专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20080011965A1 CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS AND SOFTWARE PROGRAM FOR USE THEREIN 有权
标题翻译：充电粒子图案书写方法及其使用的装置和软件程序
公开(公告)号：US20080011965A1
公开(公告)日：2008-01-17
申请号：US11772414
申请日：2007-07-02
申请人： Takuya Matsukawa , Shuichiro Fukutome , Tomoyuki Horiuchi , Hayato Kimura , Tateki Watanabe , Kiyoshi Hattori
发明人： Takuya Matsukawa , Shuichiro Fukutome , Tomoyuki Horiuchi , Hayato Kimura , Tateki Watanabe , Kiyoshi Hattori
IPC分类号： G21K1/08 , G06F19/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00
摘要： A charged particle beam pattern writing apparatus in accordance with one preferred form of this invention includes an atmospheric pressure measuring unit which measures the value of an atmosphere air pressure, a coordinate value corrector which corrects three-dimensional (3D) coordinate values by use of the value of the air pressure measured, a deflection amount computing unit which calculates the deflection amount of a charged particle beam by using the 3D coordinate values corrected, an irradiator for irradiation of the charged particle beam, and a deflector for deflection of the charged particle beam based on the deflection amount.
摘要翻译：根据本发明的一个优选形式的带电粒子束图案书写装置包括测量大气压力值的大气压力测量单元，通过使用该气压校正三维（3D）坐标值的坐标值校正器测量的空气压力的值;偏移量计算单元，其通过使用校正的3D坐标值计算带电粒子束的偏转量;照射器，用于照射带电粒子束;以及偏转器，用于偏转带电粒子束基于偏转量。

2. 发明授权

US07589335B2 Charged-particle beam pattern writing method and apparatus and software program for use therein 有权
标题翻译：带电粒子束图案写入方法及其中使用的装置和软件程序
公开(公告)号：US07589335B2
公开(公告)日：2009-09-15
申请号：US11772414
申请日：2007-07-02
申请人： Takuya Matsukawa , Shuichiro Fukutome , Tomoyuki Horiuchi , Hayato Kimura , Tateki Watanabe , Kiyoshi Hattori
发明人： Takuya Matsukawa , Shuichiro Fukutome , Tomoyuki Horiuchi , Hayato Kimura , Tateki Watanabe , Kiyoshi Hattori
IPC分类号： H01J37/302 , H01L21/027
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00
摘要： A charged particle beam pattern writing apparatus in accordance with one preferred form of this invention includes an atmospheric pressure measuring unit which measures the value of an atmosphere air pressure, a coordinate value corrector which corrects three-dimensional (3D) coordinate values by use of the value of the air pressure measured, a deflection amount computing unit which calculates the deflection amount of a charged particle beam by using the 3D coordinate values corrected, an irradiator for irradiation of the charged particle beam, and a deflector for deflection of the charged particle beam based on the deflection amount.
摘要翻译：根据本发明的一个优选形式的带电粒子束图案书写装置包括测量大气压力值的大气压力测量单元，通过使用该气压校正三维（3D）坐标值的坐标值校正器测量的空气压力的值;偏移量计算单元，其通过使用校正的3D坐标值计算带电粒子束的偏转量;照射器，用于照射带电粒子束;以及偏转器，用于偏转带电粒子束基于偏转量。

3. 发明申请

US20070152169A1 Move mechanism for moving target object and charged particle beam writing apparatus 有权
标题翻译：移动目标物体和带电粒子束写入装置的移动机构
公开(公告)号：US20070152169A1
公开(公告)日：2007-07-05
申请号：US11649753
申请日：2007-01-05
申请人： Shuichi Tamamushi , Shuichiro Fukutome
发明人： Shuichi Tamamushi , Shuichiro Fukutome
IPC分类号： G21G5/00
CPC分类号： H01J37/20 , B82Y10/00 , B82Y40/00 , H01J37/304 , H01J37/3174 , H01J2237/2025 , H01J2237/20292 , H01J2237/2482 , H01J2237/2485 , H01J2237/30433
摘要： A move mechanism for horizontally moving a target object in an accelerating manner, includes a moving unit configured to be horizontally moved in an accelerating manner, a plate part arranged on the moving unit and supported by the moving unit at a substantially center-of-gravity height position, and a mirror part configured to reflect a laser beam for measuring a position, the mirror part being connected to the plate part such that a center-of-gravity height position of the mirror part is arranged at the substantially center-of-gravity height position of the plate part.
摘要翻译：一种用于以加速的方式水平移动目标物体的移动机构包括被构造成以加速方式水平移动的移动单元，布置在移动单元上并且基本上重心由移动单元支撑的板部分高度位置以及被配置为反射用于测量位置的激光束的反射镜部分，所述反射镜部分连接到所述板部分，使得所述反射镜部分的重心高度位置被布置在基本上中心的位置，板部分的重力高度位置。

