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1. 发明申请

US20120326179A1 DISPLAY DEVICE AND MANUFACTURING METHOD OF THE DISPLAY DEVICE 有权
标题翻译：显示装置的显示装置和制造方法
公开(公告)号：US20120326179A1
公开(公告)日：2012-12-27
申请号：US13526568
申请日：2012-06-19
申请人： Takuo KAITOH , Takeshi KURIYAGAWA , Ryou SAKATA , Osamu KARIKOME , Timothy J. BROSNIHAN
发明人： Takuo KAITOH , Takeshi KURIYAGAWA , Ryou SAKATA , Osamu KARIKOME , Timothy J. BROSNIHAN
IPC分类号： H01L27/15 , H01L33/58
CPC分类号： G02B26/0841 , B81B7/007 , B81B2201/045 , B81C2201/0132 , B81C2201/016
摘要： The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.
摘要翻译： MEMS快门包括具有开口部分的快门，连接到快门的第一弹簧，连接到第一弹簧的第一锚杆，连接到第二弹簧的第二弹簧和第二锚固件，在挡板的表面上的绝缘膜所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在垂直于基板表面的方向上，并且所述绝缘膜不存在于所述多个端子的表面上，并且所述表面所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在与所述基板的表面平行的方向上以及在面向所述基板的所述一侧的相对侧上。

2. 发明申请

US20100032681A1 DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF 有权
标题翻译：显示装置及其制造方法
公开(公告)号：US20100032681A1
公开(公告)日：2010-02-11
申请号：US12536645
申请日：2009-08-06
申请人： Takeshi KURIYAGAWA , Takeshi Noda , Takuo Kaitoh
发明人： Takeshi KURIYAGAWA , Takeshi Noda , Takuo Kaitoh
IPC分类号： H01L33/00 , H01L21/336
CPC分类号： H01L29/78621 , H01L29/458
摘要： A display device includes: a transparent substrate; gate electrodes which are stacked on the transparent substrate; semiconductor films which are stacked above the gate electrodes and constitute thin film transistors together with the gate electrodes; source electrodes and drain electrodes which are formed above the semiconductor films; an insulation film which is stacked between the source electrodes and the semiconductor films and between the drain electrodes and the semiconductor films; and contact holes which are formed in the insulation film so as to connect the source electrodes and the drain electrodes with the semiconductor films. The semiconductor film includes a connection region which is positioned at least below the contact hole and is connected with the source electrode, and a connection region which is positioned at least below the contact hole and is connected with the drain electrode, and impurities are implanted into the connection regions.
摘要翻译：显示装置包括：透明基板; 层叠在透明基板上的栅电极; 叠层在栅电极上方并与栅电极一起构成薄膜晶体管的半导体膜; 源电极和漏极形成在半导体膜上方; 堆叠在源电极和半导体膜之间以及漏电极和半导体膜之间的绝缘膜; 以及形成在绝缘膜中的接触孔，以便将源电极和漏极连接到半导体膜。半导体膜包括至少位于接触孔下方并与源电极连接的连接区域以及至少位于接触孔下方并与漏电极连接的连接区域，并将杂质注入连接区域。

3. 发明申请

US20100096632A1 DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF 有权
标题翻译：显示装置及其制造方法
公开(公告)号：US20100096632A1
公开(公告)日：2010-04-22
申请号：US12578641
申请日：2009-10-14
申请人： Takeshi KURIYAGAWA , Takeshi Noda , Takuo Kaitoh
发明人： Takeshi KURIYAGAWA , Takeshi Noda , Takuo Kaitoh
IPC分类号： H01L27/12 , H01L21/77
CPC分类号： H01L27/124 , H01L27/1248 , H01L29/66765
摘要： A second insulation layer which is formed by stacking a plurality of layers made of different materials in a mutually contact manner is formed such that the second insulation layer covers a source region and a drain region and also covers a gate electrode from above. A first contact hole which reaches one of the source region and the drain region and a recessed portion which is arranged above the gate electrode but is not communicated with the gate electrode are simultaneously formed on the second insulation layer by dry etching. A first line layer is formed so as to cover the first contact hole. After forming the first line layer, a bottom surface of the recessed portion is etched by dry etching thus forming a second contact hole which reaches the gate electrode in the first and second insulation layers. A second line layer is formed on the second contact hole.
摘要翻译：形成通过以相互接触的方式堆叠由不同材料制成的多个层而形成的第二绝缘层，使得第二绝缘层覆盖源极区域和漏极区域并且还从上方覆盖栅极电极。通过干法蚀刻在第二绝缘层上同时形成到达源极区域和漏极区域中的一个的第一接触孔和设置在栅电极上方但不与栅电极连通的凹部。第一线层形成为覆盖第一接触孔。在形成第一线层之后，通过干蚀刻蚀刻凹陷部分的底表面，从而形成到达第一和第二绝缘层中的栅电极的第二接触孔。在第二接触孔上形成第二线层。

