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    • 5. 发明申请
    • Anisotropic conductive sheet
    • 各向异性导电片
    • US20070160808A1
    • 2007-07-12
    • US11547024
    • 2005-03-30
    • Yasuhiro OkudaTaro Fujita
    • Yasuhiro OkudaTaro Fujita
    • B32B3/10
    • H01R13/2414H01L2924/01012H01R12/7076Y10T428/24322
    • The object of the invention is to provide an anisotropic conductive sheet which obtains good conductivity without damaging a wafer of a semiconductor nor electrode terminals of a conduction measurement instrument due to loading during inspection of the wafer. An anisotropic conductive sheet 1 of the invention is formed such that a porous resin layer is formed on inner walls of a plurality of through holes perforated in the thickness direction of an electrically insulating porous sheet 2, and the surfaces of skeletons of the porous resin are coated with metal. Examples of the porous resin layer include those which are obtained by means of foaming a fluororubber or a tetrafluoroethylene-propylene copolymer rubber, having an open-cell structure, and cross-liking the same through irradiation with electron beams. The sheet is particularly favorable for a porous resin.
    • 本发明的目的是提供一种各向异性导电片,其在晶片检查期间由于加载而导致半导体晶片和导电测量仪器的电极端子不会损坏导电性。 本发明的各向异性导电片1形成为在电绝缘性多孔质片2的厚度方向穿孔的多个通孔的内壁上形成多孔树脂层,多孔树脂的骨架表面为 涂上金属。 多孔树脂层的实例包括通过使具有开孔结构的氟橡胶或四氟乙烯 - 丙烯共聚物橡胶发泡而获得的那些,并且通过照射电子束而使其交叉。 该片材特别适用于多孔树脂。