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1. 发明申请

US20100302836A1 NONVOLATILE MEMORY CELL COMPRISING A DIODE AND A RESISTANCE-SWITCHING MATERIAL 有权
标题翻译：包含二极管和电阻切换材料的非易失性存储单元
公开(公告)号：US20100302836A1
公开(公告)日：2010-12-02
申请号：US12855462
申请日：2010-08-12
申请人： S. Brad Herner , Tanmay Kumar , Christopher J. Petti
发明人： S. Brad Herner , Tanmay Kumar , Christopher J. Petti
IPC分类号： G11C11/00 , H01L21/16
CPC分类号： H01L27/249 , G11C11/5685 , G11C13/0007 , G11C13/0069 , G11C2013/009 , G11C2213/15 , G11C2213/32 , G11C2213/34 , G11C2213/71 , G11C2213/72 , H01L27/101 , H01L27/2409 , H01L27/2463 , H01L45/04 , H01L45/1233 , H01L45/145 , H01L45/146
摘要： In a novel nonvolatile memory cell formed above a substrate, a diode is paired with a reversible resistance-switching material, preferably a metal oxide or nitride such as, for example, NixOy, NbxOy, TixOy, HfxOy, AlxOy, MgxOy, CoxOy, CrxOy, VxOy, ZnxOy, ZrxOy, BxNy, and AlxNy. In preferred embodiments, the diode is formed as a vertical pillar disposed between conductors. Multiple memory levels can be stacked to form a monolithic three dimensional memory array. In some embodiments, the diode comprises germanium or a germanium alloy, which can be deposited and crystallized at relatively low temperatures, allowing use of aluminum or copper in the conductors. The memory cell of the present invention can be used as a rewriteable memory cell or a one-time-programmable memory cell, and can store two or more data states.
摘要翻译：在形成于衬底上方的新型非易失性存储单元中，二极管与可逆电阻切换材料配对，优选为金属氧化物或氮化物，例如NixOy，NbxOy，TixOy，HfxOy，AlxOy，MgxOy，CoxOy，CrxOy ，VxOy，ZnxOy，ZrxOy，BxNy和AlxNy。在优选实施例中，二极管形成为设置在导体之间的垂直支柱。可以堆叠多个存储器级别以形成单片三维存储器阵列。在一些实施例中，二极管包括锗或锗合金，其可以在相对低的温度下沉积和结晶，从而允许在导体中使用铝或铜。本发明的存储单元可以用作可重写存储单元或一次可编程存储单元，并且可以存储两个或多个数据状态。

2. 发明授权

US07800934B2 Programming methods to increase window for reverse write 3D cell 有权
标题翻译：编程方法增加反向写入3D单元格的窗口
公开(公告)号：US07800934B2
公开(公告)日：2010-09-21
申请号：US11819077
申请日：2007-06-25
申请人： Tanmay Kumar , S. Brad Herner , Christopher J. Petti
发明人： Tanmay Kumar , S. Brad Herner , Christopher J. Petti
IPC分类号： G11C11/00 , G11C11/36
CPC分类号： G11C13/00 , G11C11/5692 , G11C13/0069 , G11C17/14 , G11C17/16 , G11C17/165 , G11C2013/009 , G11C2213/33 , H01L27/101
摘要： A method of operating a nonvolatile memory cell includes providing the nonvolatile memory cell comprising a diode which is fabricated in a first resistivity, unprogrammed state, and applying a forward bias to the diode having a magnitude greater than a minimum voltage required for programming the diode to switch the diode to a second resistivity, programmed state. The second resistivity state is lower than the first resistivity state.
摘要翻译：一种操作非易失性存储单元的方法包括提供非易失性存储单元，该非易失性存储单元包括以第一电阻率，未编程状态制造的二极管，以及将正向偏压施加到具有大于将二极管编程所需的最小电压的二极管的幅度将二极管切换到第二电阻率，编程状态。第二电阻率状态低于第一电阻率状态。

