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1. 发明申请

US20100216669A1 Capillary-Channel Probes For Liquid Pickup, Transportation And Dispense Using Stressy Metal 有权
公开(公告)号：US20100216669A1
公开(公告)日：2010-08-26
申请号：US12775459
申请日：2010-05-06
申请人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
发明人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
IPC分类号： C40B60/14
CPC分类号： B01L3/0244 , B01J2219/00387 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , B82Y10/00 , B82Y40/00 , C40B60/14 , G01N35/1009 , G01N35/1074 , G01N2035/00237 , G01N2035/1037 , G03F7/0002
摘要： Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.

2. 发明申请

US20100213161A1 Capillary-Channel Probes For Liquid Pickup, Transportation And Dispense Using Stressy Metal 有权
标题翻译：用于液体拾取，运输和分配使用应力金属的毛细管通道探针
公开(公告)号：US20100213161A1
公开(公告)日：2010-08-26
申请号：US12775452
申请日：2010-05-06
申请人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
发明人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
IPC分类号： B44C1/22 , B32B38/10 , C23C14/34
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
摘要翻译：公开了可用于微阵列系统，浸笔纳米光刻系统，流体回路和微流体系统的流体导管，其使用包括至少一个毛细通道的通道弹簧探针。由释放时从基板弯曲的弹簧梁（例如，应力金属梁）形成，通道可以集成到弹簧梁中或形成在弹簧梁上。由窄通道产生的毛细管力允许液体被通道弹簧探针收集，保持和分配。由于可以使用传统的半导体工艺制造通道弹簧梁，所以可以实现显着的设计灵活性和成本效率。

3. 发明授权

US07749448B2 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal 有权
标题翻译：用于采用压力金属的液体拾取，运输和分配的毛细管通道探头
公开(公告)号：US07749448B2
公开(公告)日：2010-07-06
申请号：US11267762
申请日：2005-11-03
申请人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
发明人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
IPC分类号： B01L3/02
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
摘要翻译：公开了可用于微阵列系统，浸笔纳米光刻系统，流体回路和微流体系统的流体导管，其使用包括至少一个毛细通道的通道弹簧探针。由释放时从基板弯曲的弹簧梁（例如，应力金属梁）形成，通道可以集成到弹簧梁中或形成在弹簧梁上。由窄通道产生的毛细管力允许液体被通道弹簧探针收集，保持和分配。由于可以使用传统的半导体工艺制造通道弹簧梁，所以可以实现显着的设计灵活性和成本效率。

4. 发明授权

US06734425B2 Scanning probe system with spring probe and actuation/sensing structure 失效
标题翻译：具有弹簧探头和致动/感应结构的扫描探头系统
公开(公告)号：US06734425B2
公开(公告)日：2004-05-11
申请号：US10136258
申请日：2002-04-30
申请人： Thomas Hantschel , Eugene M. Chow , David K. Fork , Michel A. Rosa , Dirk De Bruyker
发明人： Thomas Hantschel , Eugene M. Chow , David K. Fork , Michel A. Rosa , Dirk De Bruyker
IPC分类号： G01B528
CPC分类号： G01Q70/10 , G01Q70/06 , G01Q70/16 , G01R1/06727 , Y10S977/873
摘要： Scanning probe systems, which include scanning probe microscopes (SPMs) are disclosed that include cantilevered spring (e.g., stressy metal) probes and actuation/position sensing electrodes formed on a substrate. The actuation electrodes are used to position the spring probe relative to the substrate using electrostatic, magnetic, acoustic, or piezoelectric arrangements. An actuation signal source is switched between full on and off states to facilitate “ON/OFF” probe actuation in which the spring probe is either fully retracted against the substrate or deployed for scan operations. The position sensing electrodes are used to sense the deflected position of the spring probe relative to the substrate using resistive, magnetic, or piezoresistive arrangements. Spring probe arrays are disclosed that include multiple spring probes arranged on a single substrate. Each spring probe of the array includes a separate actuation electrode that is controlled using “ON/OFF” or tapping probe actuation, and may include a separate position sensing electrode.
摘要翻译：公开了包括扫描探针显微镜（SPM）的扫描探针系统，其包括形成在基底上的悬臂弹簧（例如，应力金属）探针和致动/位置感测电极。致动电极用于使用静电，磁，声或压电布置相对于衬底定位弹簧探头。致动信号源在完全打开和关闭状态之间切换，以便于“ON / OFF”探头致动，其中弹簧探针完全缩回到基板上或部署用于扫描操作。位置检测电极用于使用电阻，磁阻或压阻布置来感测弹簧探针相对于基底的偏转位置。公开了包括布置在单个基板上的多个弹簧探针的弹簧探针阵列。阵列的每个弹簧探针包括使用“ON / OFF”或分接探头致动来控制的单独的致动电极，并且可以包括单独的位置感测电极。

