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    • 1. 发明申请
    • Positive type radiation-sensitive resin composition
    • 正型辐射敏感树脂组合物
    • US20060223010A1
    • 2006-10-05
    • US11391257
    • 2006-03-29
    • Takayuki TsujiTomoki NagaiKentarou HaradaDaisuke Shimizu
    • Takayuki TsujiTomoki NagaiKentarou HaradaDaisuke Shimizu
    • G03C5/00
    • G03F7/0045G03F7/0392Y10S430/114
    • A positive type radiation-sensitive resin composition suitable as a chemically-amplified resist sensitive to active radiation particularly to deep ultraviolet rays represented by a KrF excimer laser, an ArF excimer laser, or an F2 excimer laser, excelling particularly in a process margin for the KrF excimer laser is provided. The positive type radiation-sensitive resin composition comprises a photoacid generator and an acid-labile group-containing resin which is insoluble or scarcely soluble in alkali, but becomes alkali-soluble by the action of an acid, wherein the photoacid generator is a mixed photoacid generator containing a photoacid generator of the following formula (1) and a photoacid generator which is at least one compound selected from sulfonyloxyimide and disulfonyldiazomethane.
    • 适合作为对活性辐射敏感的化学增幅抗蚀剂的正型辐射敏感树脂组合物,特别是由KrF准分子激光器,ArF准分子激光器或F 2激子准分子激光器表示的深紫外线, 提供特别是在KrF准分子激光器的工艺余量中优异。 正型辐射敏感性树脂组合物包含光酸产生剂和不溶于或几乎不溶于碱的酸不稳定基团的树脂,但通过酸的作用而变成碱溶性,其中光酸产生剂是混合的光酸 含有下式(1)的光致酸产生剂和光酸产生剂,其为选自磺酰氧基酰亚胺和二磺酰基重氮甲烷中的至少一种化合物。
    • 2. 发明授权
    • Positive type radiation-sensitive resin composition
    • 正型辐射敏感树脂组合物
    • US07488566B2
    • 2009-02-10
    • US11391257
    • 2006-03-29
    • Takayuki TsujiTomoki NagaiKentarou HaradaDaisuke Shimizu
    • Takayuki TsujiTomoki NagaiKentarou HaradaDaisuke Shimizu
    • G03F7/00G03F7/004
    • G03F7/0045G03F7/0392Y10S430/114
    • A positive type radiation-sensitive resin composition suitable as a chemically-amplified resist sensitive to active radiation particularly to deep ultraviolet rays represented by a KrF excimer laser, an ArF excimer laser, or an F2 excimer laser, excelling particularly in a process margin for the KrF excimer laser is provided. The positive type radiation-sensitive resin composition comprises a photoacid generator and an acid-labile group-containing resin which is insoluble or scarcely soluble in alkali, but becomes alkali-soluble by the action of an acid, wherein the photoacid generator is a mixed photoacid generator containing a photoacid generator of the following formula (1) and a photoacid generator which is at least one compound selected from sulfonyloxyimide and disulfonyldiazomethane.
    • 适合作为对活性辐射敏感的化学放大抗蚀剂的正型辐射敏感性树脂组合物,特别是由KrF准分子激光器,ArF准分子激光器或F2准分子激光器表示的深紫外线,特别优选在 提供KrF准分子激光器。 正型辐射敏感性树脂组合物包含光酸产生剂和不溶于或几乎不溶于碱的酸不稳定基团的树脂,但通过酸的作用而变成碱溶性,其中光酸产生剂是混合的光酸 含有下式(1)的光致酸产生剂和光酸产生剂,其为选自磺酰氧基酰亚胺和二磺酰基重氮甲烷中的至少一种化合物。
    • 3. 发明授权
    • Positive-tone radiation-sensitive resin composition
    • 正色辐射敏感树脂组合物
    • US07258962B2
    • 2007-08-21
    • US11117344
    • 2005-04-29
    • Tomoki NagaiTakayuki Tsuji
    • Tomoki NagaiTakayuki Tsuji
    • G03F7/004G03F7/30
    • G03F7/0045G03F7/0392Y10S430/106Y10S430/115Y10S430/121Y10S430/127
    • A positive-tone radiation-sensitive resin composition comprising: (A) a carbazole derivative shown by the following formula (1), (B) a photoacid generator containing a sulfonimide compound and an iodonium salt compound as essential components, and (C) an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali, but becomes soluble in alkali when the acid-dissociable group dissociates is disclosed. wherein R1 and R2 are individually halogen atom, methyl, cyano, or nitro group, X is a C1-20 organic group, and h and i are 0-4. The resin composition is useful as a chemically amplified positive-tone resist excelling in focal depth allowance, sensitivity, resolution, pattern profile, and PED stability.
