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1. 发明授权

US07243441B2 Method and apparatus for measuring depth of holes formed on a specimen 失效
标题翻译：用于测量在样品上形成的孔深度的方法和装置
公开(公告)号：US07243441B2
公开(公告)日：2007-07-17
申请号：US10986878
申请日：2004-11-15
申请人： Masahiro Watanabe , Takenori Hirose , Yukio Kembo , Yoshiyuki Nagano , Takafumi Morimoto
发明人： Masahiro Watanabe , Takenori Hirose , Yukio Kembo , Yoshiyuki Nagano , Takafumi Morimoto
IPC分类号： G01B5/00
CPC分类号： G01Q30/02 , G01B11/0625 , G01Q30/04
摘要： A method an apparatus for measuring the depths of many fine holes formed in the surface of a sample by etching. Positional information on a plurality of hole patterns is acquired by scanning, with a stylus, the surface of the sample in which the hole patterns are formed by etching. The depths of the plurality of hole patterns are measured by scanning, with the stylus, bottom faces of the plurality of hole patterns and the surface of the sample in the respective vicinities of the hole patterns on the basis of the positional information that has been acquired. Information on distribution of the depths of the plurality of hole patterns is displayed on a screen on the basis of information on the measured depths of the plurality of hole patterns and the positional information on each of the hole patterns.
摘要翻译：一种用于通过蚀刻来测量在样品表面形成的许多细孔的深度的装置的方法。通过用触笔扫描其中通过蚀刻形成孔图案的样品的表面来获取关于多个孔图案的位置信息。基于已经获得的位置信息，通过使用触针将多个孔图案的底面和孔图案的各附近的样品表面扫描来测量多个孔图案的深度。基于关于多个孔图案的测量深度的信息和关于每个孔图案的位置信息的信息，在屏幕上显示关于多个孔图案的深度分布的信息。

2. 发明授权

US06523765B1 Automatically operated shovel and stone crushing system comprising the same 失效
标题翻译：包括其的自动铲铲破碎系统
公开(公告)号：US06523765B1
公开(公告)日：2003-02-25
申请号：US09424061
申请日：1999-11-18
申请人： Toru Kurenuma , Akira Hashimoto , Kazuhiro Sugawara , Yoshiyuki Nagano , Hideto Ishibashi
发明人： Toru Kurenuma , Akira Hashimoto , Kazuhiro Sugawara , Yoshiyuki Nagano , Hideto Ishibashi
IPC分类号： B02C1900
CPC分类号： E02F9/205 , E02F3/437 , E02F3/438 , E02F9/2037 , E02F9/2041 , E02F9/26
摘要： An automatically operated shovel, which includes a power shovel and an automatic operation controller 50 for making the power shovel reproduce a series of taught operations ranging from digging to dumping, is characterized in that the automatic operation controller is provided with a positioning determination means 511 for determining whether or not the power shovel has reached within a taught position range predetermined based on corresponding one of positioning accuracies set for individual taught positions of said power shovel, and, when the power shovel is determined to have reached within the predetermined taught position range, the automatic operation controller outputs a next taught position as a target position.
摘要翻译：包括铲斗和自动操作控制器50的自动操作铲子，用于使铲斗再现从挖掘到倾倒的一系列教导操作，其特征在于，自动操作控制器设置有定位确定装置511，用于确定铲斗是否已经达到在基于对于所述铲斗的各个教导位置设定的定位精度的预定的教导位置范围内，并且当确定铲车已经达到预定教导位置范围内时，自动运行控制器输出下一个教导位置作为目标位置。

