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    • 8. 发明申请
    • SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    • 半导体器件及其制造方法
    • US20100187534A1
    • 2010-07-29
    • US12752388
    • 2010-04-01
    • Kazuo NISHIJunya MARUYAMANaoto KUSUMOTOYuusuke SUGAWARA
    • Kazuo NISHIJunya MARUYAMANaoto KUSUMOTOYuusuke SUGAWARA
    • H01L27/146
    • H01L27/14665H01L27/14632H01L27/14634H01L27/14636H01L27/1469H01L27/14692
    • An object of the present invention to provide a semiconductor device manufactured in short time by performing the step of forming the thin film transistor and the step of forming the photoelectric conversion layer in parallel, and to provide a manufacturing process thereof. According to the present invention, a semiconductor device is manufactured in such a way that a thin film transistor is formed over a first substrate, a photoelectric conversion element is formed over a second substrate, and the thin film transistor and the photoelectric conversion element are connected electrically by sandwiching a conductive layer between the first and second substrates opposed to each other so that the thin film transistor and the photoelectric conversion element are located between the first and second substrates. Thus, a method for manufacturing a semiconductor device which suppresses the increase in the number of steps and which increases the throughput can be provided.
    • 本发明的目的在于提供一种通过进行薄膜晶体管的形成工序和并联形成光电转换层的工序,在短时间内制造的半导体器件,并提供其制造工艺。 根据本发明,制造半导体器件,使得在第一衬底上形成薄膜晶体管,在第二衬底上形成光电转换元件,并且连接薄膜晶体管和光电转换元件 通过将导电层夹在彼此相对的第一和第二基板之间,使得薄膜晶体管和光电转换元件位于第一和第二基板之间。 因此,可以提供一种制造半导体器件的方法,该方法抑制步骤数量的增加并增加通过量。