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    • 2. 发明申请
    • METHOD FOR MODIFYING THE IMPEDANCE OF SEMICONDUCTOR DEVICES USING A FOCUSED HEATING SOURCE
    • 使用聚焦加热源修改半导体器件阻抗的方法
    • WO2004017409A1
    • 2004-02-26
    • PCT/CA2003/001199
    • 2003-08-08
    • TECHNOLOGIES LTRIM INC.
    • LACOURSE, AlainLANGLOIS, HuguesSAVARIA, YvonGAGNON, Yves
    • H01L27/08
    • H01L28/20H01C17/26H01L21/268H01L21/324H01L21/76894H01L27/0802H01L29/66166
    • A method is provided for tuning (i.e. modifying, changing) the impedance of semiconductor components or devices using a focused heating source. The method may be exploited for finely tuning the impedance of semiconductor components or devices, by modifying the dopant profile of a region of low dopant concentration (i.e. increasing the dopant concentration) by diffusion of dopants from adjacent regions of higher dopant concentration through the melting action of a focused heating source, for example a laser. The present invention is in particular directed to the use of lasers in relation to circuits for the creation of conductive links and pathways where none existed before. The present invention more particularly relates to a means wherein impedance modification (i.e. trimming or tuning) may advantageously be carried out as a function of the location of one or more conductive bridge(s) along the length of a gap region.
    • 提供了一种用于使用聚焦加热源来调谐(即修改,改变)半导体部件或器件的阻抗的方法。 该方法可用于微调半导体组件或器件的阻抗,通过通过掺杂剂从较高掺杂剂浓度的相邻区域扩散通过熔融作用来改变掺杂剂浓度低的区域的掺杂剂分布(即增加掺杂剂浓度) 的聚焦加热源,例如激光。 本发明特别涉及激光器相对于用于创建之前不存在的导电链路和路径的电路的使用。 本发明更具体地涉及一种其中阻抗修改(即修整或调谐)可以有利地作为沿着间隙区域的长度的一个或多个导电桥的位置的函数来执行的装置。