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1. 发明申请

US20120132803A1 CHARGED PARTICLE BEAM DEVICE AND IMAGE DISPLAY METHOD 审中-公开
标题翻译：充电颗粒光束装置和图像显示方法
公开(公告)号：US20120132803A1
公开(公告)日：2012-05-31
申请号：US13389285
申请日：2010-07-20
申请人： Tatsuya Hirato , Hiroyuki Komuro , Shigeru Kawamata
发明人： Tatsuya Hirato , Hiroyuki Komuro , Shigeru Kawamata
IPC分类号： H01J29/70
CPC分类号： H01J37/28 , A61B6/022 , G02B27/2207 , G02B27/2214 , H01J37/1478 , H01J37/153 , H01J2237/2611
摘要： According to the present invention, in a charged particle beam device having a charged particle source, an objective lens for focusing a primary-charged particle beam emitted from the charged particle source, a scan deflector for scanning the primary-charged particle beam on a sample, and a detector for detecting signal particles generated from the sample under scanning of the primary-charged particle beam, whereby a sample image is obtained by using the signal particles of the detector, the charged particle beam device comprises a deflector for deflecting an angle of irradiation of the primary-charged particle beam onto the sample, first and second independent power supplies for passing currents to the deflector, and a switch for switching over voltages applied from the two power supplies in unit of one line or one frame of scanning of the primary-charged particle beam.
摘要翻译：根据本发明，在具有带电粒子源的带电粒子束装置中，用于聚焦从带电粒子源发射的初级带电粒子束的物镜，用于将样品上的初级带电粒子束扫描的扫描偏转器以及检测器，用于检测在一次带电粒子束的扫描下从样品产生的信号颗粒，由此通过使用检测器的信号粒子获得样品图像，带电粒子束装置包括用于偏转角度的偏转器将初级带电粒子束照射到样品上，用于将电流传递到偏转器的第一和第二独立电源，以及用于切换从两个电源施加的电压的开关，其中以一行或一帧扫描为单位初级带电粒子束。

2. 发明申请

US20130278745A1 CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING DETECTED SIGNAL THEREOF 有权
标题翻译：充电颗粒光束装置及其检测信号的校正方法
公开(公告)号：US20130278745A1
公开(公告)日：2013-10-24
申请号：US13993797
申请日：2011-12-22
申请人： Masato Kamio , Masashi Watanabe , Yoshinobu Hoshino , Shigeru Kawamata
发明人： Masato Kamio , Masashi Watanabe , Yoshinobu Hoshino , Shigeru Kawamata
IPC分类号： H04N5/217
CPC分类号： H04N5/217 , H01J37/244 , H01J37/28 , H01J2237/24495 , H01J2237/24592
摘要： A charged particle beam device of the present invention has a signal processing function of acquiring a secondary signal obtained when a charged particle beam is caused to scan at a low speed not subjected to a band limitation of an electrical signal path, and a secondary signal obtained when a charged particle beam is caused to scan at a high speed subjected to the band limitation of the electrical signal path, calculating a degradation function (H−1(s)) between the plurality of secondary signals, and using an inverse function thereof as a correction filter; and a function of updating a parameter of the correction filter to an optimal value as needed or at given timing. Accordingly, the charged particle beam device can perform optimum image restoration even when a detector or an amplifier circuit that constitutes the electrical signal path degrades with time.
摘要翻译：本发明的带电粒子束装置具有获取当使带电粒子束以不受电信号路径的频带限制的低速扫描时获得的二次信号的信号处理功能，并且获得二次信号当使带电粒子束以受到电信号路径的频带限制的高速扫描时，计算多个二次信号之间的劣化函数（H-1（s）），并使用其反函数作为校正滤波器; 以及根据需要或在给定的定时将校正滤波器的参数更新为最佳值的功能。因此，即使当构成电信号路径的检测器或放大器电路随时间劣化时，带电粒子束装置也能够进行最佳的图像恢复。

3. 发明授权

US5523567A Scanning electron microscope and image forming method therewith 失效
标题翻译：扫描电子显微镜及其成像方法
公开(公告)号：US5523567A
公开(公告)日：1996-06-04
申请号：US330458
申请日：1994-10-28
申请人： Shigeru Kawamata , Susumu Ozasa
发明人： Shigeru Kawamata , Susumu Ozasa
IPC分类号： H01J37/22 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/221 , H01J2237/2803
摘要： In an electron microscope for observing an image of a sample using secondary electrons emitted from the sample by two-dimensionally scanning an electron beam on the sample, a low magnification and wide view image of the sample is formed on one frame memory. The frame memory for storing on picture of the image is divided into an appropriate number of areas. The image data of the sample, obtained by consecutively moving the sample to the sample areas, is stored to the corresponding areas of the frame memory.
摘要翻译：在通过二次扫描样品上的电子束从样品发射的二次电子观察样品的图像的电子显微镜中，在一个帧存储器上形成样品的低倍率和宽视野图像。用于存储图像的图像的帧存储器被划分为适当数量的区域。通过将样本连续移动到采样区域获得的样本的图像数据被存储到帧存储器的对应区域。

