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    • 5. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20060273373A1
    • 2006-12-07
    • US11422404
    • 2006-06-06
    • Susumu InoueYutaka Maruo
    • Susumu InoueYutaka Maruo
    • H01L29/788
    • H01L29/7883H01L27/11558H01L29/40114H01L29/42324H01L29/66825
    • A semiconductor device, includes: a non-volatile memory element, wherein the non-volatile memory element includes: a first region; a second region formed adjacent to the first region; and a third region formed adjacent to the second region; and the non-volatile memory element includes: a semiconductor layer; an isolation insulating layer provided on the semiconductor layer and defines a forming region of the non-volatile memory element; a first diffused layer formed on the semiconductor layer in the first region; a first source region and a first drain region formed on the first diffused layer; a second diffused layer spaced apart from the first diffused layer and formed on the semiconductor layer at a periphery of the first diffused layer and the second region; a third diffused layer formed on the semiconductor layer in the third region; a second source region and a second drain region formed on the third diffused layer; a first insulating layer formed above the semiconductor layer in the forming region of the non-volatile memory element; and a first conductive layer provided above the first insulating layer.
    • 一种半导体器件,包括:非易失性存储元件,其中所述非易失性存储元件包括:第一区域; 与所述第一区域相邻形成的第二区域; 以及与所述第二区域相邻形成的第三区域; 并且所述非易失性存储元件包括:半导体层; 隔离绝缘层,设置在所述半导体层上并限定所述非易失性存储元件的形成区域; 在所述第一区域中形成在所述半导体层上的第一扩散层; 形成在第一扩散层上的第一源区和第一漏区; 与第一扩散层间隔开并形成在第一扩散层和第二区域的周边的半导体层上的第二扩散层; 第三扩散层,形成在所述第三区域中的所述半导体层上; 形成在第三扩散层上的第二源区和第二漏区; 在所述非易失性存储元件的形成区域中形成在所述半导体层上方的第一绝缘层; 以及设置在第一绝缘层上方的第一导电层。
    • 8. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US06989305B2
    • 2006-01-24
    • US10636582
    • 2003-08-08
    • Susumu Inoue
    • Susumu Inoue
    • H01L21/8247
    • H01L27/11568H01L27/115Y10S438/954
    • A method of manufacturing a semiconductor device including a memory region in which non-volatile memory devices are arranged in a matrix form of a plurality of rows and a plurality of columns to form a memory cell array, the method including the steps of: forming a gate insulation layer, a conductive layer that will form a word gate, and a stopper layer above a semiconductor layer; forming a first insulation layer over the entire surface of the memory region; forming a first control gate in the form of a side wall on each of both side surfaces of the word gate, with the first insulation layer interposed with respect to the semiconductor layer; etching the surface of the first control gate; using that first control gate as a mask to remove part of the first insulation layer, thus forming a second insulation layer; forming a third conductive layer over the entire surface of the memory region; and forming a second control gate on the side surface of the first control gate, with the second insulation layer interposed with respect to the semiconductor layer, by anisotropic etching of the third conductive layer.
    • 一种制造半导体器件的方法,该半导体器件包括存储区域,其中非易失性存储器件以多行和多列的矩阵形式排列以形成存储单元阵列,该方法包括以下步骤:形成 栅极绝缘层,将形成字栅的导电层和半导体层上方的阻挡层; 在所述存储区域的整个表面上形成第一绝缘层; 在所述字栅的两个侧表面中的每一个上形成侧壁形式的第一控制栅极,所述第一绝缘层相对于所述半导体层插入; 蚀刻第一控制栅极的表面; 使用该第一控制栅极作为掩模去除第一绝缘层的一部分,从而形成第二绝缘层; 在所述存储区的整个表面上形成第三导电层; 以及通过所述第三导电层的各向异性蚀刻,在所述第一控制栅极的侧表面上形成第二控制栅极,所述第二绝缘层相对于所述半导体层插入。