4. 发明申请

US20120307335A1 DISPLAY DEVICE AND METHOD OF MANUFACTURING THE DISPLAY DEVICE 有权
标题翻译：显示装置和制造显示装置的方法
公开(公告)号：US20120307335A1
公开(公告)日：2012-12-06
申请号：US13483125
申请日：2012-05-30
申请人： Takeshi KURIYAGAWA
发明人： Takeshi KURIYAGAWA
IPC分类号： G02B26/02 , H05K13/00
CPC分类号： G02B26/023
摘要： A display device according to the present invention includes a plurality of pixels provided on a substrate; a first insulating film provided on the substrate; a second insulating film provided on the first insulating film in contact with at least a part thereof and formed of a different material from that of the first insulating film; a plurality of MEMS shutters provided on the second insulating film respectively in correspondence with the plurality of pixels, the plurality of MEMS shutters having a third insulating film formed on side surfaces thereof; and a plurality of terminals for supplying a potential to the plurality of gate lines and the plurality of data lines, the plurality of terminals receiving the potential through openings formed in the first insulating film and the second insulating film, the openings being formed on the plurality of terminals.
摘要翻译：根据本发明的显示装置包括设置在基板上的多个像素; 设置在所述基板上的第一绝缘膜; 第二绝缘膜，设置在与所述第一绝缘膜的至少一部分接触并且由与所述第一绝缘膜的材料不同的材料形成的所述第一绝缘膜上; 多个MEMS百叶窗分别设置在第二绝缘膜上，与多个像素对应，多个MEMS快门具有形成在其侧表面上的第三绝缘膜; 以及多个端子，用于向所述多条栅极线和所述多条数据线提供电位，所述多个端子接收形成在所述第一绝缘膜和所述第二绝缘膜中的电势通孔，所述多个开口形成在所述多个栅极线的终端。

5. 发明申请

US20120223315A1 DISPLAY DEVICE AND MANUFACTURING METHOD OF THE SAME 审中-公开
标题翻译：其显示装置及其制造方法
公开(公告)号：US20120223315A1
公开(公告)日：2012-09-06
申请号：US13406548
申请日：2012-02-28
申请人： Norihiro UEMURA , Hidekazu MIYAKE , Isao SUZUMURA , Takeshi KURIYAGAWA
发明人： Norihiro UEMURA , Hidekazu MIYAKE , Isao SUZUMURA , Takeshi KURIYAGAWA
IPC分类号： H01L29/786 , H01L33/08
CPC分类号： H01L29/78669 , H01L29/78609 , H01L29/78678
摘要： Disclosed is a display device including: a gate electrode; a semiconductor layer formed into an island shape on an upper side of the gate electrode; a side wall oxide film formed on a lateral surface of the semiconductor layer; and a drain electrode and a source electrode formed on an upper side of the semiconductor layer extending from a lateral side of the semiconductor layer, wherein the side wall oxide film has a thickness of 2.1 nm or more.
摘要翻译：公开了一种显示装置，包括：栅电极; 在栅电极的上侧形成为岛状的半导体层; 形成在半导体层的侧表面上的侧壁氧化膜; 以及形成在半导体层的从半导体层的侧面延伸的上侧的漏电极和源电极，其中，所述侧壁氧化膜的厚度为2.1nm以上。

6. 发明申请

US20110254006A1 DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF 有权
标题翻译：显示装置及其制造方法
公开(公告)号：US20110254006A1
公开(公告)日：2011-10-20
申请号：US13085517
申请日：2011-04-13
申请人： Takeshi KURIYAGAWA , Jun Fujiyoshi
发明人： Takeshi KURIYAGAWA , Jun Fujiyoshi
IPC分类号： H01L33/36 , H01L33/16 , H01L33/08
CPC分类号： H01L33/42 , H01L27/124 , H01L29/4908
摘要： A display device in which a plurality of gate wires and a plurality of drain wires that intersect the gate wires are provided, and thin film transistors connected to the gate wires and the drain wires are formed for respective pixel regions. At least one of the gate wires, the drain wires, and lead wires drawn from the gate wires or the drain wires is formed of a light-transmitting patterned conductive film. The light-transmitting patterned conductive film is formed of at least a first light-transmitting patterned conductive film, and a second light-transmitting patterned conductive film laminated on the first light-transmitting patterned conductive film. The second light-transmitting patterned conductive film is formed of a conductive film for coating only the surface of the first light-transmitting patterned conductive film including its side wall surface.
摘要翻译：设置有与栅极布线相交的多个栅极布线和多个漏极布线的显示装置，并且为各像素区域形成与栅极布线和漏极布线连接的薄膜晶体管。栅极线，漏极线以及从栅极线或漏极导线引出的引线中的至少一个由透光图案化的导电膜形成。透光图案化导电膜由至少第一透光图案化导电膜和层压在第一透光图案化导电膜上的第二透光图案化导电膜形成。第二透光图案化导电膜由仅用于涂覆包括其侧壁表面的第一透光图案化导电膜的表面的导电膜形成。

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