5. 发明授权

US08241509B2 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal 有权
标题翻译：用于采用压力金属的液体拾取，运输和分配的毛细管通道探头
公开(公告)号：US08241509B2
公开(公告)日：2012-08-14
申请号：US12428397
申请日：2009-04-22
申请人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
发明人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
IPC分类号： C40B50/18
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
摘要翻译：公开了可用于微阵列系统，浸笔纳米光刻系统，流体回路和微流体系统的流体导管，其使用包括至少一个毛细通道的通道弹簧探针。由释放时从基板弯曲的弹簧梁（例如，应力金属梁）形成，通道可以集成到弹簧梁中或形成在弹簧梁上。由窄通道产生的毛细管力允许液体被通道弹簧探针收集，保持和分配。由于可以使用传统的半导体工艺制造通道弹簧梁，所以可以实现显着的设计灵活性和成本效率。

6. 发明授权

US08287744B2 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal 有权
公开(公告)号：US08287744B2
公开(公告)日：2012-10-16
申请号：US12775452
申请日：2010-05-06
申请人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
发明人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
IPC分类号： B44C1/22 , B32B38/10 , C23C14/34
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.

7. 发明授权

US08080221B2 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal 有权
标题翻译：用于采用压力金属的液体拾取，运输和分配的毛细管通道探头
公开(公告)号：US08080221B2
公开(公告)日：2011-12-20
申请号：US12775459
申请日：2010-05-06
申请人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
发明人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
IPC分类号： B01L3/00
CPC分类号： B01L3/0244 , B01J2219/00387 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , B82Y10/00 , B82Y40/00 , C40B60/14 , G01N35/1009 , G01N35/1074 , G01N2035/00237 , G01N2035/1037 , G03F7/0002
摘要： Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
摘要翻译：公开了可用于微阵列系统，浸笔纳米光刻系统，流体回路和微流体系统的流体导管，其使用包括至少一个毛细通道的通道弹簧探针。由释放时从基板弯曲的弹簧梁（例如，应力金属梁）形成，通道可以集成到弹簧梁中或形成在弹簧梁上。由窄通道产生的毛细管力允许液体被通道弹簧探针收集，保持和分配。由于可以使用传统的半导体工艺制造通道弹簧梁，所以可以实现显着的设计灵活性和成本效率。

8. 发明申请

US20090233815A1 Capillary-Channel Probes For Liquid Pickup, Transportation And Dispense Using Stressy Metal 有权
标题翻译：用于液体拾取，运输和分配使用应力金属的毛细管通道探针
公开(公告)号：US20090233815A1
公开(公告)日：2009-09-17
申请号：US12428397
申请日：2009-04-22
申请人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
发明人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
IPC分类号： C40B50/18
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
摘要翻译：公开了可用于微阵列系统，浸笔纳米光刻系统，流体回路和微流体系统的流体导管，其使用包括至少一个毛细通道的通道弹簧探针。由释放时从基板弯曲的弹簧梁（例如，应力金属梁）形成，通道可以集成到弹簧梁中或形成在弹簧梁上。由窄通道产生的毛细管力允许液体被通道弹簧探针收集，保持和分配。由于可以使用传统的半导体工艺制造通道弹簧梁，所以可以实现显着的设计灵活性和成本效率。

