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    • 3. 发明授权
    • Displacement control actuator
    • 位移控制执行器
    • US5994821A
    • 1999-11-30
    • US978422
    • 1997-11-25
    • Katsumi ImadaTetsuro OtsuchiMasato SugimotoYoshihiro TomitaOsamu Kawasaki
    • Katsumi ImadaTetsuro OtsuchiMasato SugimotoYoshihiro TomitaOsamu Kawasaki
    • H01L41/09H01L41/04
    • H01L41/094
    • Rectangular piezoelectric substrates each of which has main surfaces opposed to each other, measures 50 .mu.m thick by 1 mm wide by 8 mm long, and is made of lithium niobate (LiNbO.sub.3), are directly bonded on the main surfaces so that their axes of polarization are set in directions reverse to each other, thereby composing a piezoelectric element. Electrodes which are 0.2 .mu.m thick and made of chromium-nickel are formed on the two main surfaces of the piezoelectric element opposed to each other, thereby resulting in a precision displacement control actuator of a bimorph type mechanical-electrical converter element. This configuration makes it possible to provide a compact precision displacement control actuator which has a large displacement and extremely small variations of characteristics such as displacement and resonance frequency.
    • 矩形压电基板各自具有彼此相对的主表面,其厚度为50μm厚×1mm×8mm长,由铌酸锂(LiNbO 3)构成,直接接合在主表面上,使得它们的轴线 极化被设置在彼此相反的方向上,从而构成压电元件。 在压电元件的两个主表面上形成厚度为0.2μm,由铬镍制成的电极,从而形成双压电晶片式机电转换元件的精密位移控制致动器。 这种构造使得可以提供一种紧凑的精确位移控制致动器,其具有大的位移和极小的位移和共振频率等特性的变化。
    • 5. 发明授权
    • Piezoelectric resonator and method for fabricating the same
    • 压电谐振器及其制造方法
    • US06243933B1
    • 2001-06-12
    • US09303682
    • 1999-05-03
    • Masato SugimotoKatsu TakedaYoshihiro TomitaOsamu Kawasaki
    • Masato SugimotoKatsu TakedaYoshihiro TomitaOsamu Kawasaki
    • H04R1700
    • H03H9/177H03H3/04H03H9/02031H03H9/0207H03H9/176Y10T29/42Y10T29/49004
    • A wafer with a reversed domain is prepared for two piezoelectric single crystal plates and of about the same thickness by using direct bonding without any adhesive. Driving electrodes are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reversed polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof and suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
    • 对于两个压电单晶板制备具有反向畴的晶片,并且通过直接接合而没有任何粘合剂制备大约相同的厚度。 在晶片的两个主平面上形成驱动电极,具有反向的畴,以提供压电谐振器。 具有反极化结构和使用基波振荡的奇数振动模式的压电谐振器具有其厚度的波长,并且抑制具有反向偏振的畴的厚度的散射。 在直接接合中,两个压电单晶板的自发极化的轴线彼此相反,并且除偏振轴之外的结晶轴有意地以不同于零的角度移动。 因此,以简单的方式抑制杂散模式。
    • 10. 发明授权
    • Flow sensor and mass flow controller using the same
    • 流量传感器和质量流量控制器使用相同
    • US07591177B2
    • 2009-09-22
    • US12368599
    • 2009-02-10
    • Masato SugimotoAkifumi Hayashi
    • Masato SugimotoAkifumi Hayashi
    • G01F1/68
    • G01F1/6847G01F5/00G05D7/0635
    • A low cost, compact, high performance flow sensor that can be made small in size even for use in a large flow rate and a mass flow controller using the same are provided. The flow sensor includes a bypass passage, a sensor passage, and a bridge circuit including heat-generating resistance wires that constitute a part of the bridge circuit and are wound around the sensor passage. The flow sensor determines a total flow rate of a fluid that flows in a branched manner through the bypass passage and the sensor passage at a predetermined flow ratio. The total flow rate is determined by detecting, as an unbalance of the bridge circuit, heat transfer caused by the fluid flowing through the sensor passage and is outputted as a sensor output of the flow sensor. In the flow sensor, the bypass passage includes a plurality of fine flow passages each having a cross-section defined by a substantially linear edge and a curve in contact with the substantially linear edge. The ratio of the equivalent hydraulic diameter (d) of the fine flow passages to the common logarithm of the length (T) of the fine flow passages is 0.27 or less. The flow sensor is installed in the mass flow controller.
    • 提供了一种低成本,紧凑,高性能的流量传感器,其可以在大流量下使用而尺寸较小,并且使用该流量传感器的质量流量控制器。 流量传感器包括旁通通道,传感器通道和包括构成桥接电路的一部分并且缠绕在传感器通道上的发热电阻线的桥接电路。 流量传感器以预定的流量比确定以分支方式流过旁通通道和传感器通道的流体的总流量。 通过检测由流经传感器通道的流体引起的热传递作为流量传感器的传感器输出而输出作为桥接电路的不平衡来确定总流量。 在流量传感器中,旁路通道包括多个细流动通道,每个细流动通道具有由基本线性的边缘限定的横截面和与基本线性边缘接触的曲线。 细流动通道的等效水力直径(d)与细流动通道的长度(T)的常用对数之比为0.27以下。 流量传感器安装在质量流量控制器中。