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    • 5. 发明授权
    • Process for forming an output circuit device for a charge transfer
element having tripartite diffusion layer
    • 用于形成具有三方扩散层的电荷转移元件的输出电路器件的工艺
    • US5569616A
    • 1996-10-29
    • US446251
    • 1995-05-22
    • Hiroaki OhkiOsamu NishimaHiroyuki MoriJunya Suzuki
    • Hiroaki OhkiOsamu NishimaHiroyuki MoriJunya Suzuki
    • H01L21/8234H01L29/08H01L29/768H01L21/265H01L21/22
    • H01L29/0847H01L21/823406H01L29/76816
    • An output circuit device for detecting and converting signal charge transferred thereto from a charge transfer section of a CCD into a signal voltage and a method of forming same. A first diffusion region is formed by diffusing into the semiconductor body a low concentration of an impurity having a conduction type opposite to that of said semiconductor body and having a high diffusion coefficient. A second diffusion region is formed by diffusing into an upper surface portion of the first diffusion region, and in self-alignment therewith, a high concentration of an impurity having a low diffusion coefficient. A third diffusion region is formed by diffusing into the first and second diffusion regions, and in self-alignment therewith, a high concentration of an impurity having a high diffusion coefficient, such that the third diffusion region extends from a surface of said semiconductor body through said first and second diffusion regions to beneath the first diffusion region. A wiring line is formed on the semiconductor body such that the first, second and third diffusion regions lie beneath the wiring line. The high and low diffusion coefficients are high and low relative to one another, and the high and low concentrations are high and low relative to one another.
    • 一种输出电路装置,用于检测和转换从CCD的电荷转移部分传送到其的信号电荷为信号电压,以及形成信号电压的方法。 第一扩散区域通过向半导体体内扩散低浓度的具有与所述半导体本体相反的导电类型并具有高扩散系数的杂质形成。 第二扩散区域通过扩散到第一扩散区域的上表面部分中并与其自对准形成,具有高浓度的扩散系数低的杂质。 第三扩散区域通过扩散到第一和第二扩散区域中,并且与其自身对准,具有高浓度的具有高扩散系数的杂质,使得第三扩散区域从所述半导体主体的表面延伸通过 所述第一和第二扩散区域到所述第一扩散区域的下方。 在半导体本体上形成布线,使得第一,第二和第三扩散区域位于布线下方。 高扩散系数和低扩散系数相对于彼此高和低,并且高和低浓度相对于彼此高和低。