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    • 5. 发明授权
    • Manufacturing method of planar optical waveguide device with grating structure
    • 具有光栅结构的平面光波导器件的制造方法
    • US08404133B2
    • 2013-03-26
    • US12547115
    • 2009-08-25
    • Ken SakumaKensuke OgawaKazuhiro GoiYong Tsong TanNing GuanMingbin YuHwee Gee TeoGuo-Qiang Lo
    • Ken SakumaKensuke OgawaKazuhiro GoiYong Tsong TanNing GuanMingbin YuHwee Gee TeoGuo-Qiang Lo
    • C03C15/00
    • G02B6/124
    • A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.
    • 一种平面光波导装置的制造方法,其特征在于,芯体具有多个交替设置的翅片部和谷部,以形成其中谷部的芯宽沿纵向变化的格栅结构,该方法包括: 形成高折射率材料层的高折射率材料层形成步骤; 在高折射率材料层上形成光致抗蚀剂层的光致抗蚀剂层形成步骤; 使用相移光掩模在光致抗蚀剂层上形成阴影部分的第一曝光步骤; 第二曝光步骤,使用二元光掩模在所述光致抗蚀剂层上形成阴影部分; 显影光致抗蚀剂层的显影步骤; 以及使用由显影步骤产生的光致抗蚀剂图案来蚀刻高折射率材料层的蚀刻步骤。
    • 8. 发明授权
    • Light emitting device and illumination device
    • 发光装置及照明装置
    • US08053970B2
    • 2011-11-08
    • US12369351
    • 2009-02-11
    • Naoki KimuraRyuji SuzukiKen SakumaNaoto Hirosaki
    • Naoki KimuraRyuji SuzukiKen SakumaNaoto Hirosaki
    • H05B33/14
    • C09K11/7734C09K11/7774H01L33/502H01L2224/45144H01L2224/48091Y02B20/181H01L2924/00014H01L2924/00
    • An LED with a semiconductor light emitting element that emits a blue or a blue-violet light, and a fluorescent material that absorbs some or all of the light emitted from the element and emits a fluorescent light of a wavelength different from the absorbed light. The fluorescent material is a mixed fluorescent material obtained by mixing a first fluorescent material that emits a blue-green or a green light, a second fluorescent material that has a peak emission wavelength longer than that of the first fluorescent material and emits a green or a yellow-green light, a third fluorescent material that has a 1 peak emission wavelength longer than that of the second fluorescent material and emits a yellow-green, a yellow or a yellow-red light, and a fourth fluorescent material that has a peak emission wavelength longer than that of the third fluorescent material and emits a yellow-red or a red light.
    • 具有发射蓝色或蓝紫色光的半导体发光元件的LED以及吸收从元件发射的一些或全部光并发射与吸收光不同的波长的荧光的荧光材料。 荧光材料是通过混合发射蓝绿色或绿色光的第一荧光材料获得的混合荧光材料,具有比第一荧光材料的峰值发射波长长的发光波长的第二荧光材料,并发出绿色或 黄绿色光,具有比第二荧光材料长的1个峰值发射波长并发射黄绿色,黄色或黄色 - 红色光的第三荧光材料,以及具有峰值发光的第四荧光材料 波长比第三荧光材料长,并发出黄红色或红色光。