9. 发明授权

US07241420B2 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal 有权
标题翻译：用于采用压力金属的液体拾取，运输和分配的毛细管通道探头
公开(公告)号：US07241420B2
公开(公告)日：2007-07-10
申请号：US10213059
申请日：2002-08-05
申请人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
发明人： Thomas Hantschel , David K. Fork , Eugene M. Chow , Dirk De Bruyker , Michel A. Rosa
IPC分类号： B01L3/02
CPC分类号： G01N35/1074 , B01J2219/00387 , B01L3/0244 , B01L3/0255 , B01L3/502715 , B01L2300/0819 , B01L2400/025 , B01L2400/0406 , B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1643 , C40B60/14 , G01N35/1009 , G01N2035/00237 , G01N2035/1037 , G03F7/0002 , Y10T436/2575
摘要： Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
摘要翻译：公开了可用于微阵列系统，浸笔纳米光刻系统，流体回路和微流体系统的流体导管，其使用包括至少一个毛细通道的通道弹簧探针。由释放时从基板弯曲的弹簧梁（例如，应力金属梁）形成，通道可以集成到弹簧梁中或形成在弹簧梁上。由窄通道产生的毛细管力允许液体被通道弹簧探针收集，保持和分配。由于可以使用传统的半导体工艺制造通道弹簧梁，所以可以实现显着的设计灵活性和成本效率。

10. 发明授权

US06973722B2 Release height adjustment of stressy metal devices by annealing before and after release 有权
标题翻译：释放压力金属器件释放高度后，退火前后退火
公开(公告)号：US06973722B2
公开(公告)日：2005-12-13
申请号：US10715978
申请日：2003-11-17
申请人： Thomas Hantschel , David K. Fork , Dirk De Bruyker , Chinnwen Shih , Jeng Ping Lu , Christopher L. Chua , Raj B. Apte , Brent S. Krusor
发明人： Thomas Hantschel , David K. Fork , Dirk De Bruyker , Chinnwen Shih , Jeng Ping Lu , Christopher L. Chua , Raj B. Apte , Brent S. Krusor
IPC分类号： G01R1/067 , G01R3/00 , H05K3/40 , H01R43/16
CPC分类号： G01R1/06744 , G01R1/06727 , G01R3/00 , H05K3/4092 , Y10T29/49204 , Y10T29/49208 , Y10T29/49218 , Y10T29/49222
摘要： Spring structures are subjected to pre-release and post-release annealing to tune their tip height to match a specified target. Post-release annealing increases tip height, and pre-release annealing decreases tip height. The amount of tuning is related to the annealing temperature and/or time. Annealing schedules are determined for a pre-fabricated cache of unreleased spring structures such that finished spring structures having a variety of target heights can be economically produced by releasing/annealing the cache according to associated annealing schedules. Selective annealing is performed using lasers and heat absorbing/reflecting materials. Localized annealing is used to generate various spring structure shapes. Both stress-engineered and strain-engineered spring structures are tuned by annealing.
摘要翻译：弹簧结构经受预释放和后释放退火以调节其尖端高度以匹配指定的靶。后释放退火增加尖端高度，并且预释放退火使尖端高度降低。调谐量与退火温度和/或时间有关。对于未发布的弹簧结构的预制缓存来确定退火计划，使得可以通过根据相关联的退火计划释放/退火高速缓存来经济地产生具有各种目标高度的成品弹簧结构。使用激光和吸热/反射材料进行选择性退火。定位退火用于产生各种弹簧结构形状。应力设计和应变工程弹簧结构都通过退火进行调整。

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