专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5614742A Micromechanical accelerometer with plate-like semiconductor wafers 失效
标题翻译：具有板状半导体晶片的微机械加速度计
公开(公告)号：US5614742A
公开(公告)日：1997-03-25
申请号：US587604
申请日：1996-01-02
申请人： Thomas Gessner , Martin Hafen , Eberhard Handrich , Peter Leinfelder , Bruno Ryrko , Egbert Vetter , Maik Wiemer
发明人： Thomas Gessner , Martin Hafen , Eberhard Handrich , Peter Leinfelder , Bruno Ryrko , Egbert Vetter , Maik Wiemer
IPC分类号： G01P15/08 , G01P15/125 , H01L21/306 , H01L29/84 , H01L29/82
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0828 , Y10S148/012 , Y10S73/01
摘要： A high precision micromechanical accelerometer comprises a layered structure of five (5) semiconductor wafers insulated from one another by thin oxide layers. The accelerometer is formed by first connecting a coverplate and a baseplate to associated insulating plates. Counter-electrodes, produced by anisotropic etching from the respective insulating plates, are fixed to the coverplate and the baseplate respectively. The counter-electrodes are contactable through the cover or baseplate via contact windows. A central wafer contains a unilaterally linked mass (pendulum) that is also produced by anisotropic etching and which serves as a movable central electrode of a differential capacitor. The layered structure is hermetically sealed by semiconductor fusion bonding. A stepped gradation from the top is formed at a wafer edge region for attaching contact pads to individual wafers to permit electrical contacting of individual wafers. The invention permits fabrication of a .mu.B device characterized by extremely small leakage capacitances and high temperature stability.
摘要翻译：高精度微机械加速度计包括由半氧化物层彼此绝缘的五（5）个半导体晶片的分层结构。通过首先将盖板和底板连接到相关联的绝缘板来形成加速度计。通过各自绝缘板的各向异性蚀刻制成的对电极分别固定在盖板和底板上。相对电极可以通过接触窗口通过盖板或底板接触。中央晶片包含单向连接的质量（摆），其也通过各向异性蚀刻产生，并且用作差分电容器的可移动中心电极。层状结构通过半导体熔融粘合而密封。在晶片边缘区域形成从顶部的阶梯状梯度，用于将接触焊盘附接到单个晶片以允许单个晶片的电接触。本发明允许制造以极小的泄漏电容和高温稳定性为特征的μB器件。

2. 发明授权

US5504032A Micromechanical accelerometer and method of manufacture thereof 失效
标题翻译：微机械加速度计及其制造方法
公开(公告)号：US5504032A
公开(公告)日：1996-04-02
申请号：US224750
申请日：1994-04-07
申请人： Thomas Gessner , Martin Hafen , Eberhard Handrich , Peter Leinfelder , Bruno Ryrko , Egbert Vetter , Maik Wiemer
发明人： Thomas Gessner , Martin Hafen , Eberhard Handrich , Peter Leinfelder , Bruno Ryrko , Egbert Vetter , Maik Wiemer
IPC分类号： G01P15/08 , G01P15/125 , H01L21/306 , H01L29/84 , H01L21/76
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0828 , Y10S148/012 , Y10S73/01
摘要： A high precision micromechanical accelerometer comprises a layered structure of five (5) semiconductor wafers insulated from one another by thin semiconductor material oxide layers. The accelerometer is formed by first connecting a coverplate and a baseplate to associated insulating plates. Counter-electrodes, produced by anisotropic etching from the respective insulating plates, are fixed to the coverplate and the baseplate respectively. The counter-electrodes are contactable through the cover or baseplate via contact windows. A central wafer contains a unilaterally linked mass (pendulum) that is also produced by anisotropic etching and which serves as a movable central electrode of a differential capacitor. The layered structure is hermetically sealed by semiconductor fusion bonding. A stepped gradation from the top is formed at a wafer edge region for attaching contact pads to individual wafers to permit electrical contacting of individual wafers. The invention permits fabrication of a .mu.B device characterized by extremely small leakage capacitances and high temperature stability.
摘要翻译：一种高精度微机械加速度计包括由薄半导体材料氧化物层彼此绝缘的五（5）个半导体晶片的分层结构。通过首先将盖板和底板连接到相关联的绝缘板来形成加速度计。通过各自绝缘板的各向异性蚀刻制成的对电极分别固定在盖板和基板上。相对电极可以通过接触窗口通过盖板或底板接触。中央晶片包含单向连接的质量（摆），其也通过各向异性蚀刻产生，并且用作差分电容器的可移动中心电极。层状结构通过半导体熔融粘合而密封。在晶片边缘区域形成从顶部的阶梯状梯度，用于将接触焊盘附接到单个晶片以允许单个晶片的电接触。本发明允许制造以极小的泄漏电容和高温稳定性为特征的μB器件。

