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1. 发明授权

US06522003B1 Semiconductor device and method of manufacturing the same 失效
标题翻译：半导体装置及其制造方法
公开(公告)号：US06522003B1
公开(公告)日：2003-02-18
申请号：US09472833
申请日：1999-12-28
申请人： Takayoshi Minami , Osamu Tsuboi , Toshimi Ikeda , Masato Matsumiya , Kuninori Kawabata
发明人： Takayoshi Minami , Osamu Tsuboi , Toshimi Ikeda , Masato Matsumiya , Kuninori Kawabata
IPC分类号： H01L2348
CPC分类号： G03F7/70633 , G03F9/7084 , H01L23/522 , H01L23/544 , H01L27/10882 , H01L27/10897 , H01L2223/54426 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device characterized by comprising a first insulating film formed on the semiconductor substrate, a first wiring or mark formed on the first insulating film, an electrically isolated pattern formed under the first insulating film and below the first wiring or mark, a hole formed in the first insulating film to connect the first wiring or mark and the electrically isolated pattern, and a second insulating film for covering the first wiring or mark.
摘要翻译：一种半导体器件，其特征在于，包括形成在所述半导体衬底上的第一绝缘膜，形成在所述第一绝缘膜上的第一布线或标记，形成在所述第一绝缘膜下方且在所述第一布线或标记下方的电隔离图案，用于连接第一布线或标记和电隔离图案的第一绝缘膜，以及用于覆盖第一布线或标记的第二绝缘膜。

2. 发明授权

US09348135B2 Micro movable device and optical switching apparatus 有权
标题翻译：微动移动装置和光开关装置
公开(公告)号：US09348135B2
公开(公告)日：2016-05-24
申请号：US12555246
申请日：2009-09-08
申请人： Tsuyoshi Matsumoto , Norinao Kouma , Osamu Tsuboi
发明人： Tsuyoshi Matsumoto , Norinao Kouma , Osamu Tsuboi
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B2201/042
摘要： A micro movable device includes: a micro movable substrate including a micro movable unit, the micro movable unit including a frame section, a movable section, and a coupling section which couples the frame section and the movable section to each other; a support base; a first spacer and a second spacer which are provided between the frame section of the micro movable substrate and the base, the first and second spacers joining the frame section and the base to each other; and a fixation member provided between the frame section of the micro movable substrate and the base, the fixation member including a spacer portion which joins the frame section and the base to each other and an adhesive portion which covers the spacer portion and joins the frame section and the base to each other, the fixation member being provided between the first and second spacers.
摘要翻译：微型可移动装置包括：微型可移动基板，包括微型可移动单元，微型可移动单元包括框架部分，可移动部分和将框架部分和可移动部分彼此连接的联接部分; 支持基地第一间隔件和第二间隔件，设置在微移动基板的框架部分和基座之间，第一和第二间隔件将框架部分和基座彼此接合; 以及固定构件，其设置在所述微动移动基板的框架部与所述基座之间，所述固定构件包括将所述框架部与所述基部连结的间隔部，以及覆盖所述间隔部的粘合部，并且所述基座彼此相对，所述固定构件设置在所述第一和第二间隔件之间。

3. 发明授权

US08693083B2 Micromirror unit and method of making the same 有权
标题翻译：微镜单元及其制作方法
公开(公告)号：US08693083B2
公开(公告)日：2014-04-08
申请号：US13336190
申请日：2011-12-23
申请人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
发明人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
IPC分类号： G02B26/00
CPC分类号： B81C1/00142 , B81B3/0078 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/00396 , G02B26/0841 , Y10S359/904
摘要： A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.
摘要翻译：提供了一种用于制造微镜单元的方法，该微镜单元包括框架，反射镜形成基座和将框架连接到反射镜形成基座的桥。该方法包括以下步骤。首先，在基板上形成第一掩模图案，以掩蔽基板的被加工成框架和反射镜形成基座的部分。然后，在衬底上形成第二掩模图案，用于掩蔽加工成桥的衬底部分。然后，以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。然后，选择性地去除第二掩模图案。然后，以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。最后，删除第一个掩模图案。