3. 发明申请

US20050183282A1 Method and apparatus for measuring depth of holes formed on a specimen 失效
标题翻译：用于测量在样品上形成的孔深度的方法和装置
公开(公告)号：US20050183282A1
公开(公告)日：2005-08-25
申请号：US10986878
申请日：2004-11-15
申请人： Masahiro Watanabe , Takenori Hirose , Yukio Kembo , Yoshiyuki Nagano , Takafumi Morimoto
发明人： Masahiro Watanabe , Takenori Hirose , Yukio Kembo , Yoshiyuki Nagano , Takafumi Morimoto
IPC分类号： H01L21/28 , G01B3/22 , G01B11/06 , G01N13/16 , G12B21/08 , H01L21/3065 , H01L21/66 , H01L21/768 , H01L23/522
CPC分类号： G01Q30/02 , G01B11/0625 , G01Q30/04
摘要： The invention relates to a method and an apparatus for measuring the depths of many fine holes formed in the surface of a sample by etching. Positional information on a plurality of hole patterns is acquired by scanning with a stylus the surface of the sample in which the hole patterns are formed by etching, the depths of the plurality of hole patterns are measured by scanning with the stylus bottom faces of the plurality of hole patterns and the surface of the sample in the respective vicinities of the hole patterns on the basis of the positional information, and information on distribution of the depths of the plurality of hole patterns is displayed on a screen on the basis of information on the measured depths of the plurality of hole patterns and the positional information on each of the hole patterns.
摘要翻译：本发明涉及通过蚀刻来测量在样品表面形成的许多细孔的深度的方法和装置。通过用触笔扫描通过蚀刻形成孔图案的样品的表面来获取多个孔图案的位置信息，通过用多个孔的触针底面进行扫描来测量多个孔图案的深度基于位置信息在孔图案的各附近的孔图案和样品的表面，并且关于多个孔图案的深度分布的信息基于关于该图案的信息显示在屏幕上多个孔图案的测量深度和每个孔图案上的位置信息。

4. 发明授权

US06732458B2 Automatically operated shovel and stone crushing system comprising same 失效
标题翻译：自动铲铲破碎系统，包括相同的破碎机
公开(公告)号：US06732458B2
公开(公告)日：2004-05-11
申请号：US10254681
申请日：2002-09-26
申请人： Toru Kurenuma , Akira Hashimoto , Kazuhiro Sugawara , Yoshiyuki Nagano , Hideto Ishibashi
发明人： Toru Kurenuma , Akira Hashimoto , Kazuhiro Sugawara , Yoshiyuki Nagano , Hideto Ishibashi
IPC分类号： E02F502
CPC分类号： E02F9/205 , E02F3/437 , E02F3/438 , E02F9/2037 , E02F9/2041 , E02F9/26
摘要： An automatically operated shovel, which includes a power shovel and an automatic operation controller 50 for making the power shovel reproduce a series of taught operations ranging from digging to dumping, is characterized in that the automatic operation controller is provided with a positioning determinator for determining whether or not the power shovel has reached within a taught position range predetermined based on corresponding one of positioning accuracies set for individual taught positions of said power shovel, and, when the power shovel is determined to have reached within the predetermined taught position range, the automatic operation controller outputs a next taught position as a target position.
摘要翻译：一种自动操作的挖掘机，其包括铲斗和用于使铲斗再现从挖掘到倾倒的一系列教导操作的自动操作控制器50，其特征在于，自动操作控制器设置有定位确定器，用于确定是否或者不是铲斗已经达到在基于为所述铲斗的各个教导位置设定的定位精度的相应一个预定的教导位置范围内，并且当确定铲车已经达到预定教导位置范围内时，自动操作控制器输出下一个教导位置作为目标位置。

5. 发明申请

US20050012936A1 Scanning probe microscope and measurement method using the same 失效
标题翻译：扫描探针显微镜和测量方法使用相同
公开(公告)号：US20050012936A1
公开(公告)日：2005-01-20
申请号：US10893364
申请日：2004-07-19
申请人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
发明人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
IPC分类号： G01B21/30 , G01B11/24 , G01B11/30 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q30/04 , G01Q30/20 , G01Q60/24 , H01L21/66
CPC分类号： G01Q20/02 , G01Q30/06 , G01Q70/04
摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
摘要翻译：扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面样品。上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中，通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配测量姿势。

6. 发明授权

US07350404B2 Scanning type probe microscope and probe moving control method therefor 失效
标题翻译：扫描型探针显微镜及探头移动控制方法
公开(公告)号：US07350404B2
公开(公告)日：2008-04-01
申请号：US10569373
申请日：2004-08-27
申请人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
发明人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
IPC分类号： G21K7/00 , G01B5/18
CPC分类号： G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要： The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.
摘要翻译：扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。当探针尖端扫描样品的表面时，测量探针尖端和样品之间发生的原子力。 X，Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。通过简单的控制，可以在测量样品表面上具有不均匀形状的测量梯度的部分时，保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。

