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    • 10. 发明授权
    • Optical microcantilever
    • 光学微悬臂梁
    • US07150185B2
    • 2006-12-19
    • US10949952
    • 2004-09-24
    • Takashi NiwaKenji KatoSusumu IchiharaNorio ChibaYasuyuki MitsuokaManabu OumiNobuyuki Kasama
    • Takashi NiwaKenji KatoSusumu IchiharaNorio ChibaYasuyuki MitsuokaManabu OumiNobuyuki Kasama
    • G01N13/14
    • G01Q60/38G01Q60/06G01Q60/22
    • An optical microcantilever for a scanning near field microscope has an optical waveguide for propagating light. The optical waveguide has a longitudinal axis, a light input/output end, a free end opposite to the light input/output end, and a tip formed at the free end of the cantilever and having a microscopic aperture at an end thereof. A support section has a first portion supporting the optical waveguide, a second portion and a third portion. The second portion has an optical element guide channel formed in the support section for supporting an optical element acting on light entering the optical waveguide or on light exiting from the optical waveguide and for determining a position of the optical element. The third portion is disposed between the first portion and the second portion and has a surface disposed at an angle of inclination relative to the longitudinal axis of the optical waveguide. The light input/output end of the optical waveguide projects above the third portion for reducing a coupling loss between the optical element and the optical waveguide.
    • 用于扫描近场显微镜的光学微悬臂梁具有用于传播光的光波导。 光波导具有纵向轴线,光输入/输出端,与光输入/输出端相对的自由端,以及形成在悬臂自由端处的尖端,并且在其端部具有微小孔。 支撑部分具有支撑光波导的第一部分,第二部分和第三部分。 第二部分具有形成在支撑部分中的光学元件引导通道,用于支撑作用在进入光波导的光的光学元件或者从光波导出射的光并用于确定光学元件的位置。 第三部分设置在第一部分和第二部分之间,并且具有相对于光波导的纵向轴线以倾斜角设置的表面。 光波导的光输入/输出端突出在第三部分之上,用于减少光学元件和光波导之间的耦合损耗。