4. 发明申请

US20120105936A1 MICROMIRROR UNIT AND METHOD OF MAKING THE SAME 有权
标题翻译：微机单元及其制造方法
公开(公告)号：US20120105936A1
公开(公告)日：2012-05-03
申请号：US13336190
申请日：2011-12-23
申请人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
发明人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
IPC分类号： G02B26/00
CPC分类号： B81C1/00142 , B81B3/0078 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/00396 , G02B26/0841 , Y10S359/904
摘要： A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.
摘要翻译：提供了一种用于制造微镜单元的方法，该微镜单元包括框架，反射镜形成基座和将框架连接到反射镜形成基座的桥。该方法包括以下步骤。首先，在基板上形成第一掩模图案，以掩蔽基板的被加工成框架和反射镜形成基座的部分。然后，在衬底上形成第二掩模图案，用于掩蔽加工成桥的衬底部分。然后，以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。然后，选择性地去除第二掩模图案。然后，以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。最后，删除第一个掩模图案。

5. 发明授权

US08107157B2 Micromirror unit and method of making the same 有权
标题翻译：微镜单元及其制作方法
公开(公告)号：US08107157B2
公开(公告)日：2012-01-31
申请号：US11480512
申请日：2006-07-05
申请人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
发明人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
IPC分类号： G02B26/00
CPC分类号： B81C1/00142 , B81B3/0078 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/00396 , G02B26/0841 , Y10S359/904
摘要： A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.
摘要翻译：提供了一种用于制造微镜单元的方法，该微镜单元包括框架，反射镜形成基座和将框架连接到反射镜形成基座的桥。该方法包括以下步骤。首先，在基板上形成第一掩模图案，以掩蔽基板的被加工成框架和反射镜形成基座的部分。然后，在衬底上形成第二掩模图案，用于掩蔽加工成桥的衬底部分。然后，以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。然后，选择性地去除第二掩模图案。然后，以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。最后，删除第一个掩模图案。

6. 发明授权

US08093780B2 Micro-oscillation element with adjustable resonance frequency of oscillating portion 有权
标题翻译：微振荡元件具有振荡部分的共振频率可调
公开(公告)号：US08093780B2
公开(公告)日：2012-01-10
申请号：US11889754
申请日：2007-08-16
申请人： Osamu Tsuboi , Norinao Kouma , Hiromitsu Soneda , Hisao Okuda
发明人： Osamu Tsuboi , Norinao Kouma , Hiromitsu Soneda , Hisao Okuda
IPC分类号： H02N2/00 , G02B26/08
CPC分类号： H02N1/008
摘要： A micro-oscillation element facilitates adjusting the natural frequency relevant to the oscillating motion of the oscillating portion. The micro-oscillation element includes, for example, an oscillating portion, a frame, and a link portion that connects the oscillating portion and the frame. The link portion defines the oscillation axial center of oscillating motion of the oscillating portion with respect to the frame. The oscillating portion includes a main oscillating body, and a weight portion attached to the main oscillating body. The weight portion is movable in a direction intersecting the oscillation axial center.
摘要翻译：微振荡元件有助于调节与振荡部分的振荡运动相关的固有频率。微振荡元件例如包括振荡部分，框架和连接振荡部分和框架的连接部分。连杆部分限定摆动部分相对于框架的摆动运动的振荡轴向中心。摆动部分包括主振动体和附接到主振动体的重物部分。重物部分可在与振动轴心相交的方向上移动。

7. 发明申请

US20110187348A1 POWER STRIP AND ELECTRIC POWER MEASUREMENT SYSTEM 有权
标题翻译：电力条和电力测量系统
公开(公告)号：US20110187348A1
公开(公告)日：2011-08-04
申请号：US13009292
申请日：2011-01-19
申请人： Hiromitsu Soneda , Osamu Tsuboi , Fumihiko Nakazawa , Naoyuki Nagao
发明人： Hiromitsu Soneda , Osamu Tsuboi , Fumihiko Nakazawa , Naoyuki Nagao
IPC分类号： G01R33/07 , G01R19/00
CPC分类号： G01R21/08 , G01R15/202 , G01R15/207 , G01R21/06 , G01R33/07 , H01L2924/181 , H01R13/6658 , H01R13/6683 , H01R25/003 , H01R25/162 , H01R2103/00
摘要： The following disclosure provides a power strip including: a busbar electrically connected to a power source; multiple electrical outlets allowing multiple power plugs to be inserted thereinto, respectively; distribution bars which are branched out from the busbar and respectively supply the electrical outlets with electric currents of the power source; and a plurality of electric current measurement units each configured to measure the electric current flowing through a corresponding one of the distribution bars.
摘要翻译：以下公开内容提供了一种电源板，包括：电连接到电源的母线; 多个电源插座分别插入多个电源插头; 分配杆，其从母线分支并分别以电源的电流向电源供电; 以及多个电流测量单元，每个电流测量单元被配置为测量流过相应的一个分配棒的电流。