4. 发明授权

US06676289B2 Temperature measuring method in pattern drawing apparatus 有权
标题翻译：图案绘图装置中的温度测量方法
公开(公告)号：US06676289B2
公开(公告)日：2004-01-13
申请号：US09933719
申请日：2001-08-22
申请人： Ryoichi Hirano , Shusuke Yoshitake , Toru Tojo , Shuichiro Fukutome , Teruaki Yamamoto , Masaki Toriumi
发明人： Ryoichi Hirano , Shusuke Yoshitake , Toru Tojo , Shuichiro Fukutome , Teruaki Yamamoto , Masaki Toriumi
IPC分类号： G01K1300
CPC分类号： G01K7/42
摘要： According to one embodiment of the present invention, the present invention may provide a temperature measuring method in a pattern drawing apparatus having a drawing chamber for drawing a pattern on a substrate to be transferred inside, a stage installed inside the drawing chamber, a standby chamber connected to the drawing chamber, and a thermostatic device installed inside the standby chamber, characterized in that a dummy substrate having a temperature measuring device and a recording device for recording the temperature measured by the temperature measuring device is transferred to the thermostatic device, then transferred into the drawing chamber, and then put on the stage, thus the temperature history of the dummy substrate in the transfer route from the thermostatic device to the stage is measured by the temperature measuring device and recorded in the recording device.
摘要翻译：根据本发明的一个实施例，本发明可以提供一种图形绘制装置中的温度测量方法，该图形绘制装置具有用于在待传送内部的基板上绘制图案的拉伸室，安装在拉伸室内的台，备用室连接到拉伸室，以及安装在备用室内的恒温装置，其特征在于，具有用于记录由温度测量装置测量的温度的温度测量装置和记录装置的虚拟基板被传送到恒温装置，然后转移进入拉伸室，然后放在平台上，由温度测量装置测量从恒温装置到载物台的传输路径中的虚拟基板的温度历史记录在记录装置中。

5. 发明授权

US08277603B2 Move mechanism for moving target object and charged particle beam writing apparatus 有权
标题翻译：移动目标物体和带电粒子束写入装置的移动机构
公开(公告)号：US08277603B2
公开(公告)日：2012-10-02
申请号：US11649753
申请日：2007-01-05
申请人： Shuichi Tamamushi , Shuichiro Fukutome
发明人： Shuichi Tamamushi , Shuichiro Fukutome
IPC分类号： C23F1/00 , H01L21/306 , C23C16/48 , C23C16/52 , C23C16/06 , C23C16/22
CPC分类号： H01J37/20 , B82Y10/00 , B82Y40/00 , H01J37/304 , H01J37/3174 , H01J2237/2025 , H01J2237/20292 , H01J2237/2482 , H01J2237/2485 , H01J2237/30433
摘要： A move mechanism for horizontally moving a target object in an accelerating manner, includes a moving unit configured to be horizontally moved in an accelerating manner, a plate part arranged on the moving unit and supported by the moving unit at a substantially center-of-gravity height position, and a mirror part configured to reflect a laser beam for measuring a position, the mirror part being connected to the plate part such that a center-of-gravity height position of the mirror part is arranged at the substantially center-of-gravity height position of the plate part.
摘要翻译：一种用于以加速的方式水平移动目标物体的移动机构包括被构造成以加速方式水平移动的移动单元，布置在移动单元上并且基本上重心由移动单元支撑的板部分高度位置以及被配置为反射用于测量位置的激光束的反射镜部分，所述反射镜部分连接到所述板部分，使得所述反射镜部分的重心高度位置被布置在基本上中心的位置，板部分的重力高度位置。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式