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1. 发明授权

US07173445B2 Sensor for inspection instrument and inspection instrument 失效
标题翻译：检测仪器和检验仪器传感器
公开(公告)号：US07173445B2
公开(公告)日：2007-02-06
申请号：US10487828
申请日：2002-08-27
申请人： Tatsuhisa Fujii , Kazuhiro Monden , Mikiya Kasai , Shogo Ishioka , Shuji Yamaoka
发明人： Tatsuhisa Fujii , Kazuhiro Monden , Mikiya Kasai , Shogo Ishioka , Shuji Yamaoka
IPC分类号： G01R31/00 , G01R31/28
CPC分类号： G01R31/312
摘要： Disclosed is an inspection sensor and inspection apparatus capable of accurately inspecting the shape of a conductive pattern. A sensor element 12a includes an MOSFET, and an aluminum electrode (AL) serving as a passive element 80. The passive element or aluminum electrode 80 is connected to the gate of a MOSFET 81 and the source of a MOSFET 82. A voltage VDD is supplied from a power supply circuit 18 to the drain of the MOSFET 81, and the source of the MOSFET 81 is connected to the drain of a MOSFET 83. A reset signal is entered from a vertical selection section 14 into the gate of the MOSFET 82, and the voltage VDD is supplied from the power supply circuit 18 to the drain of the MOSFET 82. A selection signal is entered from the vertical selection section 14 into the gate of the MOSFET 83, and an output from the source of the MOSFET 83 is entered into a lateral selection section 13.
摘要翻译：公开了能够精确地检查导电图案的形状的检查传感器和检查装置。传感器元件12a包括MOSFET和用作无源元件80的铝电极（AL）。无源元件或铝电极80连接到MOSFET81的栅极和MOSFET82的源极。电压VDD从电源电路18提供给MOSFET 81的漏极，MOSFET81的源极连接到MOSFET 83的漏极。复位信号从垂直选择部分14进入到MOSFET82的栅极，并且电压VDD从电源电路18提供给MOSFET82的漏极。选择信号从垂直选择部分14进入到MOSFET 83的栅极，并且来自MOSFET 83的源极的输出进入横向选择部分13。

2. 发明授权

US06992493B2 Device and method for substrate displacement detection 失效
标题翻译：基板位移检测装置及方法
公开(公告)号：US06992493B2
公开(公告)日：2006-01-31
申请号：US10478496
申请日：2002-05-23
申请人： Shuji Yamaoka , Shogo Ishioka
发明人： Shuji Yamaoka , Shogo Ishioka
IPC分类号： G01R27/26
CPC分类号： G01B7/003
摘要： Disclosed is an apparatus and method for detecting positional displacement of a board. A board 20 having a surface formed with a conductive pattern 25 is transferred in a direction A while supplying an AC signal from a power supply section 3 to the surface of the board. The level of positional displacement of the board is detected in accordance with the transfer speed of the board and the difference between the timings of the intermediate signal levels generated when the AC signal is sensed by a pair of position sensors 1, 2 opposed to the leading edge of the board. The present invention allows positional displacement of the board to be detected in a simple non-contact structure while maintaining a high degree of accuracy without variation over time.
摘要翻译：公开了一种用于检测板的位置偏移的装置和方法。具有形成有导电图案25的表面的板20沿着方向A传送，同时从电源部3向板的表面提供AC信号。根据电路板的传送速度来检测电路板的位置偏移水平，并且当由与一个位置传感器1,2对置的一对位置传感器1,2感测到AC信号时产生的中间信号电平的定时之间的差异边缘的板子。本发明允许在简单的非接触结构中进行待检测的板的位置位移，同时保持高精度而不随时间变化。