4. 发明授权

US08947520B2 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：US08947520B2
公开(公告)日：2015-02-03
申请号：US13145955
申请日：2010-01-19
申请人： Yoshinobu Hoshino , Shigeru Kawamata
发明人： Yoshinobu Hoshino , Shigeru Kawamata
IPC分类号： H04N9/47 , H04N7/18 , H01J37/26 , H01J37/244
CPC分类号： H01J37/26 , H01J37/244
摘要： An electron microscope according to the present invention includes: a backscattered electron detector provided with a backscattered electron detecting element (9); a low-vacuum secondary electron detector provided with a bias electrode (11) and a specimen stage (12); and a signal switch (14) that switches signals detected by the detectors. Optimal observation conditions are stored in an observation condition memory (20) for each of the detectors. A CPU (19) calls observation conditions stored in the observation condition memory (20) on the basis of the switching of the detectors, and sets conditions of the electron microscope to the called observation conditions. An image processing device (22) converts a plurality of the detected signals obtained on the basis of the switching of the detectors into two-dimensional image signals and evaluates the qualities of images of the two-dimensional image signals. In an image quality prioritized mode, the CPU (19) selects a detector causing an evaluated value to be highest on the basis of the results of the evaluation performed by the image processing device (22) and causes an image to be displayed. In the electron microscope that includes the plurality of detectors, a detector can easily be selected, and the optimal observation conditions for the detectors can easily be set.
摘要翻译：根据本发明的电子显微镜包括：背散射电子检测器，其设置有背散射电子检测元件（9）; 设置有偏置电极（11）和样品台（12）的低真空二次电子检测器; 以及切换由检测器检测到的信号的信号开关（14）。最佳观察条件存储在用于每个检测器的观察条件存储器（20）中。 CPU（19）基于检测器的切换来调用存储在观察条件存储器（20）中的观察条件，并将电子显微镜的条件设定为所述观察条件。图像处理装置（22）将基于检测器的切换获得的多个检测信号转换为二维图像信号，并评估二维图像信号的图像质量。在图像质量优先模式中，CPU（19）基于由图像处理装置（22）进行的评估结果，选择使评估值最高的检测器，并使图像显示。在包括多个检测器的电子显微镜中，可以容易地选择检测器，并且可以容易地设置检测器的最佳观察条件。

5. 发明授权

US08848049B2 Charged particle beam device and method for correcting detected signal thereof 有权
标题翻译：带电粒子束装置及其检测信号的校正方法
公开(公告)号：US08848049B2
公开(公告)日：2014-09-30
申请号：US13993797
申请日：2011-12-22
申请人： Masato Kamio , Masashi Watanabe , Yoshinobu Hoshino , Shigeru Kawamata
发明人： Masato Kamio , Masashi Watanabe , Yoshinobu Hoshino , Shigeru Kawamata
IPC分类号： H04N11/02 , H04N5/217 , H01J37/28 , H01J37/244
CPC分类号： H04N5/217 , H01J37/244 , H01J37/28 , H01J2237/24495 , H01J2237/24592
摘要： A charged particle beam device of the present invention has a signal processing function of acquiring a secondary signal obtained when a charged particle beam is caused to scan at a low speed not subjected to a band limitation of an electrical signal path, and a secondary signal obtained when a charged particle beam is caused to scan at a high speed subjected to the band limitation of the electrical signal path, calculating a degradation function (H−1(s)) between the plurality of secondary signals, and using an inverse function thereof as a correction filter; and a function of updating a parameter of the correction filter to an optimal value as needed or at given timing. Accordingly, the charged particle beam device can perform optimum image restoration even when a detector or an amplifier circuit that constitutes the electrical signal path degrades with time.
摘要翻译：本发明的带电粒子束装置具有获取当使带电粒子束以不受电信号路径的频带限制的低速扫描时获得的二次信号的信号处理功能，并且获得二次信号当使带电粒子束以受到电信号路径的频带限制的高速扫描时，计算多个二次信号之间的劣化函数（H-1（s）），并使用其反函数作为校正滤波器; 以及根据需要或在给定的定时将校正滤波器的参数更新为最佳值的功能。因此，即使当构成电信号路径的检测器或放大器电路随时间劣化时，带电粒子束装置也可以执行最佳的图像恢复。