8. 发明授权

US07952033B2 Microstructure and microstructure manufacture method 有权
标题翻译：微结构和微结构制造方法
公开(公告)号：US07952033B2
公开(公告)日：2011-05-31
申请号：US12039186
申请日：2008-02-28
申请人： Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
发明人： Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
IPC分类号： H05K1/03
CPC分类号： B81C1/00698 , Y10T29/49117
摘要： A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.
摘要翻译：微结构包括具有第一导体，第二导体和位于第一和第二导体之间的中间绝缘体的层压结构。第一导体包括相对于第二导体的相对面，侧面和形成上述相对面和侧面的边界的边缘部分。第二导体包括延伸超过超过第一导体的边缘部分的延伸面。绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。

9. 发明授权

US07871687B2 Method of making microstructure device, and microstructure device made by the same 有权
标题翻译：制造微结构器件的方法及其制造的微结构器件
公开(公告)号：US07871687B2
公开(公告)日：2011-01-18
申请号：US11902011
申请日：2007-09-18
申请人： Norinao Kouma , Yoshihiro Mizuno , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi , Ippei Sawaki
发明人： Norinao Kouma , Yoshihiro Mizuno , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi , Ippei Sawaki
IPC分类号： B32B3/06 , G02B7/182 , H01L23/58 , G01P3/44 , G01P15/097
CPC分类号： B81C1/00682 , B81B2203/0136 , Y10T428/24025 , Y10T428/2457 , Y10T428/24612
摘要： A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.
摘要翻译：微结构装置是通过加工由例如玻璃，布置在第一和第二处理层之间的第一处理层，第二处理层和中间层。微结构装置包括第一结构部分和第二结构部分，其具有经由间隙面对第一结构部分的部分。第一和第二结构部件通过跨越间隙延伸的连接部分相互连接。该连接部形成在第一处理层中以与中间层接触。微结构装置还包括从第一结构部件朝向第二结构部件延伸的保护部件，反之亦然。保护部分形成在第一或第二处理层中以与中间层接触。

10. 发明申请

US20100208347A1 MICRO MOVABLE DEVICE AND INTERFEROMETER 有权
标题翻译： MICRO可移动设备和干扰仪
公开(公告)号：US20100208347A1
公开(公告)日：2010-08-19
申请号：US12614903
申请日：2009-11-09
申请人： Norinao Kouma , Osamu Tsuboi , Tsuyoshi Matsumoto
发明人： Norinao Kouma , Osamu Tsuboi , Tsuyoshi Matsumoto
IPC分类号： G02B27/00 , H02N1/00
CPC分类号： G02B26/0841 , G01J3/4535 , H02N1/006
摘要： A micro movable device includes a movable member, a stationary portion, and connecting portions each connected to the movable member and the stationary portion. The movable member includes a pair of electrodes. The stationary portion includes a pair of electrodes cooperating with the electrodes of the movable member to generate a driving force for translating the movable member in its thickness direction. The connection points at which the respective connecting portions are connected to the movable member are spaced from each other. The electrodes of the movable member are positioned between two mutually spaced connection points, as viewed along the spacing direction of the two connection points.
摘要翻译：微型可移动装置包括可移动部件，固定部分和连接到可移动部件和固定部分的连接部分。可动构件包括一对电极。固定部分包括与可动构件的电极配合的一对电极，以产生用于在可移动构件的厚度方向上平移的驱动力。各连接部分连接到可移动部件的连接点彼此间隔开。当沿着两个连接点的间隔方向观察时，可动构件的电极位于两个相互间隔的连接点之间。

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