    • 1.一种正色射线敏感性树脂组合物,其含有:(A)下述式(1)表示的咔唑衍生物,(B)含有磺酰亚胺化合物和碘鎓盐化合物作为必要成分的光酸产生剂,(C) 公开了酸解离基团的树脂,其不溶于或几乎不溶于碱,但在酸解离基解离时变得可溶于碱。 其中R 1和R 2各自为卤素原子,甲基,氰基或硝基,X为C 1-20官能团, 而h和i为0-4。 该树脂组合物可用作具有优异的焦深度余量,灵敏度,分辨率,图案分布和PED稳定性的化学放大正色调抗蚀剂。
    • 5. 发明授权
    • Object type determination apparatus, vehicle, object type determination method, and program for determining object type
    • 对象类型确定装置,车辆,对象类型确定方法和用于确定对象类型的程序
    • US08306263B2
    • 2012-11-06
    • US12218517
    • 2008-07-16
    • Nobuharu NagaokaMakoto AimuraTakayuki Tsuji
    • Nobuharu NagaokaMakoto AimuraTakayuki Tsuji
    • G06K9/00
    • G06K9/00369G06K9/00805
    • An object type determination apparatus, an object type determination method, a vehicle, and a program for determining an object type, capable of accurately determining the type of the object by appropriately determining periodicity in movement of the object from images, are provided. The object type determination apparatus includes an object area extracting means (11) for extracting an area of an object from an image picked up by an image pick-up means (2R, 2L), an object end point extracting means (12) for extracting an end point of an image portion of the object from the extracted object area, an object periodicity determination means (13) for calculating time series data of a feature value representing a size of the object using the end point of the image portion of the object extracted by the object end point extracting means (12) from the area of the object extracted by the object area extracting means (11) for respective ones of time series images picked up by the image pick-up means (2R, 2L) to determine whether the feature value changes with prescribed periodicity, and a living body determination means (14) for determining the object having the feature value determined to change with periodicity as a living body.
    • 提供了一种对象类型确定装置,对象类型确定方法,车辆和用于确定对象类型的程序,能够通过从图像适当地确定对象的移动周期来精确地确定对象的类型。 对象类型确定装置包括:对象区域提取装置,用于从由图像拾取装置(2R,2L)拾取的图像中提取对象的区域;对象终点提取装置(12),用于提取 来自提取的对象区域的对象的图像部分的终点;对象周期性确定装置(13),用于使用对象的图像部分的终点来计算表示对象的大小的特征值的时间序列数据 由对象终点提取装置(12)从由对象区域提取装置(11)提取的对象区域针对由图像拾取装置(2R,2L)拾取的各个时间序列图像提取出来,以确定 所述特征值是否以规定的周期性变化,以及生物体确定装置(14),用于确定被确定为周期性变化的特征值的物体作为活体。
    • 9. 发明授权
    • Vehicle surroundings monitoring apparatus, vehicle surroundings monitoring method, and vehicle surroundings monitoring program
    • 车辆环境监测装置,车辆周边监测方法和车辆环境监测程序
    • US07671725B2
    • 2010-03-02
    • US11717565
    • 2007-03-13
    • Takayuki TsujiNobuharu NagaokaYoichi SugimotoMorimichi Nishigaki
    • Takayuki TsujiNobuharu NagaokaYoichi SugimotoMorimichi Nishigaki
    • B60Q1/00
    • G06K9/00369G06K9/00791
    • A vehicle surroundings monitoring apparatus, a vehicle surroundings monitoring method, and a vehicle surroundings monitoring program which can rapidly determine an object such as a pedestrian to be avoided which must be avoided from coming into contact with the vehicle from an image of the surroundings of the vehicle and can provide information to a driver or control the vehicle behaviors. The vehicle surroundings monitoring apparatus includes an object extraction process unit (11) which extracts objects existing around a vehicle (10) from images taken by infrared cameras (2R, 2L), a pedestrian extraction process unit (12) which extracts a pedestrian from the extracted objects, a posture determination process unit (13) which determines the posture of the extracted pedestrian, an object-to-be-avoided determination process unit (14) which determines whether the extracted object is an object to be avoided which must be avoided from coming into contact with the vehicle (10) by executing a determination algorithm including at least a first determination process on the posture of the pedestrian determined by the posture determination process unit (13), and a vehicle equipment control process unit (15) which controls equipment of the vehicle (10) at least according to the determination result of the object-to-be-avoided determination process unit (14).
    • 一种车辆周边监视装置,车辆环境监视方法以及车辆周边监视程序,其能够快速地确定要避免的对象,所述对象应当避免与所述车辆的环境的图像接触而与车辆接触 车辆,并可向驾驶员提供信息或控制车辆行为。 车辆周边监视装置包括从红外线摄像机(2R,2L)拍摄的图像中提取车辆(10)周围存在的物体的物体提取处理单元(11),从步行者提取处理单元(12) 提取的对象,确定所提取的行人的姿势的姿势确定处理单元(13),确定提取的对象是否必须避免的对象的避免对象的确定处理单元(14) 通过执行至少包括由姿势判定处理单元(13)确定的行人姿势的第一确定处理的确定算法,以及车辆设备控制处理单元(15),与车辆(10)接触,车辆设备控制处理单元 至少根据对象对象确定处理单元(14)的确定结果控制车辆(10)的设备。