6. 发明授权

US07705304B2 Scanning electron microscope and three-dimensional shape measuring device that used it 有权
标题翻译：扫描电子显微镜和使用它的三维形状测量装置
公开(公告)号：US07705304B2
公开(公告)日：2010-04-27
申请号：US12120053
申请日：2008-05-13
申请人： Shigeru Kawamata , Yoshinobu Hoshino , Asako Kaneko
发明人： Shigeru Kawamata , Yoshinobu Hoshino , Asako Kaneko
IPC分类号： H01J49/40
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/22 , H01J2237/24465 , H01J2237/24578
摘要： In three-dimensional shape measurement, a backscattered electron detection signal and selection signal generator in a control section controls, by selection signal, a signal switching section and a frame memory so that: detection signals from respective semiconductor elements are sequentially switched in the signal switching section in synchronization with a scanning frame of an electron beam on a sample; and the detection signals from the respective semiconductor elements can be sequentially recorded in recording addresses in the frame memory which correspond to the respective semiconductor elements. After four electron beam scanning sessions, each image data for three-dimensional shape measurement is recorded in the frame memory, and processed in a computing processing section for three-dimensional shape measurement, and the result can be displayed in a display section. The backscattered electron detection signal and selection signal generator in the control section is configured to include, for example, a counter updated in frame scanning units, and can be composed of a very simple circuit or software.
摘要翻译：在三维形状测量中，控制部分中的反向散射电子检测信号和选择信号发生器通过选择信号控制信号切换部分和帧存储器，使得：来自各个半导体元件的检测信号在信号切换与样品上的电子束的扫描帧同步; 并且来自各个半导体元件的检测信号可以被顺序记录在对应于各个半导体元件的帧存储器中的记录地址中。在四个电子束扫描会话之后，将用于三维形状测量的每个图像数据记录在帧存储器中，并在用于三维形状测量的计算处理部分中进行处理，并且可以将结果显示在显示部分中。控制部中的背散射电子检测信号和选择信号发生器被配置为包括例如以帧扫描单位更新的计数器，并且可以由非常简单的电路或软件组成。

7. 发明授权

US09099283B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US09099283B2
公开(公告)日：2015-08-04
申请号：US13577833
申请日：2010-11-08
申请人： Yoshinobu Hoshino , Shigeru Kawamata , Eisaku Oho
发明人： Yoshinobu Hoshino , Shigeru Kawamata , Eisaku Oho
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/223 , H01J2237/24495 , H01J2237/2809
摘要： A signal processing unit (21) of a charged particle microscope calculates a degradation function (H (s)) of an image, on the basis of detection signals (11) obtained by scanning a charged particle beam (2) at two types of scanning speeds, a scanning speed within the bandwidths of a detector (12) and an amplifying circuit at a subsequent stage of the detector, and another scanning speed exceeding the upper limit of the bandwidths. Then, the signal processing unit creates a one-dimensional correction filter for recovering image quality, from an inverse function (H−1 (s)) of the degradation function, and applies the one-dimensional correction filter to the detection signal recorded at the scanning speed exceeding the upper limit of the bandwidths of the detector and the amplifying circuit at a subsequent stage of the detector, or to a two-dimensional image based on the detection signal.
摘要翻译：带电粒子显微镜的信号处理单元（21）基于通过以两种扫描方式扫描带电粒子束（2）而获得的检测信号（11）来计算图像的劣化函数（H（s））速度，检测器（12）的带宽内的扫描速度和检测器的后续级的放大电路，以及超过带宽上限的另一扫描速度。然后，信号处理单元从劣化函数的逆函数（H-1（s））创建用于恢复图像质量的一维校正滤波器，并将一维校正滤波器应用于记录在扫描速度超过检测器的后续阶段的检测器和放大电路的带宽的上限，或者基于检测信号到二维图像。