3. 发明授权

US06943559B2 Circuit pattern inspection device, circuit pattern inspection method, and recording medium 失效
标题翻译：电路图案检查装置，电路图案检查方法和记录介质
公开(公告)号：US06943559B2
公开(公告)日：2005-09-13
申请号：US10480106
申请日：2002-06-06
申请人： Shuji Yamaoka , Shogo Ishioka
发明人： Shuji Yamaoka , Shogo Ishioka
IPC分类号： G01R31/02 , G01R31/304 , G01R31/312 , H05K3/00 , H01H31/02 , G01R27/26
CPC分类号： G01R31/304 , G01R31/312
摘要： Disclosed is an circuit-pattern inspection apparatus comprising a power supply element 30 adapted to be capacitively coupled with a parallel array of conductive patterns 20 to supply an inspection signal to one end of each of the conductible patterns, an open sensor 40 adapted to be capacitively coupled with all of the other ends of the conductive patterns to detect the inspection signal, and a short sensor 50 arranged at a position displaced from the power supply element 30 and adapted to be capacitively coupled with two lines of the conductive patterns to detect the inspection signal. The quality of the conductive pattern is inspected such that the presence of disconnection is determined when the detect signal from the open sensor 40 is largely reduced, and the presence of short is determined when the detect signal from the short sensor 50 largely rises and then falls. The circuit-pattern inspection apparatus can detect defects in a circuit board reliably and readily.
摘要翻译：公开了一种电路图案检查装置，其包括电源元件30，电源元件30适于与导电图案20的并行阵列电容耦合，以向每个可导电图案的一端提供检查信号，开放式传感器40适于电容化与传导图案的所有另一端耦合以检测检查信号;以及短传感器50，布置在从电源元件30偏离的位置处，并适于与两条导电图案电容耦合以检测检查信号。检查导电图案的质量，使得当来自开路传感器40的检测信号被大大减小时确定断开的存在，并且当来自短传感器50的检测信号大大上升然后下降时确定短路的存在。电路图案检查装置可以可靠且容易地检测电路板中的缺陷。

4. 发明授权

US06710607B2 Method and apparatus for inspection 失效
标题翻译：检查方法和装置
公开(公告)号：US06710607B2
公开(公告)日：2004-03-23
申请号：US09926606
申请日：2001-11-26
申请人： Tatuhisa Fujii , Shogo Ishioka , Shuji Yamaoka
发明人： Tatuhisa Fujii , Shogo Ishioka , Shuji Yamaoka
IPC分类号： G01R3102
CPC分类号： G01R31/302 , G01R31/304 , G01R31/312
摘要： The present invention provides an inspection apparatus and method capable of intuitively obtaining inspection results of circuit wirings. An inspection system 20 comprises a sensor chip 1 including plural sensor elements, a computer 21, probes 22 for supplying an inspection signal to circuit wirings 101, and a selector 23 for switching the supply of the inspection signal to the probes 22. The computer 21 receives the detected signals from the sensor chip 1, and generates an image data to display an image of the circuit wirings as an inspection subject on a display 21a. This make it possible to check the shape of the specific circuit wiring and to detect defects such as disconnection, short-circuit, and chipping in the circuit wiring 101 based on the generated image data and the design image data representing the design circuit wiring.
摘要翻译：本发明提供一种能够直观地获得电路布线的检查结果的检查装置和方法。检查系统20包括传感器芯片1，其包括多个传感器元件，计算机21，用于向电路布线101提供检查信号的探针22以及用于切换向检测器22提供检查信号的选择器23.计算机21 从传感器芯片1接收检测到的信号，并生成图像数据，以在显示器21a上显示作为检查对象的电路布线的图像。由此，能够根据生成的图像数据和表示设计电路布线的设计图像数据，检查电路布线的形状，检测电路布线101中的断线，短路，切断等缺陷。

