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    • 3. 发明申请
    • Deep ultraviolet laser apparatus
    • 深紫外线激光装置
    • US20070064750A1
    • 2007-03-22
    • US11523028
    • 2006-09-19
    • Yushi KanedaYoshiharu UrataSatoshi WadaShinichi Imai
    • Yushi KanedaYoshiharu UrataSatoshi WadaShinichi Imai
    • H01S3/10
    • H01S3/2375G02F1/3532G02F2001/354H01S3/02H01S3/2383
    • The present invention provides a deep ultraviolet laser apparatus exhibiting high robustness which can generate laser beams in a wavelength region of wavelengths of from 198.3 to 198.8 nm, further may be loaded on a variety of apparatuses as a light source for lighting, and is practicable and a size of the whole structure of thereof is reduced. The deep ultraviolet laser apparatus is arranged in such that laser beams having a wavelength of from 1064 to 1065 nm pulse-output from a first light source is a first fundamental wave; fourth harmonic obtained by wavelength-converting the first fundamental wave by means of a first wave-length conversion means is a second fundamental wave; laser beams having a wavelength of from 1560 to 1570 nm pulse-output from a second light source is a third fundamental wave; second harmonic obtained by wavelength-converting the third fundamental wave by means of a second wave-length conversion means is a fourth fundamental wave; and laser beams having a wavelength of from 198.3 to 198.8 nm which are a sum-frequency light of the second fundamental wave and the fourth fundamental wave are generated by means of a sum-frequency wave generation means.
    • 本发明提供一种能够在198.3〜198.8nm的波长范围内产生激光的高鲁棒性的深紫外线激光装置,还可以作为照明用光源装载在各种装置上,是切实可行的 其整体结构的尺寸减小。 深紫外线激光装置被布置成使得从第一光源脉冲输出的具有1064至1065nm波长的激光束是第一基波; 第二基波是通过第一波长转换装置对第一基波进行波长转换而获得的四次谐波; 从第二光源脉冲输出的具有1560至1570nm波长的激光束是第三基波; 通过第二波长转换装置对第三基波进行波长转换而得到的二次谐波是第四基波; 并且通过和频波产生装置产生作为第二基波和第四基波的和频光的波长为198.3至198.8nm的激光束。
    • 4. 发明申请
    • Deep ultraviolet laser apparatus
    • 深紫外线激光装置
    • US20070064749A1
    • 2007-03-22
    • US11523027
    • 2006-09-19
    • Yushi KanedaYoshiharu UrataSatoshi WadaShinichi Imai
    • Yushi KanedaYoshiharu UrataSatoshi WadaShinichi Imai
    • H01S3/10
    • H01S3/2375G02F1/3532G02F2001/354H01S3/06754H01S3/2383H01S5/00
    • In order to generate efficiently a deep ultraviolet laser beam having a wavelength in a deep ultraviolet region and to make the generated laser beam to be high output, it is arranged in such that a laser beam having about 227 nm wavelength is generated by sum-frequency mixing of fourth harmonic of the laser beams obtained by amplifying semiconductor laser beams having 1064.0 to 1065.0 nm wavelengths by means of an optical fiber amplifier, and the laser beams obtained by amplifying semiconductor laser beams having 1557.0 to 1571.0 nm wavelengths by means of another optical fiber amplifier; and further laser beams having 198.4 to 198.7 nm wavelengths are generated by sum-frequency mixing of the above sum-frequency mixed laser beam and the above-described semiconductor laser beams having 1557.0 to 1571.0 nm wavelengths.
    • 为了有效地生成具有深紫外区域的波长的深紫外激光束,并且使所生成的激光束成为高输出,其布置成使得具有约227nm波长的激光束由和频产生 通过利用光纤放大器对通过放大具有1064.0至1065.0nm波长的半导体激光束获得的激光束的四次谐波的混合,以及通过另一光纤放大具有1557.0至1571.0nm波长的半导体激光束而获得的激光束 放大器 并且通过上述和频混合激光束和上述具有1557.0至1571.0nm波长的半导体激光束的和频混频产生具有198.4至198.7nm波长的另外的激光束。
    • 5. 发明授权
    • Laser device
    • 激光设备
    • US06567442B2
    • 2003-05-20
    • US09779852
    • 2001-02-09
    • Yoshiharu UrataSatoshi WadaHideo Tashiro
    • Yoshiharu UrataSatoshi WadaHideo Tashiro
    • H01S316
    • H01S3/16H01S3/1611H01S3/1643
    • A laser device which has an excellent characteristic originally exerted by an yttrium-aluminum-garnet crystal doped with neodymium and is entirely reduced in size by using an entirely downsized laser medium is provided. The laser device is constituted such that a laser medium is disposed in a resonator, excited light is incident upon the laser medium so as to cause laser oscillation in the resonator, and laser light is emitted from the resonator. An yttrium-aluminum-garnet single crystal is used as the laser medium, in which neodymium is added at a concentration exceeding an atomicity ratio of 1.3%.
    • 本发明提供了一种具有优异特性的激光装置,其特征在于,由掺杂有钕的钇 - 铝 - 石榴石晶体产生的,并且通过使用完全小型化的激光介质,其尺寸完全减小。 激光装置构成为将激光介质设置在谐振器中,激发光入射到激光介质上,从而在谐振器中引起激光振荡,并且从谐振器发射激光。 使用钇 - 铝 - 石榴石单晶作为激光介质,其中以超过原子比为1.3%的浓度添加钕。