3. 发明授权

US07800933B2 Method for using a memory cell comprising switchable semiconductor memory element with trimmable resistance 有权
标题翻译：一种用于使用具有可调整电阻的可切换半导体存储元件的存储单元的方法
公开(公告)号：US07800933B2
公开(公告)日：2010-09-21
申请号：US11496986
申请日：2006-07-31
申请人： Tanmay Kumar , S. Brad Herner , Roy E Scheuerlein , Christopher J Petti
发明人： Tanmay Kumar , S. Brad Herner , Roy E Scheuerlein , Christopher J Petti
IPC分类号： G11C11/00 , G11C11/36
CPC分类号： G11C11/5692 , G11C13/0069 , G11C17/14 , G11C17/165 , G11C2013/0073 , H01L27/101
摘要： A nonvolatile memory cell comprising a diode formed of semiconductor material can store memory states by changing the resistance of the semiconductor material by application of a set pulse (decreasing resistance) or a reset pulse (increasing resistance.) In preferred embodiments, set pulses are applied with the diode under forward bias, while reset pulses are applied with the diode in reverse bias. By switching resistivity of the semiconductor material of the diode, a memory cell can be either one-time programmable or rewriteable, and can achieve two, three, four, or more distinct data states.
摘要翻译：包括由半导体材料形成的二极管的非易失性存储单元可以通过施加设置脉冲（降低电阻）或复位脉冲（增加电阻）来改变半导体材料的电阻来存储存储器状态。在优选实施例中，施加设定脉冲二极管在正向偏置下，而复位脉冲以二极管反向施加。通过切换二极管的半导体材料的电阻率，存储器单元可以是一次性可编程的或可重写的，并且可以实现两个，三个，四个或更多个不同的数据状态。

4. 发明授权

US07812404B2 Nonvolatile memory cell comprising a diode and a resistance-switching material 有权
标题翻译：包括二极管和电阻切换材料的非易失性存储单元
公开(公告)号：US07812404B2
公开(公告)日：2010-10-12
申请号：US11395995
申请日：2006-03-31
申请人： S. Brad Herner , Tanmay Kumar , Christopher J. Petti
发明人： S. Brad Herner , Tanmay Kumar , Christopher J. Petti
IPC分类号： H01L29/76
CPC分类号： H01L27/249 , G11C11/5685 , G11C13/0007 , G11C13/0069 , G11C2013/009 , G11C2213/15 , G11C2213/32 , G11C2213/34 , G11C2213/71 , G11C2213/72 , H01L27/101 , H01L27/2409 , H01L27/2463 , H01L45/04 , H01L45/1233 , H01L45/145 , H01L45/146
摘要： In a novel nonvolatile memory cell formed above a substrate, a diode is paired with a reversible resistance-switching material, preferably a metal oxide or nitride such as, for example, NixOy, NbxOy, TixOy, HFxOy, AlxOy, MgxOy, CoxOy, CrxOy, VxOy, ZnxOy, ZrxOy, BxNy, and AlxNy. In preferred embodiments, the diode is formed as a vertical pillar disposed between conductors. Multiple memory levels can be stacked to form a monolithic three dimensional memory array. In some embodiments, the diode comprises germanium or a germanium alloy, which can be deposited and crystallized at relatively low temperatures, allowing use of aluminum or copper in the conductors. The memory cell of the present invention can be used as a rewriteable memory cell or a one-time-programmable memory cell, and can store two or more data states.
摘要翻译：在形成在衬底上方的新型非易失性存储单元中，二极管与可逆电阻切换材料配对，优选为金属氧化物或氮化物，例如NixOy，NbxOy，TixOy，HFxOy，AlxOy，MgxOy，CoxOy，CrxOy ，VxOy，ZnxOy，ZrxOy，BxNy和AlxNy。在优选实施例中，二极管形成为设置在导体之间的垂直支柱。可以堆叠多个存储器级别以形成单片三维存储器阵列。在一些实施例中，二极管包括锗或锗合金，其可以在相对低的温度下沉积和结晶，从而允许在导体中使用铝或铜。本发明的存储单元可以用作可重写存储单元或一次可编程存储单元，并且可以存储两个或多个数据状态。