5. 发明授权

US06734692B2 Inspection apparatus and sensor 失效
标题翻译：检验仪器和传感器
公开(公告)号：US06734692B2
公开(公告)日：2004-05-11
申请号：US09926357
申请日：2001-10-22
申请人： Tatuhisa Fujii , Shogo Ishioka , Shuji Yamaoka
发明人： Tatuhisa Fujii , Shogo Ishioka , Shuji Yamaoka
IPC分类号： G01R3102
CPC分类号： G01R31/2812
摘要： It is an object of the present invention to finely inspect a dimension of a conductive pattern. A sensor element 12a includes an MOSFET. A diffusion layer of the MOSFET having a larger surface area serves as a passive element, and is placed opposes to the conductive pattern. The passive element is formed continuously with a source of the MOSFET to be electrically conductive thereto. A gate of the MOSFET is connected to a vertical select section 14, and a drain of the MOSFET is connected to a lateral select section 13. When a sensor element 12a is selected by a timing generating section 15, a signal is transmitted from the vertical select section 14 to the gate to turn on the MOSFET. In this moment, if an inspection signal is output from a probe 22, the potential in the conductive pattern 101 is varied. Thus, a current flows from the source to the drain and then the current is transmitted to a signal processing section 16 through the lateral select section 13. By analyzing the position of the sensor element which outputs a detect signal, the position of the conductive pattern 101 in a circuit board 100 may be discriminated.
摘要翻译：本发明的目的是精细地检查导电图案的尺寸。传感器元件12a包括MOSFET。具有较大表面积的MOSFET的扩散层用作无源元件，并被放置成与导电图案相对。无源元件与MOSFET的源极连续形成以与其导电。 MOSFET的栅极连接到垂直选择部分14，并且MOSFET的漏极连接到横向选择部分13.当由定时产生部分15选择传感器元件12a时，信号从垂直方向选择第14节到门以打开MOSFET。此时，如果从探头22输出检查信号，导电图案101的电位变化。因此，电流从源极流到漏极，然后通过横向选择部分13将电流传输到信号处理部分16.通过分析输出检测信号的传感器元件的位置，导电图案的位置可以区分电路板100中的101。

6. 发明授权

US07088107B2 Circuit pattern inspection instrument and pattern inspection method 失效
标题翻译：电路图形检测仪和图案检验方法
公开(公告)号：US07088107B2
公开(公告)日：2006-08-08
申请号：US10536996
申请日：2003-11-28
申请人： Shuji Yamaoka , Hiroshi Hamori , Shogo Ishioka
发明人： Shuji Yamaoka , Hiroshi Hamori , Shogo Ishioka
IPC分类号： G01R31/02
CPC分类号： G01R31/2808
摘要： Disclosed is a circuit pattern inspection apparatus for inspecting a conductive pattern of a circuit board which includes first and second comb-shaped conductive patterns (15a, 15b) each having a plurality of terminal portions arranged substantially parallel to each other and a base portion connecting respective anchor ends of the terminal portions together, wherein the terminal portions of the first comb-shaped conductive pattern are alternately arranged with respect to the terminal portions of said second comb-shaped conductive pattern, and the first second comb-shaped conductive patterns (15a, 15b) are adapted, respectively, to be supplied with an AC inspection signal, and grounded. The circuit pattern inspection apparatus having first and second detection means (20, 30) each having a detection electrode for detecting a signal from the first and second comb-shaped conductive patterns, and a scalar robot (80) operable to move each of the first and second detection means (20, 30) across common ones of the terminal portions, while allowing them be capacitively coupled with the terminal portions.
摘要翻译：公开了一种电路图案检查装置，用于检查电路板的导电图案，其包括第一和第二梳状导电图案（15a，15b），每个梳状导电图案具有彼此大致平行的多个端子部分，将所述端子部的各个锚定端部连接在一起，其中，所述第一梳状导电图案的端子部分相对于所述第二梳状导电图案的端子部分交替布置，并且所述第一第二梳状导电图案 15a，15b）分别适于提供交流检测信号并接地。电路图案检查装置具有第一和第二检测装置（20,30），每个检测装置具有用于检测来自第一和第二梳状导电图案的信号的检测电极，以及标量机器人（80），其可操作以使第一和第二梳状导电图案中的每一个移动和第二检测装置（20,30），同时允许它们与端子部分电容耦合。