3. 发明授权

US09052196B2 Coriolis gyroscope having correction units and method for reducing the quadrature bias 有权
标题翻译：具有校正单元的科里奥利陀螺仪和减小正交偏置的方法
公开(公告)号：US09052196B2
公开(公告)日：2015-06-09
申请号：US13261385
申请日：2011-02-01
申请人： Wolfram Geiger , Peter Leinfelder
发明人： Wolfram Geiger , Peter Leinfelder
IPC分类号： G01C25/00 , G01C19/5755
CPC分类号： G01C19/5755
摘要： A Coriolis gyroscope comprises a mass system that can be excited to perform vibrations parallel to a first axis, whereby a deflection of the mass system due to a Coriolis force along a second axis perpendicular to the first axis is detectable. At least one first correction unit and at least one second correction unit, which each comprise a plurality of stationary correction electrodes and moving correction electrodes whereby the stationary correction electrodes extend in the direction of the first axis and are firmly connected to the substrate by corresponding anchor structures, and the moving correction electrodes are provided as a part of the mass system. A method for reducing the quadrature bias of a Coriolis gyroscope of this type comprises applying at least temporarily constant corrective voltages to the correction units.
摘要翻译：科里奥利陀螺仪包括可以被激发以执行平行于第一轴线的振动的质量系统，由此可以检测到沿着与第一轴线垂直的第二轴线的科里奥利力的质量系统的偏转。至少一个第一校正单元和至少一个第二校正单元，每个第二校正单元包括多个静止校正电极和移动的校正电极，由此固定校正电极沿着第一轴线的方向延伸并且通过相应的锚固件牢固地连接到衬底结构，并且移动校正电极被设置为质量系统的一部分。用于减小这种类型的科里奥利陀螺仪的正交偏置的方法包括至少将临时恒定的校正电压施加到校正单元。

4. 发明申请

US20100139399A1 ROTATION RATE SENSOR 失效
标题翻译：转速率传感器
公开(公告)号：US20100139399A1
公开(公告)日：2010-06-10
申请号：US12451998
申请日：2008-03-28
申请人： Wolfram Geiger , Peter Leinfelder , Guenter Spahlinger , Julian Bartholomeyczik
发明人： Wolfram Geiger , Peter Leinfelder , Guenter Spahlinger , Julian Bartholomeyczik
IPC分类号： G01C19/56
CPC分类号： G01C19/574
摘要： A rotation rate sensor comprises a substrate and two structures which move relative to the substrate on a design plane (x-y), with the two moving structures being coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction (x) on the design plane (x-y) as excitation mode. The coupled structure has a second oscillation mode as a detection mode which is excited by Coriolis accelerations when the first oscillation mode is excited and on rotation about a sensitive axis (z) of the rotation rate sensor. The sensitive axis is at right angles to the design plane (x-y), and the coupled structure is designed such that, subject to optimal preconditions, it does not have any oscillation mode which can be excited by linear accelerations of the rotation rate sensor in a direction parallel to the second axis.
摘要翻译：旋转速率传感器包括基板和在设计平面（xy）上相对于基板移动的两个结构，其中两个移动结构被耦合以形成耦合结构，使得耦合结构具有第一振荡模式，其具有反相偏转在设计平面（xy）上的第一方向（x）上的移动结构作为激励模式。耦合结构具有作为检测模式的第二振荡模式，当第一振荡模式被激励并围绕旋转速率传感器的敏感轴线（z）旋转时，其被科里奥利加速度激励。感光轴与设计平面（xy）成直角，耦合结构被设计成使得在最佳前提条件下，它不具有可以通过旋转速率传感器的线性加速度激发的任何振荡模式方向平行于第二轴。

