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    • 1. 发明授权
    • Semiconductor device and manufacturing method of the same
    • 半导体器件及其制造方法相同
    • US07652321B2
    • 2010-01-26
    • US11072632
    • 2005-03-07
    • Tetsuji YamaguchiKiyoshi Kato
    • Tetsuji YamaguchiKiyoshi Kato
    • H01L29/72
    • H01L21/84H01L27/11526H01L27/11546H01L27/1203
    • In a process of manufacturing elements of different structures and characteristics on the same substrate at the same time, the number of steps is increased and complicated. In view of this, the invention provides a semiconductor device and a manufacturing process thereof in which elements of different structures are formed on the same substrate while reducing the number of steps. According to the invention, in accordance with a memory transistor that requires the largest number of steps when being formed among elements that forms a semiconductor memory device, other high speed transistor and high voltage transistor are efficiently manufactured. Thus, the number of steps is suppressed and a low cost semiconductor memory device can be manufactured.
    • 在同一基板上同时制造不同结构和特性的元件的过程中,台阶增加复杂。 鉴于此,本发明提供了一种半导体器件及其制造方法,其中不同结构的元件形成在同一衬底上,同时减少了步骤数。 根据本发明,根据在形成半导体存储器件的元件之间形成最大数量的步骤的存储晶体管时,有效地制造其它高速晶体管和高压晶体管。 因此,抑制了步数,并且可以制造低成本的半导体存储器件。
    • 9. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08896046B2
    • 2014-11-25
    • US13285450
    • 2011-10-31
    • Kiyoshi Kato
    • Kiyoshi Kato
    • H01L27/108H01L27/105H01L27/115H01L27/06H01L27/12
    • H01L27/108H01L27/0688H01L27/105H01L27/11551H01L27/1156H01L27/1225H01L27/124H01L29/7869
    • Provided is a semiconductor device with a novel structure in which stored data can be retained even when power is not supplied, and which does not have a limitation on the number of writing. The semiconductor device includes both a memory circuit including a transistor including an oxide semiconductor (in a broader sense, a transistor whose off-state current is sufficiently small), and a peripheral circuit such as a driver circuit including a transistor including a material other than an oxide semiconductor (that is, a transistor capable of operating at sufficiently high speed). Further, the peripheral circuit is provided in a lower portion and the memory circuit is provided in an upper portion, so that the area and size of the semiconductor device can be decreased.
    • 提供一种具有新颖结构的半导体器件,其中即使在未提供电力的情况下也可以保留存储的数据,并且对写入次数没有限制。 半导体器件包括包括氧化物半导体(在更广泛的意义上是截止电流足够小的晶体管)的晶体管的存储器电路和包括晶体管的诸如驱动器电路的外围电路,该晶体管包括除了 氧化物半导体(即,能够以足够高的速度运行的晶体管)。 此外,外围电路设置在下部,并且存储电路设置在上部,使得可以减小半导体器件的面积和尺寸。