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    • 1. 发明申请
    • Ultrasonic Sensor for Detecting and/or Scanning Objects
    • 用于检测和/或扫描物体的超声波传感器
    • US20120013222A1
    • 2012-01-19
    • US12987514
    • 2011-01-10
    • Thomas HerzogHenning Heuer
    • Thomas HerzogHenning Heuer
    • H01L41/04H01L21/30
    • G10K11/002
    • An ultrasonic sensor for detecting and/or scanning an object includes a substrate and a piezoelectric sensor unit arranged on or at this substrate and/or connected to this substrate. The rear side of the substrate facing away from the piezoelectric sensor unit has a surface structure including a plurality of elevated portions and recesses, with this surface structure being configured so that a diffuse scattering of ultrasonic waves incident on the rear side from the direction of the sensor unit takes place by it; and/or in that its elevated portions and/or recesses have a mean lateral extent in the range of 0.05 μm to 1 mm, preferably from 0.1 μm to 200 μm, preferably from 0.2 μm to 20 μm, and/or a mean lateral extent which is smaller than or equal to the wavelength of an ultrasonic wave which can be produced by the piezoelectric sensor unit.
    • 用于检测和/或扫描物体的超声波传感器包括布置在该基板上或其上的基板和压电传感器单元和/或连接到该基板。 衬底的背离压电传感器单元的后侧具有包括多个升高部分和凹部的表面结构,该表面结构被配置为使得超声波的散射从入射到 传感器单元由其进行; 和/或其高的部分和/或凹部具有0.05μm至1mm,优选为0.1μm至200μm,优选为0.2μm至20μm的平均横向范围,和/或平均横向范围 其小于或等于可由压电传感器单元产生的超声波的波长。
    • 2. 发明授权
    • Ultrasonic sensor for detecting and/or scanning objects
    • 用于检测和/或扫描物体的超声波传感器
    • US08468892B2
    • 2013-06-25
    • US12987514
    • 2011-01-10
    • Thomas HerzogHenning Heuer
    • Thomas HerzogHenning Heuer
    • G01N29/00
    • G10K11/002
    • An ultrasonic sensor for detecting and/or scanning an object includes a substrate and a piezoelectric sensor unit arranged on or at this substrate and/or connected to this substrate. The rear side of the substrate facing away from the piezoelectric sensor unit has a surface structure including a plurality of elevated portions and recesses, with this surface structure being configured so that a diffuse scattering of ultrasonic waves incident on the rear side from the direction of the sensor unit takes place by it; and/or in that its elevated portions and/or recesses have a mean lateral extent in the range of 0.05 μm to 1 mm, preferably from 0.1 μm to 200 μm, preferably from 0.2 μm to 20 μm, and/or a mean lateral extent which is smaller than or equal to the wavelength of an ultrasonic wave which can be produced by the piezoelectric sensor unit.
    • 用于检测和/或扫描物体的超声波传感器包括布置在该基板上或其上的基板和压电传感器单元和/或连接到该基板。 衬底的背离压电传感器单元的后侧具有包括多个升高部分和凹部的表面结构,该表面结构被配置为使得超声波的散射从入射到 传感器单元由其进行; 和/或其高的部分和/或凹部具有在0.05μm至1mm的范围内的平均横向范围,优选为0.1μm至200μm,优选为0.2μm至20μm的平均横向范围和/或平均横向范围 其小于或等于可由压电传感器单元产生的超声波的波长。