5. 发明申请

US20130055787A1 CORIOLIS GYROSCOPE HAVING CORRECTION UNITS AND METHOD FOR REDUCING THE QUADRATURE BIAS 有权
标题翻译：具有校正单位的CORIOLIS GYROSCOPE和减少平衡偏差的方法
公开(公告)号：US20130055787A1
公开(公告)日：2013-03-07
申请号：US13261385
申请日：2011-02-01
申请人： Wolfram Geiger , Peter Leinfelder
发明人： Wolfram Geiger , Peter Leinfelder
IPC分类号： G01C25/00
CPC分类号： G01C19/5755
摘要： A Coriolis gyroscope comprises a mass system that can be excited to perform vibrations parallel to a first axis, whereby a deflection of the mass system due to a Coriolis force along a second axis perpendicular to the first axis is detectable. At least one first correction unit and at least one second correction unit, which each comprise a plurality of stationary correction electrodes and moving correction electrodes whereby the stationary correction electrodes extend in the direction of the first axis and are firmly connected to the substrate by corresponding anchor structures, and the moving correction electrodes are provided as a part of the mass system. A method for reducing the quadrature bias of a Coriolis gyroscope of this type comprises applying at least temporarily constant corrective voltages to the correction units.
摘要翻译：科里奥利陀螺仪包括可以被激发以执行平行于第一轴线的振动的质量系统，由此可以检测到沿着与第一轴线垂直的第二轴线的科里奥利力的质量系统的偏转。至少一个第一校正单元和至少一个第二校正单元，每个第二校正单元包括多个静止校正电极和移动的校正电极，由此固定校正电极沿着第一轴线的方向延伸并且通过相应的锚固件牢固地连接到衬底结构，并且移动校正电极被设置为质量系统的一部分。用于减小这种类型的科里奥利陀螺仪的正交偏置的方法包括至少将临时恒定的校正电压施加到校正单元。

6. 发明授权

US08365595B2 Rotation rate sensor 失效
标题翻译：转速传感器
公开(公告)号：US08365595B2
公开(公告)日：2013-02-05
申请号：US12451998
申请日：2008-03-28
申请人： Wolfram Geiger , Peter Leinfelder , Guenter Spahlinger , Julian Bartholomeyczik
发明人： Wolfram Geiger , Peter Leinfelder , Guenter Spahlinger , Julian Bartholomeyczik
IPC分类号： G01C19/56
CPC分类号： G01C19/574
摘要： A rotation rate sensor comprises a substrate and two structures which move relative to the substrate on a design plane (x-y), with the two moving structures being coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction (x) on the design plane (x-y) as excitation mode. The coupled structure has a second oscillation mode as a detection mode which is excited by Coriolis accelerations when the first oscillation mode is excited and on rotation about a sensitive axis (z) of the rotation rate sensor. The sensitive axis is at right angles to the design plane (x-y), and the coupled structure is designed such that, subject to optimal preconditions, it does not have any oscillation mode which can be excited by linear accelerations of the rotation rate sensor in a direction parallel to the second axis.
摘要翻译：旋转速率传感器包括基板和在设计平面（xy）上相对于基板移动的两个结构，其中两个移动结构被耦合以形成耦合结构，使得耦合结构具有第一振荡模式，其具有反相偏转在设计平面（xy）上的第一方向（x）上的移动结构作为激励模式。耦合结构具有作为检测模式的第二振荡模式，当第一振荡模式被激励并围绕旋转速率传感器的敏感轴线（z）旋转时，其被科里奥利加速度激励。感应轴与设计平面（xy）成直角，耦合结构被设计成使得在最佳前提条件下，它不具有可以通过旋转速率传感器的线性加速度激励的任何振荡模式方向平行于第二轴。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式