5. 发明授权

US08227787B2 Heterojunction device comprising a semiconductor and a resistivity-switching oxide or nitride 有权
标题翻译：异质结装置包括半导体和电阻率切换氧化物或氮化物
公开(公告)号：US08227787B2
公开(公告)日：2012-07-24
申请号：US13007812
申请日：2011-01-17
申请人： Tanmay Kumar , S. Brad Herner
发明人： Tanmay Kumar , S. Brad Herner
IPC分类号： H01L29/02 , H01L47/00
CPC分类号： H01L29/868 , H01L21/84 , H01L27/1021 , H01L27/2409 , H01L29/165 , H01L29/22 , H01L29/267 , H01L29/417 , H01L29/737 , H01L29/8615 , H01L45/04 , H01L45/1233 , H01L45/146
摘要： In the present invention, a metal oxide or nitride compound which is a wide-band-gap semiconductor abuts a silicon, germanium, or alloy of silicon and/or germanium of the opposite conductivity type to form a p-n heterojunction. This p-n heterojunction can be used to advantage in various devices. In preferred embodiments, one terminal of a vertically oriented p-i-n heterojunction diode is a metal oxide or nitride layer, while the rest of the diode is formed of a silicon or silicon-germanium resistor. For example, a diode may include a heavily doped n-type silicon region, an intrinsic silicon region, and a nickel oxide layer serving as the p-type terminal. Many of these metal oxides and nitrides exhibit resistivity-switching behavior, and such a heterojunction diode can be used in a nonvolatile memory cell, for example in a monolithic three dimensional memory array.
摘要翻译：在本发明中，作为宽带隙半导体的金属氧化物或氮化物化合物与相反导电型的硅和/或锗的硅，锗或合金相接触以形成p-n异质结。该p-n异质结可以用于各种装置中。在优选实施例中，垂直取向的p-i-n异质结二极管的一个端子是金属氧化物或氮化物层，而二极管的其余部分由硅或硅 - 锗电阻器形成。例如，二极管可以包括重掺杂的n型硅区，本征硅区和用作p型端的氧化镍层。这些金属氧化物和氮化物中的许多表现出电阻率切换行为，并且这种异质结二极管可以用在非易失性存储单元中，例如在单片三维存储器阵列中。

6. 发明授权

US07915094B2 Method of making a diode read/write memory cell in a programmed state 有权
标题翻译：使二极管读/写存储单元处于编程状态的方法
公开(公告)号：US07915094B2
公开(公告)日：2011-03-29
申请号：US12588088
申请日：2009-10-02
申请人： Tanmay Kumar , S. Brad Herner
发明人： Tanmay Kumar , S. Brad Herner
IPC分类号： H01L21/82
CPC分类号： G11C13/0069 , G11C11/5692 , G11C17/14 , G11C17/165 , G11C17/18 , G11C2013/0073 , H01L27/101 , H01L27/1021 , H01L29/868
摘要： A method of making a nonvolatile memory device includes fabricating a diode in a low resistivity, programmed state without an electrical programming step. The memory device includes at least one memory cell. The memory cell is constituted by the diode and electrically conductive electrodes contacting the diode.
摘要翻译：制造非易失性存储器件的方法包括在没有电气编程步骤的情况下制造低电阻率编程状态的二极管。存储器件包括至少一个存储单元。存储单元由二极管和与二极管接触的导电电极构成。

7. 发明授权

US07800932B2 Memory cell comprising switchable semiconductor memory element with trimmable resistance 有权
标题翻译：存储单元包括具有可调整电阻的可切换半导体存储元件
公开(公告)号：US07800932B2
公开(公告)日：2010-09-21
申请号：US11237167
申请日：2005-09-28
申请人： Tanmay Kumar , S. Brad Herner
发明人： Tanmay Kumar , S. Brad Herner
IPC分类号： G11C11/00 , G11C11/14 , G11C11/15
CPC分类号： G11C11/5692 , G11C11/005 , G11C11/5685 , G11C13/0007 , G11C13/003 , G11C17/14 , G11C2211/5641 , G11C2211/5646 , G11C2213/32 , G11C2213/71 , G11C2213/72 , G11C2213/76 , H01L27/101 , H01L27/2409 , H01L27/2463 , H01L45/08 , H01L45/1233 , H01L45/148
摘要： A nonvolatile memory cell comprising doped semiconductor material and a diode can store memory states by changing the resistance of the doped semiconductor material by application of a set pulse (decreasing resistance) or a reset pulse (increasing resistance.) Set pulses are of short duration and above a threshold voltage, while reset pulses are longer duration and below a threshold voltage. In some embodiments multiple resistance states can be achieved, allowing for a multi-state cell, while restoring a prior high-resistance state allows for an rewriteable cell. In some embodiments, the diode and a switchable memory formed of doped semiconductor material are formed in series, while in other embodiments, the diode itself serves as the semiconductor switchable memory element.
摘要翻译：包括掺杂半导体材料和二极管的非易失性存储单元可以通过施加设置脉冲（降低电阻）或复位脉冲（增加电阻）来改变掺杂半导体材料的电阻来存储存储器状态。设置脉冲的持续时间短，高于阈值电压，而复位脉冲的持续时间更长并低于阈值电压。在一些实施例中，可以实现多个电阻状态，允许多状态单元，同时恢复先前的高电阻状态允许可重写单元。在一些实施例中，二极管和由掺杂半导体材料形成的可切换存储器是串联形成的，而在其它实施例中，二极管本身用作半导体可切换存储元件。