7. 发明授权

US06317669B1 Automatically operated shovel 失效
标题翻译：自动铲
公开(公告)号：US06317669B1
公开(公告)日：2001-11-13
申请号：US09697423
申请日：2000-10-27
申请人： Tooru Kurenuma , Yoshiyuki Nagano , Hideto Ishibashi
发明人： Tooru Kurenuma , Yoshiyuki Nagano , Hideto Ishibashi
IPC分类号： E02F920
CPC分类号： E02F9/2041 , E02F3/434 , E02F3/438 , E02F9/2029
摘要： An automatically operated shovel has a shovel and an automatic operation controller arranged on the shovel to store by a teaching operation plural working positions of the shovel, which comprises at least a digging position, and also to cause by a reproduction operation the shovel to repeatedly perform a series of reproduction operations on the basis of the stored plural working positions. The automatic operation controller is provided with servo control means for outputting, as a servo control quantity, a sum of a compliance control quantity and a pressure control quantity. The compliance control quantity is obtained by multiplying with a stiffness gain a difference between a target position of each operational element of the shovel, the target position comprising angle information indicative of an operational target of the operational element, and a current position of the operational element, the current position comprising current angle information on the operational element. The pressure control quantity is obtained by multiplying with a pressure gain a difference between a target pressure, which serves as a target when the operational element of the shovel is in contact with an object under digging, and a current pressure of the operational element. The stiffness gain and the pressure gain are settable at varied values depending on the working positions.
摘要翻译：自动操作的铲铲具有铲子和自动操作控制器，其布置在挖掘机上以通过教学操作存储铲斗的多个工作位置，其至少包括挖掘位置，并且还通过铲斗重复执行的再现操作基于存储的多个工作位置进行一系列再现操作。自动操作控制器设置有用于作为伺服控制量输出合规控制量和压力控制量的总和的伺服控制装置。通过将刚度增益与挖掘机的每个操作元件的目标位置之差（包括指示操作元件的操作目标的角度信息的目标位置）与操作元件的当前位置当前位置包括关于操作元件的当前角度信息。压力控制量通过将当铲斗的操作元件与挖掘物体接触的目标压力作为目标压力与作业元件的当前压力之间的压力乘以压力增益而获得。刚度增益和压力增益可根据工作位置设定在不同的值。

8. 发明授权

US07333191B2 Scanning probe microscope and measurement method using the same 失效
标题翻译：扫描探针显微镜和测量方法使用相同
公开(公告)号：US07333191B2
公开(公告)日：2008-02-19
申请号：US10893364
申请日：2004-07-19
申请人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
发明人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
IPC分类号： G01B1/00
CPC分类号： G01Q20/02 , G01Q30/06 , G01Q70/04
摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
摘要翻译：扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面样品。上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中，通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配测量姿势。

9. 发明申请

US20070180889A1 Probe replacement method for scanning probe microscope 审中-公开
标题翻译：用于扫描探针显微镜的探头更换方法
公开(公告)号：US20070180889A1
公开(公告)日：2007-08-09
申请号：US10565509
申请日：2004-03-22
申请人： Ken Murayama , Yokio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Takashi Furutani
发明人： Ken Murayama , Yokio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Takashi Furutani
IPC分类号： G12B21/00 , G01N13/10
CPC分类号： G01Q10/06 , G01Q30/06 , G01Q70/02
摘要： A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). In a first step, a cantilever is selected from the cantilever cassette and is mounted on the cantilever mount. In a second step, an optical microscope is moved and the mounted cantilever is set in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.
摘要翻译：一种用于测量具有具有探针（20）的悬臂（21）的样品表面的扫描探针显微镜的探针替换方法和用于测量探针和样品之间的物理量的测量单元。扫描探针显微镜具有用于移动悬臂盒的悬臂安装座（22），悬臂盒（30），XY台（14）和Z台（15）以及光学显微镜（18）。在第一步中，从悬臂盒中选择悬臂，并安装在悬臂安装座上。在第二步骤中，移动光学显微镜，并且在将悬臂安装在扫描探针显微镜中之后，将安装的悬臂设置在视野中的规定位置。在第二步骤中，提供移动光学显微镜侧或悬臂侧并执行位置调整的步骤。

10. 发明申请

US20060284083A1 Scanning type probe microscope and probe moving control method therefor 失效
标题翻译：扫描型探针显微镜及探头移动控制方法
公开(公告)号：US20060284083A1
公开(公告)日：2006-12-21
申请号：US10569373
申请日：2004-08-27
申请人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Yuuichi , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
发明人： Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Yuuichi , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
IPC分类号： G21K7/00
CPC分类号： G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要： The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.
摘要翻译：扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。当探针尖端扫描样品的表面时，测量探针尖端和样品之间发生的原子力。 X，Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。通过简单的控制，可以在测量样品表面上具有不均匀形状的测量梯度的部分时，保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。

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