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    • 5. 发明授权
    • Fine movement mechanism unit and scanning probe microscope
    • 精细运动机构单元和扫描探针显微镜
    • US06229607B1
    • 2001-05-08
    • US09182048
    • 1998-10-29
    • Takashi ShiraiKen MurayamaTakafumi MorimotoHiroshi KurodaHarumasa Onozato
    • Takashi ShiraiKen MurayamaTakafumi MorimotoHiroshi KurodaHarumasa Onozato
    • G01B1114
    • G01Q10/04Y10S977/87
    • A fine movement mechanism unit is configured by a supporting member, two fixed sections fixed to this supporting member, two pairs of parallel-plate flexural sections disposed between the two fixed sections, an X fine movement mechanism, a Y fine movement mechanism, and a Z fine movement mechanism. The X fine movement mechanism has an X moving section movable in an X direction, connected to each of the two fixed sections through the two pairs of parallel-plate flexural sections, and two X direction piezoelectric actuators causing the X moving section to move. The Y fine movement mechanism arranged to the X moving section, has other two pairs of parallel-plate flexural sections, a Y moving section movable in the Y direction, connected to the X moving section through the other two pairs of parallel-plate flexural sections, and two Y direction piezoelectric actuators causing the Y moving section to move relatively to the X moving section. The Z fine movement mechanism arranged to the Y moving section, has a Z moving section movable in a Z direction perpendicular to both of the X and Y directions, and a Z direction piezoelectric actuator causing the Z moving section to move.
    • 精细运动机构单元由支撑构件构成,固定在该支撑构件上的两个固定部,设置在两个固定部之间的两对平行板弯曲部,X微移动机构,Y细移动机构和 Z精细机芯。 X精细机构具有可沿X方向移动的X移动部,通过两对平行板弯曲部连接到两个固定部中的每一个,以及使X移动部移动的两个X方向压电致动器。 设置在X移动部分上的Y细移动机构具有其他两对平行板弯曲部分,Y方向移动的Y移动部分,通过另外两对平行板弯曲部分连接到X移动部分 以及两个Y方向的压电致动器,其使Y移动部相对于X移动部移动。 配置在Y移动部上的Z细移动机构具有能够沿与X方向和Y方向垂直的Z方向移动的Z移动部,Z方向的压电致动器使Z移动部移动。