向区域之间的有源条纹区域。

8. 发明授权

US5252513A Method for forming a laser and light detector on a semiconductor substrate 失效
标题翻译：在半导体衬底上形成激光和光检测器的方法
公开(公告)号：US5252513A
公开(公告)日：1993-10-12
申请号：US714287
申请日：1991-06-12
申请人： Thomas L. Paoli , G. A. N. Connell , Donald R. Scifres , Robert L. Thornton
发明人： Thomas L. Paoli , G. A. N. Connell , Donald R. Scifres , Robert L. Thornton
IPC分类号： H01L27/15 , H01S5/026 , H01S5/068 , H01S5/0683 , H01S5/40 , H01L21/20
CPC分类号： H01L27/15 , H01S5/0264 , H01S5/068 , H01S5/0683 , H01S5/4031 , Y10S148/095
摘要： The present invention is an apparatus and method for providing detection of a laser output on a semiconductor wafer. A laser cavity and a detection cavity are formed on a semiconductor wafer in parallel such that light emitted laterally from the laser cavity is detected by the detection cavity. The amount of light detected can then be transformed into data, which in turn can be used to control the output of the laser.
摘要翻译：本发明是一种用于提供半导体晶片上的激光输出检测的装置和方法。平行地在半导体晶片上形成激光腔和检测腔，使得由激光腔侧向发射的光被检测腔检测。然后可以将检测到的光量转换成数据，这又可用于控制激光器的输出。

9. 发明授权

US4831629A Incoherent, optically coupled laser arrays with increased spectral width 失效
标题翻译：具有增加光谱宽度的不相干的光耦合激光阵列
公开(公告)号：US4831629A
公开(公告)日：1989-05-16
申请号：US91819
申请日：1987-09-01
申请人： Thomas L. Paoli , Robert D. Burnham , Robert L. Thornton
发明人： Thomas L. Paoli , Robert D. Burnham , Robert L. Thornton
IPC分类号： H01S5/20 , H01S5/40
CPC分类号： H01S5/20 , H01S5/4031 , H01S5/2059 , H01S5/4087
摘要： An optically uncoupled laser array is modified at its current confinement geometry to introduce nonuniformity in effective optical cavity width and/or length among the different lasers comprising the laser array. An array laser comprising a plurality of spaced lasing elements with an optical cavity for generating and propagating radiation under lasing conditions with each of the laser elements being optically uncoupled from one another is enhanced by an extended spectral emission linewidth and reduction in temporal coherence. This extended spectral emission linewidth and reduction in temporal coherence is accomplished by changing the gravity gain or loss for at least a majority of the laser elements relative to each other whereby a different longitudinal mode(s) of operation and frequency of operation exist for each such laser element. The enhancement may be accomplished, for example, by providing nonuniformity in the current confinement width or nonuniformity in the effective current pumped region or a change in optical cavity absorption loss for at least a majority of laser elements. Such nonuniformity or change may be randomly varying or monotonically increasing or decreasing across the laser elements of the array.
摘要翻译：光学非耦合激光器阵列在其电流约束几何形状下被修改，以在包括激光器阵列的不同激光器之间的有效光腔宽度和/或长度上引入不均匀性。阵列激光器包括多个间隔开的激光元件，其具有用于在激光条件下产生和传播辐射的光学腔，其中每个激光元件彼此光学分离，通过扩展的光谱发射线宽和时间相干性的减小来增强。通过改变至少大部分激光元件相对于彼此的重力增益或损耗来实现这种扩展的光谱发射线宽和时间相干性的减小，由此对于每个激光元件存在不同的纵向工作模式和操作频率激光元件增强可以例如通过在有效电流泵浦区域中的当前限制宽度或不均匀性中提供不均匀性或者对于至少大多数激光元件提供光学腔吸收损耗的变化来实现。这种不均匀性或变化可以在阵列的激光元件上随机变化或单调增加或减少。

10. 发明授权

US4786918A Incoherent, optically uncoupled laser arrays for electro-optic line modulators and line printers 失效
标题翻译：用于电光线调制器和线路打印机的非相干光学非耦合激光阵列
公开(公告)号：US4786918A
公开(公告)日：1988-11-22
申请号：US106014
申请日：1987-10-01
申请人： Robert L. Thornton , Henry W. Sang, Jr. , Thomas L. Paoli , Robert D. Burnham
发明人： Robert L. Thornton , Henry W. Sang, Jr. , Thomas L. Paoli , Robert D. Burnham
IPC分类号： B41J2/465 , G06K15/12 , H01S5/20 , H01S5/223 , H01S5/32 , H01S5/34 , H01S5/40 , G01D9/42 , H01S3/19
CPC分类号： G06K15/1252 , B41J2/465 , H01S5/32 , H01S5/4031 , H01S5/2059 , H01S5/2063 , H01S5/2232 , H01S5/2234 , H01S5/3428 , H01S5/4037 , H01S5/405
摘要： An incoherent, optically uncoupled laser array for an electro-optic line modulator or a line printer or the like and comprising a plurality of spatial laser emitters characterized by having high power density and a uniform far field emission pattern. Structural means is provided in the array to permit the spacing of the emitters sufficiently close to provide a uniform far field emission pattern without permitting phaselocking between adjacent emitters of the array. The structural means may comprise geometric lateral and diagonal displacement of adjacent optical cavities of the laser elements. Alternatively, the structural means may comprise a plurality of spatially disposed isolation regions extending across the laser array and extending into the laser array a distance sufficient to optically isolate the optical cavities of the laser elements from one another and prevent optical coupling between adjacent laser elements. The spatial isolation regions may be formed into the fabricated laser array using impurity induced disordering (IID).
摘要翻译：一种用于电光线调制器或线路打印机等的非相干光学非耦合激光器阵列，并且包括多个具有高功率密度和均匀的远场发射图案的空间激光发射器。在阵列中提供结构装置以允许发射体的间隔足够接近以提供均匀的远场发射图案，而不允许阵列的相邻发射体之间的相位锁定。结构装置可以包括激光元件的相邻光学腔的几何横向和对角位移。或者，结构装置可以包括跨越激光器阵列延伸并且延伸到激光器阵列中的多个空间上布置的隔离区域，该距离足以使激光元件的光学腔彼此光学地隔离并且防止相邻激光元件之间的光耦合。可以使用杂质诱导的无序（IID）将空间隔离区形成为制造的激光阵列。

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