8. 发明申请

US20120307038A1 CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：充电颗粒光束装置
公开(公告)号：US20120307038A1
公开(公告)日：2012-12-06
申请号：US13577833
申请日：2010-11-08
申请人： Yoshinobu Hoshino , Shigeru Kawamata , Eisaku Oho
发明人： Yoshinobu Hoshino , Shigeru Kawamata , Eisaku Oho
IPC分类号： H04N7/18
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/223 , H01J2237/24495 , H01J2237/2809
摘要： A signal processing unit (21) of a charged particle microscope calculates a degradation function (H (s)) of an image, on the basis of detection signals (11) obtained by scanning a charged particle beam (2) at two types of scanning speeds, a scanning speed within the bandwidths of a detector (12) and an amplifying circuit at a subsequent stage of the detector, and another scanning speed exceeding the upper limit of the bandwidths. Then, the signal processing unit creates a one-dimensional correction filter for recovering image quality, from an inverse function (H−1 (s)) of the degradation function, and applies the one-dimensional correction filter to the detection signal recorded at the scanning speed exceeding the upper limit of the bandwidths of the detector and the amplifying circuit at a subsequent stage of the detector, or to a two-dimensional image based on the detection signal.
摘要翻译：带电粒子显微镜的信号处理单元（21）基于通过以两种扫描方式扫描带电粒子束（2）而获得的检测信号（11）来计算图像的劣化函数（H（s））速度，检测器（12）的带宽内的扫描速度和检测器的后续级的放大电路，以及超过带宽上限的另一扫描速度。然后，信号处理单元从劣化函数的逆函数（H-1（s））创建用于恢复图像质量的一维校正滤波器，并将一维校正滤波器应用于记录在扫描速度超过检测器的后续阶段的检测器和放大电路的带宽的上限，或者基于检测信号到二维图像。

9. 发明授权

US08143573B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US08143573B2
公开(公告)日：2012-03-27
申请号：US12490775
申请日：2009-06-24
申请人： Sukehiro Ito , Junichi Katane , Shigeru Kawamata , Shinichi Tomita
发明人： Sukehiro Ito , Junichi Katane , Shigeru Kawamata , Shinichi Tomita
IPC分类号： G02F1/1335 , G01K1/08
CPC分类号： H01J37/1478 , H01J37/153 , H01J37/265 , H01J37/28 , H01J2237/2611
摘要： A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.
摘要翻译：照射在试样上的带电粒子束被设定为具有对应于副视角的左右倾斜角。提供了一种控制单元，其在垂直于每个扫描线上的光束上交替地向左侧倾斜和对准视角的右侧倾斜扫描样本上的光束。以这种方式，获取图像。通过将像差消除装置与根据近视角的光束的控制组合来实时显示分辨率的劣化被抑制的三维图像。像差消除装置使用具有多级透镜的光学系统，通过利用透镜的作用将光束偏转回光轴来提供像差的整体消除。

10. 发明申请

US20120019648A1 ELECTRON MICROSCOPE 有权
标题翻译：电子显微镜
公开(公告)号：US20120019648A1
公开(公告)日：2012-01-26
申请号：US13145955
申请日：2010-01-19
申请人： Yoshinobu Hoshino , Shigeru Kawamata
发明人： Yoshinobu Hoshino , Shigeru Kawamata
IPC分类号： H04N7/18 , H01J37/26
CPC分类号： H01J37/26 , H01J37/244
摘要： An electron microscope according to the present invention includes: a backscattered electron detector provided with a backscattered electron detecting element (9); a low-vacuum secondary electron detector provided with a bias electrode (11) and a specimen stage (12); and a signal switch (14) that switches signals detected by the detectors. Optimal observation conditions are stored in an observation condition memory (20) for each of the detectors. A CPU (19) calls observation conditions stored in the observation condition memory (20) on the basis of the switching of the detectors, and sets conditions of the electron microscope to the called observation conditions. An image processing device (22) converts a plurality of the detected signals obtained on the basis of the switching of the detectors into two-dimensional image signals and evaluates the qualities of images of the two-dimensional image signals. In an image quality prioritized mode, the CPU (19) selects a detector causing an evaluated value to be highest on the basis of the results of the evaluation performed by the image processing device (22) and causes an image to be displayed. In the electron microscope that includes the plurality of detectors, a detector can easily be selected, and the optimal observation conditions for the detectors can easily be set.
摘要翻译：根据本发明的电子显微镜包括：背散射电子检测器，其设置有背散射电子检测元件（9）; 设置有偏置电极（11）和样品台（12）的低真空二次电子检测器; 以及切换由检测器检测到的信号的信号开关（14）。最佳观察条件存储在用于每个检测器的观察条件存储器（20）中。 CPU（19）基于检测器的切换来调用存储在观察条件存储器（20）中的观察条件，并将电子显微镜的条件设定为所述观察条件。图像处理装置（22）将基于检测器的切换获得的多个检测信号转换为二维图像信号，并评估二维图像信号的图像质量。在图像质量优先模式中，CPU（19）基于由图像处理装置（22）进行的评估结果，选择使评估值最高的检测器，并使图像显示。在包括多个检测器的电子显微镜中，可以容易地选择检测器，并且可以容易地设置检测器的最佳观察条件。

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