8. 发明授权

US07618850B2 Method of making a diode read/write memory cell in a programmed state 有权
标题翻译：使二极管读/写存储单元处于编程状态的方法
公开(公告)号：US07618850B2
公开(公告)日：2009-11-17
申请号：US11693845
申请日：2007-03-30
申请人： Tanmay Kumar , S. Brad Herner
发明人： Tanmay Kumar , S. Brad Herner
IPC分类号： H01L21/82
CPC分类号： G11C13/0069 , G11C11/5692 , G11C17/14 , G11C17/165 , G11C17/18 , G11C2013/0073 , H01L27/101 , H01L27/1021 , H01L29/868
摘要： A method of making a nonvolatile memory device includes fabricating a diode in a low resistivity, programmed state without an electrical programming step. The memory device includes at least one memory cell. The memory cell is constituted by the diode and electrically conductive electrodes contacting the diode.
摘要翻译：制造非易失性存储器件的方法包括在没有电气编程步骤的情况下制造低电阻率编程状态的二极管。存储器件包括至少一个存储单元。存储单元由二极管和与二极管接触的导电电极构成。

9. 发明申请

US20090085154A1 VERTICAL DIODE BASED MEMORY CELLS HAVING A LOWERED PROGRAMMING VOLTAGE AND METHODS OF FORMING THE SAME 有权
标题翻译：具有降低的编程电压的基于垂直二极管的存储器电池及其形成方法
公开(公告)号：US20090085154A1
公开(公告)日：2009-04-02
申请号：US11864848
申请日：2007-09-28
申请人： S. Brad Herner , Tanmay Kumar
发明人： S. Brad Herner , Tanmay Kumar
IPC分类号： H01L27/102 , H01L21/8229
CPC分类号： H01L27/1021 , G11C17/16 , H01L23/5252 , H01L29/868 , H01L2924/0002 , H01L2924/00
摘要： In a first aspect, a method for forming a non-volatile memory cell is provided. The method includes (1) forming a metal-insulator-metal (MIM) antifuse stack including (a) a first metal layer; (b) a silicon dioxide, oxynitride or silicon nitride antifuse layer formed above the first metal layer; and (c) a second metal layer formed above the antifuse layer. The method also includes (2) forming a contiguous p-i-n diode above the MIM stack, the contiguous p-i-n diode comprising deposited semiconductor material; (3) forming a layer of a silicide, silicide-germanide, or germanide in contact with the deposited semiconductor material; and (4) crystallizing the deposited semiconductor material in contact with the layer of silicide, silicide-germanide, or germanide. The memory cell comprises the contiguous p-i-n diode and the MIM stack. Other aspects are provided.
摘要翻译：在第一方面，提供了一种用于形成非易失性存储单元的方法。该方法包括（1）形成包括（a）第一金属层的金属 - 绝缘体 - 金属（MIM）反熔丝堆叠; （b）形成在第一金属层上方的二氧化硅，氧氮化物或氮化硅反熔层; 和（c）形成在反熔丝层之上的第二金属层。该方法还包括（2）在MIM堆叠之上形成连续的p-i-n二极管，连续的p-i-n二极管包括沉积的半导体材料; （3）形成与沉积的半导体材料接触的硅化物层，硅化锗 - 锗化物或锗化物层; 和（4）使沉积的半导体材料与硅化物，硅化锗 - 锗化物或锗化物层接触。存储单元包括相邻的p-i-n二极管和MIM堆叠。提供其他方面。

10. 发明申请

US20070164309A1 METHOD OF MAKING A DIODE READ/WRITE MEMORY CELL IN A PROGRAMMED STATE 有权
标题翻译：在编程状态下制作二极管读/写存储单元的方法
公开(公告)号：US20070164309A1
公开(公告)日：2007-07-19
申请号：US11693845
申请日：2007-03-30
申请人： Tanmay Kumar , S. Brad Herner
发明人： Tanmay Kumar , S. Brad Herner
IPC分类号： H01L29/43
CPC分类号： G11C13/0069 , G11C11/5692 , G11C17/14 , G11C17/165 , G11C17/18 , G11C2013/0073 , H01L27/101 , H01L27/1021 , H01L29/868
摘要： A method of making a nonvolatile memory device includes fabricating a diode in a low resistivity, programmed state without an electrical programming step. The memory device includes at least one memory cell. The memory cell is constituted by the diode and electrically conductive electrodes contacting the diode.
摘要翻译：制造非易失性存储器件的方法包括在没有电气编程步骤的情况下制造低电阻率编程状态的二极管。存储器件包括至少一个存储单元。存储单元由二极管和与二极管接触的导电电极构成。

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