7. 发明授权

US06995566B2 Circuit pattern inspection apparatus, circuit pattern inspection method, and recording medium 失效
标题翻译：电路图形检查装置，电路图案检查方法和记录介质
公开(公告)号：US06995566B2
公开(公告)日：2006-02-07
申请号：US10478351
申请日：2002-05-23
申请人： Shuji Yamaoka , Shogo Ishioka
发明人： Shuji Yamaoka , Shogo Ishioka
IPC分类号： G01R31/28
CPC分类号： G01R31/312 , G01R31/2812 , G01R31/304
摘要： Disclosed is a circuit-pattern inspection apparatus for inspecting a comb-shaped pattern 20 having an edge region formed as a plurality of finger pattern segments and a base region formed as an integral connection pattern segment, and a plurality of discrete patterns 30 each disposed between the adjacent finger pattern segments in a non-connecting manner and being not in connecting with the remaining discrete patterns. The inspection apparatus comprises means for supplying an AC signal alternately to either one of the finger pattern segments and both the finger pattern segments and the discrete patterns while maintaining the other at a ground potential, and sensors 131, 132, 133 for detecting the AC signal disposed in the edge region. The inspection apparatus can reliably detect the presence of defects in a circuit board without any difficulties.
摘要翻译：公开了一种电路图案检查装置，用于检查具有形成为多个指形图案区段的边缘区域和形成为整体连接图案区段的基部区域的梳状图案20，以及多个离散图案30，其分别设置在相邻的指形图案段以不连接的方式分段，并且不与剩余的离散图案连接。所述检查装置包括：将交流信号交替地提供给所述手指图案段和所述指形图案段和所述离散图案中的任一个同时保持另一个处于接地电位的装置;以及用于检测所述AC信号的传感器131,132,133 设置在边缘区域。检查装置可以在没有任何困难的情况下可靠地检测电路板中的缺陷的存在。

8. 发明授权

US06952104B2 Inspection method and apparatus for testing fine pitch traces 失效
标题翻译：用于测试细间距轨迹的检查方法和装置
公开(公告)号：US06952104B2
公开(公告)日：2005-10-04
申请号：US10461875
申请日：2003-06-16
申请人： Shuji Yamaoka , Shogo Ishioka
发明人： Shuji Yamaoka , Shogo Ishioka
IPC分类号： G01R31/02 , G01R31/28 , H05K3/00 , H01H31/02 , G01R27/26
CPC分类号： G01R31/2812
摘要： An inspection apparatus and method are disclosed. The inspection apparatus comprises a probe 30 having a width equal to or less than that of the layout pitch of conductive patterns 15 to be inspected, and a sensor section 20 having an area capable of covering the layout region of the conductive patterns. The probe 30 is adapted to be scanningly moved across an inspection-signal supply region including respective portions of the conductive patterns. The sensor section 20 is positioned opposed to the conductive patterns 15. An AC inspection signal is fed from an AC power source 35 to the probe 30 to form a capacitive coupling between one electrode or the conductive pattern, and the other electrode or the sensor section 20, and a detected signal from the sensor section 20 is amplified through an amplifier 25 to check the detected signal. Then, it is determined if each of the conductive patterns supplied with the inspection signal includes a short-circuit, according to whether the level of the detected signal is different from a signal level in a normal state. The present invention can provide an inspection apparatus and method capable of readily detecting a short-circuit possibly existing in various conductive patterns, in a simple control.
摘要翻译：公开了一种检查装置和方法。检查装置包括具有等于或小于要检查的导电图案15的布局间距的宽度的探针30和具有能够覆盖导电图案的布局区域的区域的传感器部分20。探头30适于扫描地移动穿过包括导电图案的相应部分的检查信号供应区域。传感器部分20定位成与导电图案15相对.AC检测信号从AC电源35馈送到探针30，以形成一个电极或导电图案之间的电容耦合，另一个电极或传感器部分 20，并且来自传感器部分20的检测信号通过放大器25被放大以检查检测到的信号。然后，根据检测信号的电平是否与正常状态下的信号电平不同，确定提供有检查信号的每个导电图案是否包括短路。本发明可以提供一种在简单的控制下能够容易地检测出可能存在于各种导电图案中的短路的检查装置和方法。

