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    • 5. 发明申请
    • THIN-FILM CAPACITOR
    • 薄膜电容器
    • US20090244808A1
    • 2009-10-01
    • US12410825
    • 2009-03-25
    • Takashi OHTSUKANobuyuki OKUZAWA
    • Takashi OHTSUKANobuyuki OKUZAWA
    • H01G4/06
    • H01G4/06H01G4/33
    • An object of the present invention is to restrain warpage in a thin-film trench capacitor. A thin-film capacitor includes a substrate, a dielectric film, and a pair of electrodes, and the dielectric film is provided along a concave-convex surface on which are formed a plurality of convex portions extending away from the substrate. The concave-convex surface forms a pattern having one or more divisions arranged in a plane parallel to the main plane of the substrate, and the convex portions are arranged in either parts of the divisions or other parts. At least some of the divisions have parts extending along the x axial direction, and two or more of the extending parts overlap each other and terminate at locations that are different from each other, as viewed from the y axial direction orthogonal to the x axial direction.
    • 本发明的目的是抑制薄膜沟槽电容器的翘曲。 薄膜电容器包括基板,电介质膜和一对电极,并且电介质膜沿着凹凸表面设置,在凸形表面上形成有远离基板延伸的多个凸部。 凹凸表面形成具有一个或多个分隔布置在平行于基板的主平面的平面中的图案,并且凸部布置在分割部分或其它部分的任一部分中。 至少一些分段具有沿x轴方向延伸的部分,并且两个或更多个延伸部分彼此重叠并且在从与x轴方向正交的y轴方向观察时终止于彼此不同的位置 。