9. 发明授权

US06842026B2 Inspecting apparatus and inspecting method for circuit board 失效
标题翻译：电路板检查仪器和检查方法
公开(公告)号：US06842026B2
公开(公告)日：2005-01-11
申请号：US10169750
申请日：2001-11-15
申请人： Shuji Yamaoka , Shogo Ishioka
发明人： Shuji Yamaoka , Shogo Ishioka
IPC分类号： G01R31/02 , G01R31/28 , G09G3/00 , H05K13/08
CPC分类号： G09G3/006
摘要： The present invention provides an apparatus and method for inspecting a circuit board at a high speed. An LCD driver module 100 as an object to be inspected has an onboard LCD driving LSI 110. One circuit-wiring group 111 is connected to SEG terminals, and another circuit-wiring group 112 is connected to COM terminals of the LSI 110. An inspection apparatus 1 generates an LSI drive signal and sends it to input terminals 113 of the LSI 110. A pair of sensors 2, 3 are positioned opposedly to the circuit-wiring groups 111, 112, respectively, in a non-contact manner. Each of the sensors 2, 3 detects voltage changes in the corresponding circuit-wiring group 111, 112 caused by driving the LSI 110, and the detected signals are analyzed by the inspection apparatus 1.
摘要翻译：本发明提供一种用于高速检查电路板的装置和方法。作为被检查对象的LCD驱动器模块100具有车载LCD驱动LSI 110.一个电路布线组111连接到SEG端子，另一个电路布线组112连接到LSI 110的COM端子。检查装置1产生LSI驱动信号并将其发送到LSI 110的输入端113.一对传感器2,3分别以非接触的方式与电路布线组111,112相对置。每个传感器2,3检测由驱动LSI110引起的对应的电路布线组111,112中的电压变化，检测信号由检查装置1分析。

10. 发明授权

US07332914B2 Conductor inspection apparatus and conductor inspection method 失效
标题翻译：导体检查装置和导体检查方法
公开(公告)号：US07332914B2
公开(公告)日：2008-02-19
申请号：US10547355
申请日：2004-02-27
申请人： Shuji Yamaoka , Akira Nurioka , Mishio Hayashi , Shogo Ishioka
发明人： Shuji Yamaoka , Akira Nurioka , Mishio Hayashi , Shogo Ishioka
IPC分类号： G01R31/08 , G01R31/302
CPC分类号： G01B7/28
摘要： Disclosed is a conductor inspection apparatus capable of detecting a state of an inspection-target electric conductor with a high degree of accuracy in a non-contact manner. The inspection apparatus includes a signal supply section 510 for supplying an inspection signal to an inspection-target conductor 520, and two sensor plates 570, 580 disposed approximately parallel to each other in the vicinity of the conductor 520. The inspection apparatus is designed to inspect a configuration of the conductor 520 disposed opposed to the sensor plate 570, in accordance with a measured signal level from the sensor plate 570. The inspection apparatus further includes a subtracter 550 for subjecting respective detected signal values from the sensor plates 570, 580 to subtraction, and a divider 560 for dividing the detected signal value from a selected one of the sensor plates by the subtraction result to normalize the detected signal value from the selected sensor plate so as to detect a relative ratio between the detected signal values from the sensor plates to obtain a value X corresponding a distance between the selected sensor plate and the conductor 520, as a detection result.
摘要翻译：公开了能够以非接触的方式高精度地检测检查对象的导电体的状态的导体检查装置。检查装置包括用于向检查对象导体520提供检查信号的信号提供部510和在导体520附近彼此大致平行地配置的两个传感器板570,580。检查装置被设计成根据来自传感器板570的测量信号水平检查与传感器板570相对设置的导体520的构造。检查装置还包括用于对来自传感器板570,580的各个检测信号值进行减法的减法器550和用于将检测到的信号值与所选择的传感器板中的一个传感器板相除的除法器560，以将检测到的检测信号值归一化信号值，以便检测来自传感器板的检测信号值之间的相对比，以获得对应于所选择的传感器板和导体520之间的距离的值X.作为检测结果。

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